Patents by Inventor Richard W. Heebner

Richard W. Heebner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Technique for inspecting semiconductor wafers for particulate contamination
    Patent number: 4441124
    Abstract: A laser beam (88) is raster scanned over the surface of a patterned semiconductor wafer (66) at an angle normal thereto. A plurality of detectors, radially spaced from the wafer (66) and substantially coplanar therewith detect light scattered from contaminating particulate thereon. The detected light is converted into a video signal that is forwarded to a video monitor (84) to display the particulate material while eliminating the patterned surface background.
    Type: Grant
    Filed: November 5, 1981
    Date of Patent: April 3, 1984
    Assignee: Western Electric Company, Inc.
    Inventors: Richard W. Heebner, Randal L. Schmitt