Patents by Inventor Randy Forshey

Randy Forshey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7007822
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Grant
    Filed: May 12, 2003
    Date of Patent: March 7, 2006
    Assignee: The BOC Group, Inc.
    Inventors: Randy Forshey, Kenneth A. Johnson
  • Publication number: 20050150552
    Abstract: A flow control device may include an inlet for passing fluid into the device, an outlet for passing fluid from the device, a pneumatic pressure controlling portion, a fluid flow control valve actuated by pneumatic pressure supplied via the pneumatic pressure controlling portion, a flow meter configured to measure flow rate of the fluid, and a controller configured to control the pneumatic pressure controlling portion at least according to the flow rate measured by the flow meter. Actuation of the fluid flow control valve may cause adjustment of the flow rate.
    Type: Application
    Filed: December 29, 2004
    Publication date: July 14, 2005
    Inventor: Randy Forshey
  • Publication number: 20050044951
    Abstract: The invention relates to systems and methods of measuring low liquid flow rates. The system provides a controller, flow system components, and one or more load cells coupled to a collection vessel. The collection vessel includes a weir that serves as a passage to allow liquid to rise within the weir until the liquid overflows the weir. After the liquid supplied passes a hydraulic stabilization period the controller captures a load cell signal and opens a timing window. At the end of the timing window the controller captures another load cell signal. A controller calculates the mass of the collected liquid over the collection period and the flow rate such as mass rate and/or the volumetric rate. The duration of the timing window depends on the measurement desired. Since the liquid wells up and overflows the weir, the system can make precise measurements of low flow rates. In another feature, feedback control mechanisms are implemented in the batch constant flow method or steady state constant flow method.
    Type: Application
    Filed: August 27, 2003
    Publication date: March 3, 2005
    Inventors: Randy Forshey, Peter Pozniak
  • Publication number: 20040155057
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Application
    Filed: December 31, 2003
    Publication date: August 12, 2004
    Inventors: David Soberanis, Randy Forshey
  • Patent number: 6675987
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relate to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Grant
    Filed: September 29, 2001
    Date of Patent: January 13, 2004
    Assignee: The Boc Group, Inc.
    Inventors: David Soberunie, Randy Forshey
  • Publication number: 20030192920
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Application
    Filed: May 12, 2003
    Publication date: October 16, 2003
    Inventors: Randy Forshey, Kenneth A. Johnson
  • Publication number: 20030010792
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Application
    Filed: May 6, 2002
    Publication date: January 16, 2003
    Inventors: Randy Forshey, Kenneth A. Johnson
  • Publication number: 20020017534
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relate to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Application
    Filed: September 29, 2001
    Publication date: February 14, 2002
    Inventors: David Soberunie, Randy Forshey
  • Patent number: 6340098
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Grant
    Filed: May 30, 2001
    Date of Patent: January 22, 2002
    Assignee: Semco Corporation
    Inventors: David Soberanis, Randy Forshey
  • Publication number: 20010023875
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Application
    Filed: May 30, 2001
    Publication date: September 27, 2001
    Inventors: David Soberanis, Randy Forshey
  • Patent number: 6269975
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Grant
    Filed: May 11, 2000
    Date of Patent: August 7, 2001
    Assignee: Semco Corporation
    Inventors: David Soberanis, Randy Forshey
  • Publication number: 20010002026
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Application
    Filed: May 11, 2000
    Publication date: May 31, 2001
    Inventors: David Soberanis, Randy Forshey
  • Patent number: 6098843
    Abstract: The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
    Type: Grant
    Filed: December 31, 1998
    Date of Patent: August 8, 2000
    Assignees: Silicon Valley Group, Inc., Semco Corporation
    Inventors: David Soberanis, Randy Forshey