Abstract: A sensor for measuring yaw rate or roll rate of an automotive vehicle comprises a freely rotating inertial disk and an angular rate sensor responsive to the rotation of the inertial disk relative to a housing. In one embodiment the inertial disk presents an alternating magnetic field at its circumference. The rate and direction of rotation of the inertial disk relative to its housing is determined by three magnetic field sensors such as linear Hall Effect sensors responsive to the field presented by the inertial disk. In another embodiment electronic cameras measure movement of fiducial marks on the inertial disk. Air surrounds the inertial disk and air viscosity gradually brings rotation to a stop. For yaw rate measurement the disk axis is oriented vertically and the inertial disk is supported in the radial direction by low friction bearings such as ball bearings or magnetic bearings and in the axial direction by substantially frictionless bearings such as magnetic bearings.

Abstract: A load cell particularly useful for a seat occupant weight sensing system includes a liquid filled chamber and a pressure sensor providing an electric signal indicating the pressure in the liquid. Four load cells supporting a seat provide four signals that are added to determine the weight of the seat occupant. The load cell comprises two flanged conical springs stressed to provide preload. One of the springs also forms part of the surface of the liquid filled chamber. The two springs operate in concert to resist side forces and moments. The load cell is responsive to both compressive and tensile forces while being substantially unaffected by lateral forces and moments. A seat belt tension sensor may be included to measure seat belt tension.

Abstract: Apparatus and methods control CMP to uniformly polish a series of wafers. Average motor current I(avg) drawn by, and related average work W(avg) performed by, motors during CMP on the wafers reliably indicate quality of a roughness polishing characteristic of a polishing surface of a polishing pad. A conditioner controller controls a rate at which the quality of the polishing surface is restored by conditioning in relation to a rate of change of the quality of the polishing surface due to the CMP. Motor current is measured and averaged over many CMP-processed wafers. The method defines a baseline range of values of average work and controls conditioning according to whether average work is within the baseline range. When the polishing surface moves at constant velocity relative to each of the wafers that are being polished, a control signal based on average motor current represents the quality of the polishing characteristic.

Abstract: An interfacial force microscope includes a differential-capacitance displacement sensor having a tip mounted on an oscillating member. The sensor generates displacement signals in response to oscillations of the member. A scanner is adjacent the sensor and supports a sample to be imaged. The scanner is actuable to move the sample relative to the sensor to bring the tip into intermittent contact with said sample as the member oscillates. A controller is in communication with the sensor and the scanner. The controller includes a sensor feedback circuit receiving the displacement signals and an AC setpoint signal. The AC setpoint signal has a frequency generally equal to the frequency at the peak of the displacement versus frequency curve of the sensor. The output of the sensor feedback circuit is applied to the sensor to oscillate the member. The controller also provides output to the scanner in response to the displacement signals to control the separation distance between the sensor and the sample.

Abstract: The invention characterizes a seat occupant. Sensors in the seat determine the position of a seat occupant relative to the seat. The position of the seat relative to the vehicle combined with the position of the seat occupant relative to the seat determines the location of the seat occupant relative to the vehicle. The seat occupant is characterized by the magnitude and Q of capacitance between electrodes in the seat and other indications. Situations wherein airbag deployment is not desired are identified. The position of the occupant relative to the seat, the weight of the seat occupant, whether the seat belt is latched, the track position and recline angle of the vehicle seat and vehicle deceleration during a crash are combined with capacitance and other measurements to estimate the position of the occupant relative to a possible deploying airbag as the occupant moves toward the airbag during a crash.

Abstract: Apparatus and methods are disclosed that promote greater polishing uniformity in linear CMP systems by introducing a relative lateral motion between a CMP belt and a rotating polish head securing a wafer. A belt polish module comprises a linear CMP belt forming a loop around an idle roller and a drive roller, first and second pistons engaging, respectively, first and second ends of the idle roller, and a controller configured to vary the forces applied by the first and second pistons to the ends of the idle roller in order to laterally translate the linear CMP belt. A method for linear CMP comprises rotating a wafer about a vertical axis, contacting the rotating wafer against a linear CMP belt moving in a longitudinal direction, and causing a relative lateral motion between the rotating wafer and the linear CMP belt.

Abstract: The armature of a position sensor has one or more electric current conductors adapted to be moved into and out of a gap between two capacitor electrodes. The capacitance between the capacitor electrodes is measured to determine the position of the armature. Electric current in the armature results from electric charges moving in the electric current conductors. The electric current conductors are adapted to restrict electric current therein to directions approximately perpendicular to the surfaces of the capacitor electrodes. Preventing current flow parallel to the surfaces of the capacitor electrodes in the electric current conductors makes the capacitance measurement insensitive to armature movement other than movement that moves the electric current conductors into or out of the gap. The position sensor is simpler and less expensive to make than known capacitance based position sensors.

Abstract: Four load cells supporting a seat or part thereof provide four signals that are added to determine the weight of the seat occupant. Each load cell has two flanged springs stressed to provide preload. The two springs operate in concert to resist side forces and moments, making the load cell responsive to both compressive and tensile forces while being substantially unresponsive to lateral forces and moments tending to cause angular misalignment between input elements. A preferred load cell has a liquid filled chamber and a pressure sensor providing an electric signal indicating the pressure in the liquid, which is related to the applied force. Preferred manufacturing methods make the cost low. A seat belt tension sensor may close a switch at a predetermined seat belt tension or may measure the seat belt tension. A preferred mounting limits side forces to the load cells.

Abstract: A seat occupant weight sensing system includes load cells that receive the weight of a seat occupant. A microprocessor receives indication of force applied to the load cells and may also receive output from a seat belt tension sensor and/or an atmospheric pressure sensor. In a first preferred embodiment four load cells supporting a seat each have a fluid filled chamber, and a pressure sensor in each load cell provides an electric signal indicating the pressure in the fluid. The four signals are added to determine the weight of the seat occupant. In a second preferred embodiment fluid conduits connect the four fluid filled chambers to a common pressure sensor. The load cells comprise two flanged conical springs stressed to provide preload. In the preferred embodiments, a spring is part of the surface of the chamber that confines the fluid. The two springs operate in concert to resist side forces and moments.

Abstract: The invention characterizes a seat occupant. The position of a seat occupant relative to the seat is determined and the position of the seat relative to the vehicle determines the location of the seat occupant relative to the vehicle. The position and other characteristics of the seat occupant are determined from the magnitude and Q of capacitance between electrodes in the seat, thereby distinguishing between a seat occupied by a normally seated person and certain other circumstances wherein deployment of airbags is not desired. The position of the occupant relative to the seat, the weight of the seat occupant, whether the seat belt is latched, the track position and recline angle of the vehicle seat and vehicle deceleration during a crash are used to estimate the position of the occupant relative to a deploying airbag as the occupant moves toward the airbag during the crash.

Abstract: A sensor for sensing torque applied to a shaft such as the steering wheel shaft of a vehicle has a magnetostrictive sleeve and a sensing element responsive to torsional strain in the magnetostrictive sleeve. Each end of the magnetostrictive sleeve is torsionally engaged to a shear leveling member. Each shear leveling member has a region of varying torsional stiffness and a flared end. Each shear leveling member is bonded to the shaft by adhesive at its region of varying torsional stiffness and at its flared end. The regions of varying torsional stiffness and flared ends operate to level the shear stress in the adhesive resulting in uniform shear stress without peaks throughout the adhesive bond. With uniform adhesive shear stress, the maximum torque the adhesive can transmit is limited only by the yield torque of the shaft and the area of adhesive bond.

Abstract: A system for determining the weight of the occupant of a vehicle seat includes a hinge near the forward edge of the seat and a force sensor responsive to downward force at a point well to the rear of the hinge thereby indicating torque about the hinge. The system includes a microprocessor connected for receiving the output of the force sensor. The microprocessor may also receive outputs from an accelerometer responsive to vertical accelerations, a seat back recline angle sensor, a seat track position sensor, a seat belt tension sensor and an atmospheric pressure sensor. In a first embodiment the microprocessor determines the weight of the seat occupant from the outputs of the force sensor and the seat back recline sensor. In a second embodiment the microprocessor determines the weight of the seat occupant from the outputs of the force sensor, the seat back recline sensor and the seat track position sensor.

Abstract: A seat belt tension sensor has an anchor, a seat belt tension receiver, a moving arm force responder, and an arm sensor. The seat belt tension receiver applies force from a seat belt to the force responder. The force responder is made of spring metal bent to have a base for receiving force and one or two arms that are urged to move by the received force. The arm sensor responds to the arm or arms by generating an electric signal. The anchor has an opening through which a seat belt, the seat belt tension receiver and the force responder pass. A cross member of the anchor spans the opening and withstands the large forces applied by the seat belt when the vehicle strikes an obstacle. An edge of the cross member is grooved to engage the base of the force responder in a way that provides low friction during flexing of the base. The base of the force responder operates as a low friction bearing for the movement of the seat belt tension receiver.

Abstract: A seat belt tension sensor has an anchor, a seat belt tension receiver, a moving arm force responder, and an arm sensor. The seat belt tension receiver applies force received from a seat belt to the moving arm force responder. The moving arm force responder is made of spring metal bent to have a base for receiving force and one or two arms that are urged to move by the received force. The arm sensor responds to the arm or arms by generating an electric signal. The anchor has an opening through which a seat belt, the seat belt tension receiver and the moving arm force responder pass. A cross member of the anchor spans the opening and withstands the large forces applied by the seat belt when the vehicle strikes an obstacle. An edge of the cross member is grooved to engage the base of the moving arm force responder in a way that provides low friction during flexing of the base. The base of the moving arm force responder operates as a low friction bearing for the movement of the seat belt tension receiver.

Abstract: A vehicle seat occupant presence and position sensing system for vehicles equipped with air bags comprises means for measuring the magnitude and Q of capacitance between electrodes in the seat. The magnitude and Q are combined by a microprocessor to characterize the seat occupant and, if the occupant is a person, ascertain the distance of the back of the person from the back of the seat thereby distinguishing between a seat occupied by a normally seated person and certain other circumstances in which deployment of air bags is not desired. A microprocessor prevents air bag deployment when the seat has not held a normally seated person immediately prior to an accident. The position of the occupant relative to the seat, the track position and recline angle of the vehicle seat and vehicle deceleration during a crash are used to estimate the position of the occupant relative to a deploying air bag during the crash.

Abstract: A system for determining the weight of the occupant of a vehicle seat includes a hinge near the forward edge of the seat and a force sensor responsive to downward force at a point well to the rear of the hinge thereby indicating torque about the hinge. The occupant weight sensing system is particularly responsive to weight applied to the rearward part of the seat and is less responsive to weight applied to the forward edge of the seat thereby being less affected by the weight of the lower legs and feet of a normally seated adult. The force sensor is preferably of the type that converts mechanical force to fluid pressure and provides a force signal from a pressure sensor responsive to the fluid pressure. The system includes a microprocessor connected for receiving the output of the force sensor. The microprocessor may, optionally, also receive outputs from an accelerometer responsive to vertical accelerations, a seat back recline angle sensor and a seat track position sensor.

Abstract: A combined heat and electricity generating unit is suitable for use in class 8 trucks and the like. When it is operating it provides heat for keeping the engine and cabin warm and electricity for use by the electricity consuming devices in the cabin. It is a closed cycle system that includes a radial inlet turbine driven by a low pressure vaporized and superheated working fluid, an oil fired heater for vaporizing the working fluid, a pump for pumping condensed working fluid, a heat exchanger for heating engine coolant with heat from the condensing working fluid and an electric generator for converting energy produced by the turbine to electricity.

Abstract: A force sensor for sensing the weight of a vehicle seat occupant for a vehicle's occupant protection system has a pressure sensor responsive to hydraulic pressure resulting from axial force applied to the force sensor. A constant force spring in the form of a diaphragm with two flanges simultaneous functions as a seal, a constant force bias spring, an armature support resistant to radial forces and a piston for converting force to hydraulic pressure. Two studs receive applied force. An electrical insulator is sealed to the walls of a passage inside of one of the studs to provide electrical communication while sealing against liquid leakage. A pressure sensor is mounted on the electrical insulator and connected to electrical conductors in the insulator by stitch bonding. The diaphragm resists radial movement while allowing axial movement thereby making the sensor insensitive to radial forces. By being a constant force spring the diaphragm makes the sensor insensitive to temperature variations.

Abstract: An audio device 1 is installed in a motor vehicle with a vehicle security system 2, 3, 4. The radio 1 has circuitry 21 to detect a connection to the vehicle power supply, a microprocessor 11 to inhibit the operation of the radio after an interruption of the connection, an interface 6 and a connection to a bus 9, 10 for communicating data between the radio 1 and the vehicle security system 2, 3, 4, and a data verification unit 15 with a non-volatile memory 13 for verifying data communicated to the radio. Following an interruption of the connection the radio is automatically reset to operational if the data are communicated and verified, and if the data are not communicated or not verified the radio may only be reset manually.

Abstract: A combined heat and electricity generating unit is suitable for use in single family homes and the like. When it is operating it provides heat for heating the home and electricity for use by the electricity consuming devices in the home and the excess is available for sale to the power utility. It includes an air compressor, a fuel pump, a turbine driven by heated combustion products and an electric motor-generator for driving the fuel pump and air compressor and converting energy produced by the turbine to electricity. In an alternate embodiment the electric motor-generator is replaced by an electric motor and an electric generator. In the case where gaseous fuel is used the fuel pump may be a positive displacement gas compressor. The pressurized combustion products enable a particularly efficient and inexpensive heat exchanger. The air compressor maintains a slight vacuum in the housing thereby eliminating risk of combustion products escaping.