Patents by Inventor Robert D. Rathmell

Robert D. Rathmell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6476399
    Abstract: A system for inhibiting the transport of contaminant particles with an ion beam includes a particle charging system for charging particles within a region through which the ion beam travels. An electric field is generated downstream relative to the charged region so as to urge charged particles away from a direction of travel for the ion beam.
    Type: Grant
    Filed: September 1, 2000
    Date of Patent: November 5, 2002
    Assignee: Axcelis Technologies, Inc.
    Inventors: Eric R. Harrington, Victor M. Benveniste, Michael A. Graf, Robert D. Rathmell
  • Patent number: 4816693
    Abstract: A uniform ion implantation dose control apparatus controls the implantation of ion particles onto at least one wafer mounted on a rotating disk in the pathway of the ion particle beam. A grounded scanning wire is repeatedly moved across the beam to produce an emission of secondary electrons which is linearly proportional to the beam particle current. The secondary electrons emitted are collected and formed into a current I.sub.s by a collector electrode. Portions of the current I.sub.s on the collector electrode are sampled. While the vacuum conditions within the beamline are good, the beams electrical current I.sub.FC is measured and the collector current I.sub.s sample is calibrated therewith so that when the beamline vacuum becomes a high pressure vacuum, additional collector current I.sub.s samples may be utilized to determine a theoretical beam current I which is a function of the beam particle current I.sub.p =I/q.
    Type: Grant
    Filed: August 21, 1987
    Date of Patent: March 28, 1989
    Assignee: National Electrostatics Corp.
    Inventor: Robert D. Rathmell