Patents by Inventor Paul W. Rummel

Paul W. Rummel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5712592
    Abstract: An RF power amplifier including a splitter, two branch circuits, and a combiner. The splitter has an input line receiving an RF signal, a first output line carrying a first output signal derived from the RF signal, and a second output line carrying a second output signal derived from the RF signal. A first branch circuit receives the first output signal and generates therefrom a first derived signal. A second branch circuit receives the second output signal and generates therefrom a second derived signal therefrom. The first branch circuit includes a first power amplifier and a phase shifting element. The second branch circuit includes a second power amplifier. The combiner, which has a first input receiving the first derived signal and a second input receiving the second derived signal, combines the first and second derived signals to produce a power output signal therefrom.
    Type: Grant
    Filed: March 6, 1995
    Date of Patent: January 27, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Bradley O. Stimson, Paul W. Rummel
  • Patent number: 5175472
    Abstract: An RF plasma power monitor that monitor voltage, current and DC bias adjacent the plasma load and processes the sensed data in a digital data processor to provide true power at the load. Provision is also made for the control of an RF power source to maintain power at the load at a preset level irrespective on impedance fluctuations and reflections.
    Type: Grant
    Filed: December 30, 1991
    Date of Patent: December 29, 1992
    Assignee: Comdel, Inc.
    Inventors: Theodore E. Johnson, Jr., Paul W. Rummel
  • Patent number: 4575714
    Abstract: In a processing system comprising a plurality of modules, the presence of one or more modules is sensed at a control unit through the use of an analog encoder and an A/D converter. The modules terminate selected resistors in a binary resistance network in the analog encoder to produce a unique signal via the A/D converter for each combination of modules in the system. The encoder requires a minimal number of signal lines and no multiplexing of signals.
    Type: Grant
    Filed: March 12, 1984
    Date of Patent: March 11, 1986
    Assignee: Tegal Corporation
    Inventor: Paul W. Rummel