Abstract: The present disclosure provides a filter unit and a manufacturing method therefor, and an electronic device, relating to the technical field of radio frequency micro-electromechanical systems. The filter unit includes a resonant structure; and a substrate disposed at one side of the resonant structure, the substrate including a modified structure and a supporting structure surrounding the modified structure, and a cavity being formed between the modified structure and the resonant structure. The filter unit provided in the present disclosure can greatly simplify the process manufacturing flow and reduce the process manufacturing procedure difficulty by forming a cavity between the modified structure and the resonant structure.

Abstract: A filter and a manufacturing method thereof are provided. The filler includes a first inductor, and further includes: a base substrate, having a plurality of through-holes passing therethrough; a plurality of conductive pillars, respectively corresponding to the through-holes, filled in the through-hole corresponding thereto, and forming a portion of a coil of the first inductor; a first conductive layer, provided on the base substrate, and comprising a plurality of first conductive wires, the first conductive wire being connected between two conductive pillars, and being configured to form a portion of the coil of the first inductor; and a second conductive layer, provided on a side, away from the base substrate, of the first conductive layer, and comprising second conductive wires, the second conductive wires corresponding to the first conductive wires respectively, and the second conductive wire being connected to the first conductive wire corresponding thereto through a via-hole.

Abstract: Provided is a package structure, including: an insulating dielectric layer having a first surface and a second surface opposite to each other, wherein at least one first accommodation space running from the first surface to the second surface is formed in the insulating dielectric layer; and at least one conductive post in one-to-one correspondence with the at least one first accommodation space, wherein the conductive post is within the corresponding first accommodation space, a material of the conductive post comprises a non-metallic conductive material, and an absolute value of a difference between a thermal expansion coefficient of the conductive post and a thermal expansion coefficient of the insulating dielectric layer is less than or equal to 8×10?6/° C.; wherein the at least one conductive post comprises at least one first conductive post, two end faces of the first conductive post are flush with the first surface and the second surface, respectively.

Abstract: Disclosed are a barometric pressure sensor and a method for preparing the same, and an electronic device, which relate to the technical field of sensors. The barometric pressure sensor includes a base substrate, and a first capacitor provided on a side of the base substrate. The first capacitor includes a first bottom electrode provided close to the base substrate; a first insulating layer provided on a side of the first bottom electrode away from the base substrate; and a first top electrode provided on a side of the first insulating layer away from the base substrate. The first top electrode is provided with a first opening which is configured to expose the first insulating layer at a corresponding position. A dielectric constant of the first insulating layer may vary with different humidity environments, so that a capacitance value of the first capacitor varies.

Abstract: A detection system applied to detection of microfluidic chips, includes: a detection chip including a base substrate, an electrode layer and a microfluidic channel layer for accommodating a sample solution having magnetic beads, the base substrate is provided with a bearing surface, the electrode layer is on the bearing surface, the microfluidic channel layer is on the side of the electrode layer away from the base substrate, the electrode layer includes electrodes including at least one strong magnetic electrode and driving electrodes; a magnetic field device being on the side of the base substrate away from the electrode layer, and having a strong magnetic region corresponding one to one to the strong magnetic electrode; a driving mechanism being connected to the magnetic field device, and driving the magnetic field device to approach or move away from the detection chip in a direction that is perpendicular to the bearing surface.

Abstract: An inductor, a manufacturing method for an inductor, a filter and an electronic device are provided, and belongs to the field of electronic device technology. The inductor includes: a first dielectric substrate including opposite first and second surfaces along a thickness direction of the first dielectric substrate, wherein the first dielectric substrate is provided with first connection vias penetrating through the first dielectric substrate along the thickness direction, and a first groove penetrating through a part of the first dielectric substrate in the thickness direction; first sub-structures on the first surface; second sub-structures on the second surface; first connection electrodes in the first connection vias, wherein the first and second sub-structures are sequentially connected together through the first connection electrodes to form a coil structure of the inductor; and a magnetic core in the first groove to be insulated from the first and second sub-structures and in the coil structure.

Abstract: A filter and a method for manufacturing a filter are provided and belong to the field of electronics technology. The method includes forming at least one inductor and at least one capacitor. Forming the at least one inductor includes: providing a first dielectric substrate; the first dielectric substrate includes a first surface and a second surface opposite to each other along a thickness direction thereof; forming first sub-structures of the inductor on the first surface; forming first connection vias penetrating through the first dielectric substrate in the thickness direction thereof; forming first connection electrodes in the first connection vias; and forming second sub-structures of the inductor on the second surface; the first connection electrodes sequentially connects the first and second sub-structures through the first connection vias to form a coil structure of the inductor.

Abstract: The application provides a microfluidic chip, a temperature measurement method using the same, and an analysis device, which relates to the field of microfluidic technology. The microfluidic chip includes: a substrate and at least one microfluidic module located on the substrate, wherein the microfluidic module includes a droplet control unit and at least one temperature detection unit, and wherein the temperature detection unit includes a temperature sensor, a first lead group and a second lead group, the temperature sensor is fixed on the substrate, the first lead group and the second lead group are electrically connected with the temperature sensor respectively, the first lead group is configured to transmit a constant current to the temperature sensor, and the second lead group is configured to electrically connect the temperature sensor and an external voltmeter.

Abstract: Provided are a substrate, a method for preparing the substrate, an integrated passive device, and an electronic apparatus. The method for preparing the substrate includes: providing a base substrate including at least one blind via, wherein the base substrate includes a first surface and a second surface disposed oppositely, a blind via extends from a first surface side to interior of the base substrate, and an aperture of the blind via gradually decreases in a direction from the first surface to the second surface; forming a connection electrode in the blind via; thinning the base substrate along a direction from the second surface to the first surface, wherein the blind via on the thinned base substrate forms a via hole penetrating the base substrate.

Abstract: A MEMS switch includes an insulating substrate, a driving electrode, a first insulating layer, a first surface of the insulating substrate is provided with a first region, the first region is closer to a surface of the insulating substrate away from the first surface, relative to the first surface, and the driving electrode is on the first region; the first insulating layer completely covers the driving electrode; the first signal transmission line is on a surface of the first insulating layer away from the insulating substrate; and the second signal transmission line includes a signal transmission segment and a cantilever segment connected together as a one-piece member, the signal transmission segment is on the first surface of the insulating substrate, and the cantilever segment is suspended on a side of the first signal transmission line away from the insulating substrate.

Abstract: A digital microfluidics chip and a drive method thereof, and a digital microfluidics apparatus are provided. The digital microfluidics chip includes a first substrate (1) and a second substrate (2) which are oppositely disposed, the first substrate (1) is provided with a plurality of drive regions for driving a droplet to move, at least one drive region includes a drive transistor (50), a drive electrode (60), and a storage capacitor, the drive electrode (60) is connected with the drive transistor (50) and the storage capacitor respectively, and the storage capacitor is configured to be charged when the drive transistor (50) is turned on, and to maintain a voltage signal on the drive electrode (60) when the drive transistor (50) is turned off.

Abstract: A microfluidic substrate has a first straight region, a second straight region, and a first turning region, which is substantially of a ring sector and includes a first arc edge and a second arc edge that are opposite. The microfluidic substrate includes first straight driving electrodes in the first straight region, second straight driving electrodes in the second straight region, and turning driving electrodes the first turning region. A border of each turning driving electrode includes at least one first reference point coinciding with the first arc edge and at least one second reference point coinciding with the second arc edge. A radius of the first arc edge is greater than or equal to (?{square root over (3)}?1) times of a first dimension of a reference electrode, and a radius of the second arc edge is greater than or equal to 3/2 times of the first dimension of the reference electrode.

Abstract: A digital microfluidic apparatus and a driving method therefor. The digital microfluidic apparatus comprises a digital microfluidic chip (10), a thermal control apparatus (20), and an elastic support apparatus (30). The digital microfluidic chip (10) is provided with a droplet channel (91), and the droplet channel (91) is configured to allow droplets (90) to move therein; the thermal control apparatus (20) is disposed on one side of the digital microfluidic chip (10), and is configured to generate at least two independent and non-interference hot zones in the droplet channel (91), and control the temperature of each hot zone; and the elastic support apparatus (30) is disposed on the side of the thermal control apparatus (20) away from the digital microfluidic chip (10), and is configured to drive the thermal control apparatus (20) to be pasted on the surface of the digital microfluidic chip (10).

Abstract: Disclosed are a substrate for a microfluidic device, a microfluidic device, a driving method of the microfluidic device, and a method of manufacturing a substrate for the microfluidic device. The substrate includes: a first base substrate; a first electrode layer on the first base substrate, the first electrode layer including a plurality of drive electrodes. The plurality of drive electrodes define at least one flow channel and at least one functional area in the first substrate, the at least one functional area includes a reagent area, the at least one flow channel includes a reagent area flow channel, the reagent area includes a reagent area liquid storage portion and a droplet shape changing portion, the droplet shape changing portion is adjacent to the reagent area flow channel, and the reagent liquid storage portion is on a side of the droplet shape changing portion away from the reagent area flow channel.

Abstract: The present disclosure provides a substrate for driving droplets, a manufacturing method thereof, and a microfluidic device. The substrate includes a first base substrate a plurality of leads on the first base substrate a plurality of driving electrodes on a side of the plurality of leads away from the first base substrate and a shielding electrode on the side of the plurality of leads away from the first base substrate and grounded. Each of the plurality of leads is electrically connected to at least one of the plurality of driving electrodes, an orthographic projection of the shielding electrode on the first base substrate and an orthographic projection of at least one of the plurality of leads on the first base substrate at least partially overlap, and the shielding electrode is electrically insulated from the plurality of driving electrodes.

Abstract: The present disclosure relates to a microfluidic substrate, a microfluidic device and a driving method thereof. The microfluidic substrate includes a first area, the first area includes a first module for generating droplets, the first module includes a first electrode pair and a second electrode pair, and the first electrode pair and the second electrode pair are arranged in a crisscross pattern. The first electrode pair includes a first electrode and a second electrode, and the second electrode pair includes a third electrode and a fourth electrode.

Abstract: An embodiment of the present disclosure provides a microfluidic chip, including: a first substrate; wherein the first substrate includes a first base, a first electrode layer on the first base; the first electrode layer includes a plurality of first electrodes at intervals along a first direction, wherein a cross-sectional shape of the first electrode parallel to the first base is a centrosymmetric shape, and the cross-sectional shape includes: a first boundary and a second boundary opposite to each other in the first direction; a shape of the first boundary is a centrosymmetric curve, a distance between two end points of the first boundary in a second direction perpendicular to the first direction is less than a length of the first boundary; the second boundary has a same shape and length as the first boundary, and the first and second boundaries are parallel to each other in the first direction.

Abstract: The present disclosure provides a microfluidic chip, and belongs to the field of biological detection technology. The microfluidic chip is divided into a middle region and a peripheral region surrounding the middle region; the middle region includes a liquid storage region and a detection region; the microfluidic chip includes a first substrate and a second substrate opposite to each other; the first substrate includes a first base plate and a first electrode layer; the second substrate includes a second base plate and a second electrode layer; wherein a liquid storage tank and a liquid inlet are on a side of the first base plate proximal to the second substrate, the liquid inlet penetrates through a bottom of the liquid storage tank; the liquid storage tank and the liquid inlet are both in the liquid storage region.

Abstract: A micro-fluidic chip is provided. The micro-fluidic chip includes: a first base substrate; a first electrode on the first base substrate and electrically coupled to a wire at a driving end; a second electrode on a side of the first electrode away from the first base substrate and spaced apart and electrically insulated from the first electrode, the second electrode including a plurality of sub-blocks of the second electrode, and an orthographic projection of the second electrode on the first base substrate being at least partially overlapped with an orthographic projection of the first electrode on the first base substrate; and voltage-dividing resistors coupled to the plurality of sub-blocks of the second electrode in one-to-one correspondence and electrically coupled to a ground wire.

Abstract: The disclosure provides a micro-fluidic chip, and belongs to the field of chip technology. The microfluidic chip provided in the present disclosure includes a plurality of microfluidic units, each microfluidic unit includes an operation region and a transition region located on at least one side of the operation region, the transition regions at adjacent side of two adjacent microfluidic units are disposed opposite to each other. Each microfluidic unit includes: a first substrate; a first electrode layer disposed on the first substrate, the first electrode layer including a plurality of first sub-electrodes located in the operation region and at least one second sub-electrode located in the transition region, and the at least one second sub-electrode configured to drive a droplet to move from one of the plurality of microfluidic units to an adjacent microfluidic unit.