Abstract: Disclosed is a wavelength selection module for a metrology apparatus. The wavelength selection module comprises one or more filter elements being operable to receive an input radiation beam comprising multiple wavelengths to provide selective control of a wavelength characteristic of a corresponding output radiation beam. At least one of said one or more filter elements comprises at least two linear variable filters.

Abstract: A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a radiation source and to reflect portions of radiation along one or more directions to form a one or more branch radiation beams for provision to one or more tools.

Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.

Abstract: The invention relates to a network of luminaires for an automatic lighting system comprising at least two luminaires (1) and at least one controller, each luminaire comprising a light source (4) and at least two communication ports (3, 6, 9, 12), wherein the communication ports have predetermined configuration and orientation (3, 6, 9, 12), each communication port (3, 6, 9, 12) is adapted to be communicatively connected to a communication port of another luminaire (1) in said network in the direction and orientation of the port (3, 6, 9, 12), and wherein the identification of unused communication ports (3, 6, 9, 12) is communicated to said at least one controller.

Abstract: A method for controlling an angular distribution of a light-beam emitted by a light-output device (102, 200) comprising a first set of light-sources (105, 211) comprising at least one light-source configured to emit light within a first angular range (221, 231, 241) and second set of light-sources (107, 210) comprising at least one light-source configured to emit light within a second angular range (222, 232, 242), wherein the first angular range is different from the second angular range. The method comprises the steps of: receiving (401) a dimmer setting (VDS) from a dimmer (101); controlling (404), if the dimmer setting is within a first predetermined range, the first set of light-sources to emit light within the first angular range; and controlling (405), if the dimmer setting is within a second predetermined range, the second set of light-sources to emit light within the second angular range.

Abstract: The invention relates to an illumination module (1) comprising a plurality of light sources (2) distributed over a light guiding plate (3) accommodating said light sources and capable of guiding light of said light sources through at least a portion of said plate. The light guiding plate has one or more out-coupling structures (4), preferably arranged around each light source, so that at least a portion of the light emitted by a first light source (2A) and at least a portion of the light emitted by a second adjacent light source (2B) mix within said light guiding plate before leaving said illumination module as a single substantially collimated mixed light beam. The invention further relates to a lamp and a display apparatus comprising such an illumination module.

Abstract: A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a radiation source and to reflect portions of radiation along one or more directions to form a one or more branch radiation beams for provision to one or more tools.

Abstract: A lighting system comprises a plurality of discrete light emitting diode modules and a translucent portion containing the plurality of discrete light emitting diode modules. Each light emitting diode module comprises a light emitting diode and at least a first module electrode and a second module electrode. The first module electrode is in electrical connection with the cathode of the light emitting diode and the second module electrode is in electrical connection with the anode of the light emitting diode.

Abstract: The invention relates to a light-output device (1; 10; 30) controllable to provide different light-output functions. The light-output device comprises a light-source arrangement (12; 31) configured to emit light; and a light-guiding system (10; 32) arranged to receive the light and configured to guide the light to at least one light-output surface of the light-guiding system. The light-guiding system (10; 32) comprises at least a first light-guide (11b; 37) and a second light-guide (11a; 40, 41); and the light-guiding system (10; 32) is movable relative to the light-source arrangement (12; 31) between at least a first position where light output by the light-source arrangement is guided by the first light-guide (11b; 37) to provide a first light-output function, and a second position where light output by the light-source arrangement is guided by the second light-guide (11a; 40, 41) to provide a second light-output function, different from the first light-output function.

Abstract: A luminaire comprising lamellae holding means, a light source, and a set of lamellae comprising a plurality of (inclined) lamellae. The set of lamellae extends at least partially over a light emission window. The lamellae have a reflective front surface facing towards the light source, said front surface being designed to partially reflect light to the exterior and partially transmit light, for example in that the lamellae are diffusely translucent or have a perforated surface. The set of lamellae is provided with light converging means, for example a Fresnel lens, which optionally are integrated in the lamellae to prevent the luminaire becoming too bulky.

Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.

Abstract: A lighting system comprises a plurality of discrete light emitting diode modules and a translucent portion containing the plurality of discrete light emitting diode modules. Each light emitting diode module comprises a light emitting diode and at least a first module electrode and a second module electrode. The first module electrode is in electrical connection with the cathode of the light emitting diode and the second module electrode is in electrical connection with the anode of the light emitting diode.

Abstract: The invention provides a multi-beam illumination system (1) for providing an illumination image (53). The multi-beam illumination system (1) has a plurality of light sources (11) with optional collimating optics (12), arranged to generate a plurality of light beams (13); a panel (30) comprising a plurality of panel segments (32) in a panel plane (35) at a first distance (d1) and arranged to contain a plurality of segment patterns (34) on the corresponding panel segments (32); and an imaging lens array (40) comprising a plurality of imaging lenses (42) in an imaging lens plane (45) parallel to the panel plane (35). Each imaging lens (42) of the imaging lens array (40) is arranged to image a corresponding segment pattern (34) of the plurality of segment patterns (34) into a respective projection image (52) of a plurality of projection images (52). The plurality of projection images (52) overlap at a predetermined image distance (Lp) and form the illumination image (53).

Abstract: The invention relates to a network of luminaires for an automatic lighting system comprising at least two luminaires (1) and at least one controller, each luminaire comprising a light source (4) and at least two communication ports (3, 6, 9, 12), wherein the communication ports have predetermined configuration and orientation (3, 6, 9, 12), each communication port (3, 6, 9, 12) is adapted to be communicatively connected to a communication port of another luminaire (1) in said network in the direction and orientation of the port (3, 6, 9, 12), and wherein the identification of unused communication ports (3, 6, 9, 12) is communicated to said at least one controller.

Abstract: The invention relates to a light-output device (1; 10; 30) controllable to provide different light-output functions. The light-output device comprises a light-source arrangement (12; 31) configured to emit light; and a light-guiding system (10; 32) arranged to receive the light and configured to guide the light to at least one light-output surface of the light-guiding system. The light-guiding system (10; 32) comprises at least a first light-guide (11b; 37) and a second light-guide (11a; 40, 41); and the light-guiding system (10; 32) is movable relative to the light-source arrangement (12; 31) between at least a first position where light output by the light-source arrangement is guided by the first light-guide (11b; 37) to provide a first light-output function, and a second position where light output by the light-source arrangement is guided by the second light-guide (11a; 40, 41) to provide a second light-out put function, different from the first light-output function.

Abstract: An electronic system comprises at least a base part, a power source and at least one electronic module adapted to be powered by the power source. The base part is provided with at least two parallel extending, elongated tracks being electrically conductive. At least one parameter of the electronic module is changeable by amending the distance of the electronic module to a predetermined location on the tracks.

Abstract: A method for controlling an angular distribution of a light-beam emitted by a light-output device (102, 200) comprising a first set of light-sources (105, 211) comprising at least one light-source configured to emit light within a first angular range (221, 231, 241) and second set of light-sources (107, 210) comprising at least one light-source configured to emit light within a second angular range (222, 232, 242), wherein the first angular range is different from the second angular range. The method comprises the steps of: receiving (401) a dimmer setting (VDS) from a dimmer (101); controlling (404), if the dimmer setting is within a first predetermined range, the first set of light-sources to emit light within the first angular range; and controlling (405), if the dimmer setting is within a second predetermined range, the second set of light-sources to emit light within the second angular range.

Abstract: This invention relates to a light emitting device (100) having a movable collimating unit for adjusting the output direction of light being emitted from the light emitting device. The light emitting device comprises a base unit (110), and a light output unit (120) which is engaged with the base unit. The light output unit comprises at least one light source (121) for emitting light. The light emitting device further comprises a movably arranged collimating unit (130) for adjusting the direction of the emitted light, which is arranged such that it encompasses a light output portion (125), which is arranged on the light output unit.

Abstract: The invention provides a method of illuminating a 3D object 10 with a modified 2D image of the 3D object 10. Further, the invention provides a dedicated projector 40 for performing this method. This projector 40 further comprises an image sensor 60 to capture a 2D image of the object, which may, after modification into the modified 2D image, be projected by the projector 40 on the 3D object 10.

Abstract: The present invention relates to a light emitting device (1) comprising a stack of a light emitting diode (LED) structure (10) and a light permeable device (20). The light permeable device (20) comprises at least a first and a second section (21, 22), color of light from said first and second section (21, 22) being different from each other. Further, the LED structure (10) comprises at least a first and a second region (11, 12) being individually controllable. The first and second region (11, 12) are associated with the first and second section (21, 22), respectively. The stack further comprises an at least partially reflecting layer (30) arranged such that light from the light permeable device (20), generated in the first and second region (11, 12), is to be mixed within the light emitting device (1).