Patents by Inventor Pei-Hsuan Lee
Pei-Hsuan Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20200402795Abstract: Embodiments disclosed herein relate generally to capping processes and structures formed thereby. In an embodiment, a conductive feature, formed in a dielectric layer, has a metallic surface, and the dielectric layer has a dielectric surface. The dielectric surface is modified to be hydrophobic by performing a surface modification treatment. After modifying the dielectric surface, a capping layer is formed on the metallic surface by performing a selective deposition process. In another embodiment, a surface of a gate structure is exposed through a dielectric layer. A capping layer is formed on the surface of the gate structure by performing a selective deposition process.Type: ApplicationFiled: September 4, 2020Publication date: December 24, 2020Inventors: Chih-Chien Chi, Pei-Hsuan Lee, Hung-Wen Su, Hsiao-Kuan Wei, Jui-Fen Chien, Hsin-Yun Hsu
-
Publication number: 20200395257Abstract: In an embodiment, a device includes: a package component including: integrated circuit dies; an encapsulant around the integrated circuit dies; a redistribution structure over the encapsulant and the integrated circuit dies, the redistribution structure being electrically coupled to the integrated circuit dies; sockets over the redistribution structure, the sockets being electrically coupled to the redistribution structure; and a support ring over the redistribution structure and surrounding the sockets, the support ring being disposed along outermost edges of the redistribution structure, the support ring at least partially laterally overlapping the redistribution structure.Type: ApplicationFiled: June 17, 2019Publication date: December 17, 2020Inventors: Shu-Rong Chun, Kuo Lung Pan, Tin-Hao Kuo, Hao-Yi Tsai, Pei-Hsuan Lee, Chien Ling Hwang, Yu-Chia Lai, Po-Yuan Teng, Chen-Hua Yu
-
Publication number: 20200357693Abstract: A method for forming a semiconductor device, includes: forming a metal layer on a semiconductor substrate; forming a dielectric layer over the metal layer; etching a top portion of the dielectric layer; after etching the top portion of the dielectric layer, removing first mist from a bottom portion of the dielectric layer; removing the bottom portion of the dielectric layer to expose the metal layer; performing a pre-clean operation, using an alcohol base vapor or an aldehyde base vapor, on the dielectric layer and the metal layer; and forming a conductor extending through the dielectric layer and in contact with the metal layer.Type: ApplicationFiled: July 27, 2020Publication date: November 12, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jung-Tang WU, Pao-Sheng CHEN, Pei-Hsuan LEE, Szu-Hua WU, Chih-Chien CHI
-
Patent number: 10813887Abstract: The present disclosure provides an acid resistant capsule shell composition including pectin with a degree of esterification (DE) of about 15% to about 40%, and a degree of amidation (DA) of greater than 0% to about 25%; and a divalent cation. An acid resistant capsule shell and a method for manufacturing the acid resistant capsule shell are also provided in the present disclosure.Type: GrantFiled: April 18, 2018Date of Patent: October 27, 2020Assignee: DAH FENG CAPSULE INDUSTRY CO., LTDInventors: Ruei-Jan Chang, Yi-Huei Lin, Pei-Hsuan Lee, Hsin-Yi Chao
-
Publication number: 20200335477Abstract: A method of manufacturing an integrated fan-out (InFO) package includes at least the following steps. A package array is formed. A core layer and a dielectric layer are sequentially stacked over the package array. The core layer includes a plurality of cavities. A plurality of first conductive patches is formed on the dielectric layer above the cavities.Type: ApplicationFiled: July 8, 2020Publication date: October 22, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Albert Wan, Ching-Hua Hsieh, Chung-Hao Tsai, Chuei-Tang Wang, Chao-Wen Shih, Han-Ping Pu, Chien-Ling Hwang, Pei-Hsuan Lee, Tzu-Chun Tang, Yu-Ting Chiu, Jui-Chang Kuo
-
Patent number: 10790142Abstract: Embodiments disclosed herein relate generally to capping processes and structures formed thereby. In an embodiment, a conductive feature, formed in a dielectric layer, has a metallic surface, and the dielectric layer has a dielectric surface. The dielectric surface is modified to be hydrophobic by performing a surface modification treatment. After modifying the dielectric surface, a capping layer is formed on the metallic surface by performing a selective deposition process. In another embodiment, a surface of a gate structure is exposed through a dielectric layer. A capping layer is formed on the surface of the gate structure by performing a selective deposition process.Type: GrantFiled: January 25, 2018Date of Patent: September 29, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Chien Chi, Hsiao-Kuan Wei, Hung-Wen Su, Pei-Hsuan Lee, Hsin-Yun Hsu, Jui-Fen Chien
-
Patent number: 10770288Abstract: Embodiments disclosed herein relate generally to capping processes and structures formed thereby. In an embodiment, a conductive feature, formed in a dielectric layer, has a metallic surface, and the dielectric layer has a dielectric surface. The dielectric surface is modified to be hydrophobic by performing a surface modification treatment. After modifying the dielectric surface, a capping layer is formed on the metallic surface by performing a selective deposition process. In another embodiment, a surface of a gate structure is exposed through a dielectric layer. A capping layer is formed on the surface of the gate structure by performing a selective deposition process.Type: GrantFiled: November 30, 2018Date of Patent: September 8, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Chien Chi, Pei-Hsuan Lee, Hung-Wen Su, Hsiao-Kuan Wei, Jui-Fen Chien, Hsin-Yun Hsu
-
Patent number: 10756052Abstract: A method of manufacturing an integrated fan-out (InFO) package includes at least the following steps. A package array is formed. A dielectric layer having a core layer formed thereon is provided. The core layer includes a plurality of cavities penetrating through the core layer. The dielectric layer and the core layer are attached onto the package array such that the core layer is located between the dielectric layer and the package array. A plurality of first conductive patches is formed on the dielectric layer above the cavities.Type: GrantFiled: July 28, 2019Date of Patent: August 25, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Albert Wan, Ching-Hua Hsieh, Chung-Hao Tsai, Chuei-Tang Wang, Chao-Wen Shih, Han-Ping Pu, Chien-Ling Hwang, Pei-Hsuan Lee, Tzu-Chun Tang, Yu-Ting Chiu, Jui-Chang Kuo
-
Patent number: 10727118Abstract: In a method for manufacturing a semiconductor device, a substrate is provided. Various first metal layers are formed on the substrate. A dielectric structure with through holes is formed over the first metal layers. The through holes expose the first metal layers. A pre-clean operation is performed on the dielectric structure and the first metal layers by using an alcohol base vapor and/or an aldehyde base vapor as a reduction agent. Conductors are formed on the first metal layers. In forming the conductors, the through holes are filled with the conductors.Type: GrantFiled: April 27, 2018Date of Patent: July 28, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jung-Tang Wu, Pao-Sheng Chen, Pei-Hsuan Lee, Szu-Hua Wu, Chih-Chien Chi
-
Publication number: 20200211922Abstract: In an embodiment, a device includes: a package component including integrated circuit dies, an encapsulant around the integrated circuit dies, a redistribution structure over the encapsulant and the integrated circuit dies, and sockets over the redistribution structure; a mechanical brace physically coupled to the sockets, the mechanical brace having openings, each one of the openings exposing a respective one of the sockets; a thermal module physically and thermally coupled to the encapsulant and the integrated circuit dies; and bolts extending through the thermal module, the mechanical brace, and the package component.Type: ApplicationFiled: August 1, 2019Publication date: July 2, 2020Inventors: Shu-Rong Chun, Kuo Lung Pan, Pei-Hsuan Lee, Chien Ling Hwang, Yu-Chia Lai, Tin-Hao Kuo, Hao-Yi Tsai, Chen-Hua Yu
-
Publication number: 20200134810Abstract: The present disclosure provides a method and a system for scanning wafer. The system captures a defect image of a wafer, and generates a reference image corresponding to the first defect image based on a reference image generation model. The system generates a defect marked image based on the defect image and the reference image.Type: ApplicationFiled: February 26, 2019Publication date: April 30, 2020Inventors: PEI-HSUAN LEE, CHIEN-HSIANG HUANG, KUANG-SHING CHEN, KUAN-HSIN CHEN, CHUN-CHIEH CHIN
-
Publication number: 20200118893Abstract: A method for inline inspection during semiconductor wafer fabrication is provided. The method includes forming a plurality of test structures on a semiconductor wafer along two opposite directions. An offset distance between a sample feature and a target feature of each of the test structures increases gradually along the two opposite directions. The method further includes producing an image of the test structures. The method also includes performing image analysis of the image to recognize a position with an extreme of a gray level. In addition, the method includes calculating an overlay error according to the recognized position.Type: ApplicationFiled: December 16, 2019Publication date: April 16, 2020Inventors: Shang-Wei FANG, Jing-Sen WANG, Yuan-Yao CHANG, Wei-Ray LIN, Ting-Hua HSIEH, Pei-Hsuan LEE, Yu-Hsuan HUANG
-
Publication number: 20200044306Abstract: An electronic device and a manufacturing method thereof are provided. The electronic device includes a chip package, a core dielectric layer disposed on the chip package, and an antenna pattern disposed on the core dielectric layer opposite to the chip package. The chip package includes a semiconductor chip, an insulating encapsulation encapsulating the semiconductor chip, and a redistribution structure electrically coupled to the semiconductor chip. The redistribution structure includes a first circuit pattern located at an outermost side of the chip package, and a patterned dielectric layer disposed between the first circuit pattern and the insulating encapsulation. The core dielectric layer is in contact with the first circuit pattern. The core dielectric layer and the patterned dielectric layer are of different materials. The antenna pattern is electrically coupled to the chip package.Type: ApplicationFiled: April 10, 2019Publication date: February 6, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Pei-Hsuan Lee, Ching-Hua Hsieh, Chien-Ling Hwang, Yu-Ting Chiu, Jui-Chang Kuo
-
Publication number: 20200043815Abstract: A method includes: coupling a first end of a first conductive trace to a free electron source; scanning exposed surfaces of the first and a second conductive traces with an electron beam, the first conductive trace and a second conductive trace being alternately arranged and spaced apart; obtaining an image of the first conductive trace and the second conductive trace while performing the scanning; and determining a routing characteristic of the first conductive trace and the second conductive trace based on the image.Type: ApplicationFiled: January 16, 2019Publication date: February 6, 2020Inventors: PEI-HSUAN LEE, YU-HSUAN HUANG, CHIA-CHIA KAN
-
Publication number: 20200023064Abstract: The present invention relates to a modified starch and a method for obtaining the modified starch by using a debranching enzyme, such as isoamylase, pullulanase, limit dextrinase and the like. The debranching enzyme modified starch of present invention exhibits excellent film-forming capacity, film strength, and gelation ability, so as to be used as a material for making hard capsules without the use of coagulants and plasticizers.Type: ApplicationFiled: September 5, 2018Publication date: January 23, 2020Inventors: Ruei-Jan CHANG, Hsin-Yi CHAO, Pei-Hsuan LEE, Wei-Yu CHEN
-
Patent number: 10510623Abstract: A method for inline inspection during semiconductor wafer fabrication is provided. The method includes forming a plurality of test structures on a semiconductor wafer along two opposite directions. An offset distance between a sample feature and a target feature of each of the test structures increases gradually along the two opposite directions. The method further includes producing an image of the test structures. The method also includes performing image analysis of the image to recognize a position with an extreme of a gray level. In addition, the method includes calculating an overlay error according to the recognized position.Type: GrantFiled: December 27, 2017Date of Patent: December 17, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shang-Wei Fang, Jing-Sen Wang, Yuan-Yao Chang, Wei-Ray Lin, Ting-Hua Hsieh, Pei-Hsuan Lee, Yu-Hsuan Huang
-
Publication number: 20190355694Abstract: A method of manufacturing an integrated fan-out (InFO) package includes at least the following steps. A package array is formed. A dielectric layer having a core layer formed thereon is provided. The core layer includes a plurality of cavities penetrating through the core layer. The dielectric layer and the core layer are attached onto the package array such that the core layer is located between the dielectric layer and the package array. A plurality of first conductive patches is formed on the dielectric layer above the cavities.Type: ApplicationFiled: July 28, 2019Publication date: November 21, 2019Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Albert Wan, Ching-Hua Hsieh, Chung-Hao Tsai, Chuei-Tang Wang, Chao-Wen Shih, Han-Ping Pu, Chien-Ling Hwang, Pei-Hsuan Lee, Tzu-Chun Tang, Yu-Ting Chiu, Jui-Chang Kuo
-
Publication number: 20190321301Abstract: The present disclosure provides an acid resistant capsule shell composition including pectin with a degree of esterification (DE) of about 15% to about 40%, and a degree of amidation (DA) of greater than 0% to about 25%; and a divalent cation. An acid resistant capsule shell and a method for manufacturing the acid resistant capsule shell are also provided in the present disclosure.Type: ApplicationFiled: April 18, 2018Publication date: October 24, 2019Inventors: RUEI-JAN CHANG, YI-HUEI LIN, PEI-HSUAN LEE, HSIN-YI CHAO
-
Patent number: 10366966Abstract: A method of manufacturing an integrated fan-out (InFO) package includes at least the following steps. A package array is formed. A dielectric layer and a core material layer are sequentially formed on a first carrier. A portion of the core material layer is removed to form a core layer having a plurality of cavities. The first carrier, the dielectric layer, and the core layer are attached onto the package array such that the core layer is located between the dielectric layer and the package array. The first carrier is removed from the dielectric layer. A plurality of first conductive patches is formed on the dielectric layer above the cavities.Type: GrantFiled: May 17, 2018Date of Patent: July 30, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Albert Wan, Ching-Hua Hsieh, Chung-Hao Tsai, Chuei-Tang Wang, Chao-Wen Shih, Han-Ping Pu, Chien-Ling Hwang, Pei-Hsuan Lee, Tzu-Chun Tang, Yu-Ting Chiu, Jui-Chang Kuo
-
Publication number: 20190198403Abstract: A method for inline inspection during semiconductor wafer fabrication is provided. The method includes forming a plurality of test structures on a semiconductor wafer along two opposite directions. An offset distance between a sample feature and a target feature of each of the test structures increases gradually along the two opposite directions. The method further includes producing an image of the test structures. The method also includes performing image analysis of the image to recognize a position with an extreme of a gray level. In addition, the method includes calculating an overlay error according to the recognized position.Type: ApplicationFiled: December 27, 2017Publication date: June 27, 2019Inventors: Shang-Wei FANG, Jing-Sen WANG, Yuan-Yao CHANG, Wei-Ray LIN, Ting-Hua HSIEH, Pei-Hsuan LEE, Yu-Hsuan HUANG