Abstract: A system and method are disclosed for controlling an ion beam. A deceleration lens is disclosed for use in an ion implanter. The lens may include a suppression electrode, first and second focus electrodes, and first and second shields. The shields may be positioned between upper and lower portions of the suppression electrode. The first and second shields are positioned between the first focus electrode and an end station of the ion implanter. Thus positioned, the first and second shields protect support surfaces of said first and second focus electrodes from deposition of back-streaming particles generated from said ion beam. In some embodiments, the first and second focus electrodes may be adjustable to enable the electrode surfaces to be adjusted with respect to a direction of the ion beam. By adjusting the angle of the focus electrodes, parallelism of the ion beam can be controlled. Other embodiments are described and claimed.

Abstract: An integrated microfabricated instrument for manipulation, reaction and detection of microliter to picoliter samples. The instrument is suited for biochemical reactions, particularly DNA-based reactions such as the polymerase chain reaction, that require thermal cycling since the inherently small size of the instrument facilitates rapid cycle times. The integrated nature of the instrument provides accurate, contamination-free processing. The instrument may include reagent reservoirs, agitators and mixers, heaters, pumps, and optical or electromechanical sensors. Ultrasonic Lamb-wave devices may be used as sensors, pumps and agitators.

Abstract: An integrated microfabricated instrument for manipulation, reaction and detection of microliter to picoliter samples. The instrument is suited for biochemical reactions, particularly DNA-based reactions such as the polymerase chain reaction, that require thermal cycling since the inherently small size of the instrument facilitates rapid cycle times. The integrated nature of the instrument provides accurate, contamination-free processing. The instrument may include reagent reservoirs, agitators and mixers, heaters, pumps, and optical or electromechanical sensors. Ultrasonic Lamb-wave devices may be used as sensors, pumps and agitators.

Abstract: An integrated microfabricated instrument for manipulation, reaction and detection of microliter to picoliter samples. The instrument is suited for biochemical reactions, particularly DNA-based reactions such as the polymerase chain reaction, that require thermal cycling since the inherently small size of the instrument facilitates rapid cycle times. The integrated nature of the instrument provides accurate, contamination-free processing. The instrument may include reagent reservoirs, agitators and mixers, heaters, pumps, and optical or electromechanical sensors. Ultrasonic Lamb-wave devices may be used as sensors, pumps and agitators.

Abstract: A microstructure suitable for use as a surgical instrument. The microstructure includes a silicon substrate having body and horn portions. The horn portion may include a blade with a forward edge. A piezoelectric actuator may be mechanically coupled to the body portion.

Abstract: A self-excited microelectromechanical device is described. The device includes a resonating structure, such as a cantilever, which responds to a physical phenomenon by generating an induced variable frequency voltage signal corresponding to the physical phenomenon. Self-excitation circuitry connected to the cantilever processes the induced variable frequency voltage signal and produces a variable frequency voltage signal in a resonant pass band of interest that is applied to the cantilever to augment the effect of the physical phenomenon on the cantilever. An exemplary use of the device is as a power line sensor. In this context, the cantilever responds to the electric field associated with a power signal on a power line. The cantilever transforms the voltage signal of the electric field into a corresponding frequency signal. The noise-immune frequency signal can be readily processed to reconstruct the power signals carried by the power line.

Abstract: An integrated microfabricated instrument for manipulation, reaction and detection of microliter to picoliter samples. The instrument is suited for biochemical reactions, particularly DNA-based reactions such as the polymerase chain reaction, that require thermal cycling since the inherently small size of the instrument facilitates rapid cycle times. The integrated nature of the instrument provides accurate, contamination-free processing. The instrument may include reagent reservoirs, agitators and mixers, heaters, pumps, and optical or electromechanical sensors. Ultrasonic Lamb-wave devices may be used as sensors, pumps and agitators.

Abstract: An integrated microfabricated instrument for manipulation, reaction and detection of microliter to picoliter samples. The instrument is suited for biochemical reactions, particularly DNA-based reactions such as the polymerase chain reaction, that require thermal cycling since the inherently small size of the instrument facilitates rapid cycle times. The integrated nature of the instrument provides accurate, contamination-free processing. The instrument may include reagent reservoirs, agitators and mixers, heaters, pumps, and optical or electromechanical sensors. Ultrasonic Lamb-wave devices may be used as sensors, pumps and agitators.

Abstract: An integrated microfabricated instrument for manipulation, reaction and detection of microliter to picoliter samples. The instrument is suited for biochemical reactions, particularly DNA-based reactions such as the polymerase chain reaction, that require thermal cycling since the inherently small size of the instrument facilitates rapid cycle times. The integrated nature of the instrument provides accurate, contamination-free processing. The instrument may include reagent reservoirs, agitators and mixers, heaters, pumps, and optical or electromechanical sensors. Ultrasonic Lamb-wave devices may be used as sensors, pumps and agitators.

Abstract: Micromachined cantilever pressure transducers, which work both as microphones and as microspeakers, are disclosed. These devices are made possible by novel methods for producing flat, thin film multilayer or polymeric cantilevers.

Abstract: A self-excited microelectromechanical device is described. The device includes a resonating structure, such as a cantilever, which responds to a physical phenomenon by generating an induced variable frequency voltage signal corresponding to the physical phenomenon. Self-excitation circuitry connected to the cantilever processes the induced variable frequency voltage signal and produces a variable frequency voltage signal in a resonant pass band of interest that is applied to the cantilever to augment the effect of the physical phenomenon on the cantilever. An exemplary use of the device is as a power meter. In this context, the cantilever responds to the electric field associated with a power signal on a metered line. The cantilever transforms the voltage signal of the electric field into a corresponding frequency signal. The noise-immune frequency signal can be readily processed to reconstruct the power signals carried by the power line.

Abstract: A self-excited microelectromechanical device is described. The device includes a resonating structure, such as a cantilever, which responds to a physical phenomenon by generating an induced variable frequency voltage signal corresponding to the physical phenomenon. Self-excitation circuitry connected to the cantilever processes the induced variable frequency voltage signal and produces a variable frequency voltage signal in a resonant pass band of interest that is applied to the cantilever to augment the effect of the physical phenomenon on the cantilever. An exemplary use of the device is as a power line sensor. In this context, the cantilever responds to the electric field associated with a power signal on a power line. The cantilever transforms the voltage signal of the electric field into a corresponding frequency signal. The noise-immune frequency signal can be readily transmitted and processed to reconstruct the power signals carried by the power line.

Abstract: A position sensor for measuring the distance from a first position to a second position. The sensor may include an elastic wave generator, an acoustical path over which the elastic wave passes, and a transducer to which the wave passes. A measurement loop includes the acoustical path, and has electrical and optical elements. The electrical elements may compare the phases of the transducer signals from which the change in position between the first and second positions are determined. Alternatively, the measurement loop may comprise a feedback loop to produce oscillations and an output frequency. A frequency counter is included in the feedback loop to measure frequency.

Abstract: A microstructure that may be used as an acoustic source or receiver. It comprises a substrate having a thicker section and a thinner section, supporting a membrane. A window is formed in the thinner section. Means are provided for inputting or sensing mechanical energy in the substrate and membrane. The microstructure allows for the design of complex mechanical frequency responses for at least partly mechanical signal processing.

Abstract: A position sensor for measuring the distance from a first position to a second position. The sensor may include an elastic wave generator, an acoustical path over which the elastic wave passes, and a transducer to which the wave passes. A measurement loop includes the acoustical path, and has electrical and optical elements. The electrical elements may compare the phases of the transducer signals from which the change in position between the first and second positions are determined. Alternatively, the measurement loop may comprise a feedback loop to produce oscillations and an output frequency. A frequency counter is included in the feedback loop to measure frequency.

Abstract: An ultrasonic structure which has a thin planar sheet of material forming a Lamb wave propagation medium The propagation medium is coated with a gel. The structure may also include a Lamb wave generator for generating Lamb waves in the propagation medium and an output device for producing an electrical signal representative of the propagation characteristics of the Lamb waves propagating along the propagation medium. A measuring device can be included to measure selected characteristics of the output electrical signal. The propagation medium has some physical characteristics that are determined by the value of a measurand acting on the medium and the determined physical characteristics determine the propagation characteristics of the Lamb waves which are propagated along the medium. When the sensor is acted on by a measurand to determine the physical characteristics of the propagation medium, the characteristics of the electrical signal are also determined.

Abstract: An ultrasonic sensor which has a thin planar sheet of material forming a Lamb wave propagation medium, the sheet having a thickness which is no greater than about twenty microns. The sensor also includes a Lamb wave generator for generating Lamb waves in the propagation medium and an output device for producing an electrical signal representative of the propagation characteristics of the Lamb waves propagating along the propagation medium. A measuring device is included in the sensor to measure selected characteristics of the output electrical signal. The propagation medium has some physical characteristics that are determined by the value of a measurand acting on the medium and the determined physical characteristics determine the propagation characteristics of the Lamb waves which are propagated along the medium. When the sensor is acted on by a measurand to determine the physical characteristics of the propagation medium, the characteristics of the electrical signal are also determined.

Abstract: In a conventional non-trunked communication system (10) having a plurality of radios (13) being able to transmit and receive communication containing an ID number on a channel, a method is provided for any one of these radios (13) to select (36) the monitoring of transmissions of another radio communicating on the channel. In a receiving radio, the ID number corresponding to another radio is selectively entered (36) in a memory list of desirable ID's (35) to be monitored (35) by the receiving radio (13). When transmission containing an ID number (42) of a transmitting radio is received from the transmitting radio, the ID number of the transmitting radio is compared (48) to the memory list to find a match. A squelching means (25) is unmuted (31) only if a match is found and other unsquelching conditions are satisfied (56).

Abstract: An ultrasonic sensor which has a thin planar sheet of material forming a Lamb wave propagation medium, the sheet having a thickness which is no greater than about twenty microns. The sensor also includes a Lamb wave generator for generating Lamb waves in the propagation medium and an output device for producing an electrical signal representative of the propagation characteristics of the Lamb waves propagating along the propagation medium. A measuring device is included in the sensor to measure selected characteristics of the output electrical signal. The propagation medium has some physical characteristics that are determined by the value of a measurand acting on the medium and the determined physical characteristics determine the propagation characteristics of the Lamb waves which are propagated along the medium. When the sensor is acted on by a measurand to determine the physical characteristics of the propagation medium, the characteristics of the electrical signal are also determined.

Abstract: A micromotor device for moving a micro-miniature element along a predetermined path comprises a membrane supported on a substrate having an upper planar surface for supporting the element to be moved and a lower surface. An ultrasonic transducer attached to one membrane surface is supplied with electrical power to produce ultrasonic energy and thereby cause a flexural wave action in the membrane. The membrane may be comprised of a layer of piezoelectric material in one embodiment or an electrically insulating amorphous material which utilizes an electrostriction phenomenon in another embodiment. The generated flexural wave action produces linear movement of one or more microelements on a membrane for a variety of applications. Control of the moving elements may be maintained using a linear position sensor which includes a circuit for producing feedback control signals.