Patents by Inventor Randall G. Ross

Randall G. Ross has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4849081
    Abstract: In reactive sputtering of silicon, titanium, aluminum or tin in an oxygen-containing atmosphere to deposit a layer of the corresponding oxide on a substrate, the deposition rate is markedly enhanced by addition of chlorine to the atmosphere. The resulting films contain at most minor amounts of chlorine, so that mechanical, chemical and optical properties of the films are not substantially altered by use of chlorine in the process.
    Type: Grant
    Filed: June 22, 1988
    Date of Patent: July 18, 1989
    Assignee: The BOC Group, Inc.
    Inventor: Randall G. Ross