Patents by Inventor Pei-Shan Shih

Pei-Shan Shih has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of detecting photolithographic hotspots
    Patent number: 9508138
    Abstract: A method for detecting photolithographic hotspots is disclosed. After receiving layout data, an aerial image simulation is conducted to extract aerial image intensity indices. Based on the combination of one or more aerial image intensity indices, various aerial image detectors are generated. The value of aerial image detectors is verified to determine the position and type of the photolithographic hotspots.
    Type: Grant
    Filed: June 18, 2015
    Date of Patent: November 29, 2016
    Assignee: Powerchip Technology Corporation
    Inventors: Yi-Shiang Chang, Chia-Chi Lin, Shin-Shing Yeh, Pei-Shan Shih, Jun-Cheng Lai
  • METHOD OF DETECTING PHOTOLITHOGRAPHIC HOTSPOTS
    Publication number: 20160321793
    Abstract: A method for detecting photolithographic hotspots is disclosed. After receiving layout data, an aerial image simulation is conducted to extract aerial image intensity indices. Based on the combination of one or more aerial image intensity indices, various aerial image detectors are generated. The value of aerial image detectors is verified to determine the position and type of the photolithographic hotspots.
    Type: Application
    Filed: June 18, 2015
    Publication date: November 3, 2016
    Inventors: Yi-Shiang Chang, Chia-Chi Lin, Shin-Shing Yeh, Pei-Shan Shih, Jun-Cheng Lai