Patents by Inventor Qingyun Chen

Qingyun Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070062408
    Abstract: Methods and compositions for electrolessly depositing Co, Ni, or alloys thereof onto a substrate in manufacture of microelectronic devices. Grain refiners, levelers, oxygen scavengers, and stabilizers for electroless Co and Ni deposition solutions.
    Type: Application
    Filed: October 5, 2005
    Publication date: March 22, 2007
    Applicant: Enthone Inc.
    Inventors: Qingyun Chen, Charles Valverde, Vincent Paneccasio, Nicolai Petrov, Daniel Stritch, Christian Witt, Richard Hurtubise
  • Publication number: 20070066057
    Abstract: Methods and compositions for electrolessly depositing Co, Ni, or alloys thereof onto a substrate in manufacture of microelectronic devices. Grain refiners, levelers, oxygen scavengers, and stabilizers for electroless Co and Ni deposition solutions.
    Type: Application
    Filed: September 20, 2005
    Publication date: March 22, 2007
    Applicant: Enthone Inc.
    Inventors: Qingyun Chen, Charles Valverde, Vincent Paneccasio, Nicolai Petrov, Daniel Stritch, Christian Witt, Richard Hurtubise
  • Publication number: 20070066058
    Abstract: Methods and compositions for electrolessly depositing Co, Ni, or alloys thereof onto a substrate in manufacture of microelectronic devices. Grain refiners, levelers, oxygen scavengers, and stabilizers for electroless Co and Ni deposition solutions.
    Type: Application
    Filed: October 5, 2005
    Publication date: March 22, 2007
    Applicant: Enthone Inc.
    Inventors: Qingyun Chen, Charles Valverde, Vincent Paneccasio, Nicolai Petrov, Daniel Stritch, Christian Witt, Richard Hurtubise
  • Publication number: 20070066059
    Abstract: Methods and compositions for electrolessly depositing Co, Ni, or alloys thereof onto a substrate in manufacture of microelectronic devices. Grain refiners, levelers, oxygen scavengers, and stabilizers for electroless Co and Ni deposition solutions.
    Type: Application
    Filed: October 5, 2005
    Publication date: March 22, 2007
    Applicant: Enthone Inc.
    Inventors: Qingyun Chen, Charles Valverde, Vincent Paneccasio, Nicolai Petrov, Daniel Stritch, Christian Witt, Richard Hurtubies
  • Publication number: 20060280860
    Abstract: An electroless plating method and composition for depositing Co or Co alloys onto a metal-based substrate in manufacture of microelectronic devices, involving a source of Co ions, a reducing agent for reducing the depositions ions to metal onto the substrate, and an oxime-based compound stabilizer.
    Type: Application
    Filed: June 9, 2005
    Publication date: December 14, 2006
    Applicant: Enthone Inc.
    Inventors: Vincent Paneccasio, Qingyun Chen, Charles Valverde, Nicolai Petrov, Christian Witt, Richard Hurtubise
  • Publication number: 20060188659
    Abstract: A method for electrolessly filling a stacked memory cell interconnect feature comprising electroless deposition from a composition comprising Co ions and a reducing agent by bottom-up filling initiated by reduction to Co metal on an electrically conducting bottom of the feature. An electroless deposition composition for electrolessly depositing Co in a high aspect ratio stacked memory cell interconnect feature, the composition comprising water, Co ions, a complexing agent, a buffering agent, a borane-based reducing agent component, and a hypophosphite reducing agent component. There is a concentration ratio of borane-based reducing agent to hypophosphite reducing agent of less than about 0.5.
    Type: Application
    Filed: February 23, 2005
    Publication date: August 24, 2006
    Applicant: Enthone Inc.
    Inventors: Qingyun Chen, Richard Hurtubise, Christian Witt, Joseph Abys, Daniel Stritch, Charles Valverde
  • Publication number: 20060083850
    Abstract: An electroless plating method and composition for depositing Co, Ni, or alloys thereof onto a metal-based substrate in manufacture of microelectronic devices, involving a source of deposition ions selected from the group consisting of Co ions and Ni ions, a reducing agent for reducing the depositions ions to metal onto the substrate, and a hydrazine-based leveling agent.
    Type: Application
    Filed: March 21, 2005
    Publication date: April 20, 2006
    Applicant: Enthone Inc.
    Inventors: Charles Valverde, Nicolai Petrov, Eric Yakobson, Qingyun Chen, Vincent Paneccasio, Richard Hurtubise, Christian Witt
  • Publication number: 20050275100
    Abstract: A multilayer metal cap over a metal-filled interconnect feature in a dielectric layer for incorporation into a multilayer integrated circuit device, and a method for forming the cap.
    Type: Application
    Filed: June 14, 2004
    Publication date: December 15, 2005
    Inventors: Eric Yakobson, Richard Hurtubise, Christian Witt, Qingyun Chen
  • Patent number: 6859606
    Abstract: A tellurite-based glass composition for use in EDFAs exhibits higher phonon energy without sacrificing optical, thermal or chemical durability properties. The introduction of boron oxide (B2O3) into the Er3+-doped tellurite glasses increases the phonon energy from typically 785 cm?1 up to 1335 cm?1. The inclusion of additional glass components such as Al2O3 has been shown to enhance the thermal stability and particularly the chemical durability of the boro-tellurite glasses. Er:Yb codoping of the glass does further enhance its gain characteristics.
    Type: Grant
    Filed: November 27, 2002
    Date of Patent: February 22, 2005
    Assignee: NP Photonics, Inc.
    Inventors: Shibin Jiang, Tao Luo, Qingyun Chen, Sandrine Hocde
  • Publication number: 20040101269
    Abstract: A tellurite-based glass composition for use in EDFAs exhibits higher phonon energy without sacrificing optical, thermal or chemical durability properties. The introduction of boron oxide (B2O3) into the Er3+-doped tellurite glasses increases the phonon energy from typically 785 cm−1 up to 1335 cm−1. The inclusion of additional glass components such as Al2O3 has been shown to enhance the thermal stability and particularly the chemical durability of the boro-tellurite glasses. Er:Yb codoping of the glass does further enhance its gain characteristics.
    Type: Application
    Filed: November 27, 2002
    Publication date: May 27, 2004
    Applicant: NP Photonics, Inc.
    Inventors: Shibin Jiang, Tao Luo, Qingyun Chen, Sandrine Hocde