Patents by Inventor R. Steve West

R. Steve West has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Target and dark space shield for a physical vapor deposition system
    Patent number: 5658442
    Abstract: The disadvantages heretofore associated with the prior art are overcome by the present invention of an improved target for a physical deposition (PVD) system. The improved target has a portion of the target side wall the overhangs and shadows the side wall of the target thus preventing material from depositing on the edge. To further reduce contaminant generation, the improved target is combined with an improved dark space shield having a first end and a second end, where the second end conventionally supports a collimator and the first end has an inner surface that is substantially vertical.
    Type: Grant
    Filed: March 7, 1996
    Date of Patent: August 19, 1997
    Assignee: Applied Materials, Inc.
    Inventors: James Van Gogh, Fernand Dorleans, Christopher Hagerty, Mark Lloyd, Howard Tang, Siyaun Yang, R. Steve West