Patents by Inventor Richard Michael Lambert

Richard Michael Lambert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF CONTROLLING CONTAMINATION OF A SURFACE
    Publication number: 20100043837
    Abstract: A method is described of controlling contamination of a surface exposed to a carbonaceous material and ionising radiation, such as EUV radiation, DUV radiation or electrons. The method comprises cyclically supplying to the surface a first gas comprising an oxidising species, for example NO, for reacting with carbonaceous deposits formed on the surface from the carbonaceous material, followed by a second gas comprising a reducing species, for example CO, for reacting with oxidising species on the surface.
    Type: Application
    Filed: May 25, 2007
    Publication date: February 25, 2010
    Applicants: THE BOC GROUP PLC, CAMBRIDGE ENTERPRISE LIMITED
    Inventors: Robert Bruce Grant, Richard Michael Lambert, David Jonathan Davis, Georgios Kyriakou