Abstract: An electric heater for industrial liquids comprises a plastic flat box that contains a stainless steel pressure vessel holding a number of parallel electrical heating rods. These heating rods are interlaced with shorter “I” shaped Teflon rods which generates a tube-like space around the heating rods. Spiral grooves in the symmetrical concave faces of the Teflon rods promote a spiraling turbulent flow. The general liquid flow from the liquid inlet meanders around the parallel heating rods for optimal heat transfer. The heater can be mounted horizontally or vertically on the side of a lab bench or a vessel for floor space conservation. The flow speed of the liquid, its specific heat, the number of heating elements with their individual power rating determine the heating profile of liquid temperature versus cumulative length of the flow path which is important to prevent the liquid from reaching the boiling point. This arrangement allows for design flexibility and scalability in heating capacities.

Abstract: A single cartridge filter housing assembly for the filtration of etching liquids, deionized water, slurries and other liquids used in the semiconductor, pharmaceutical and chemical industries. It comprises a bottom housing and a top housing with an O-ring in between and a nut ring engaging top and bottom housings in order to compress the O-ring thus forming a sealed cavity for the cartridge. The bottom housing holds the nose of the cartridge in a concentric recess and holds the cartridge top centered by several radial protrusions in its mouth. An inlet and an outlet at the bottom of the bottom housing for the liquid to be filtered are coaxial for easy plumbing connections. The top housing carries a vent tube to use the air within to stabilize the liquid level in spite of pressure variations because of pump action.

Abstract: A single cartridge filter housing assembly for the filtration of etching liquids, deionized water, slurries and other liquids used in the semiconductor, pharmaceutical and chemical industries. It comprises a bottom housing and a top housing with an O-ring in between and a nut ring engaging top and bottom housings in order to compress the O-ring thus forming a sealed cavity for the cartridge. The bottom housing holds the nose of the cartridge in a concentric recess and holds the cartridge top centered by several radial protrusions in its mouth. An inlet and an outlet at the bottom of the bottom housing for the liquid to be filtered are coaxial for easy plumbing connections. The top housing carries a vent tube to use the air within to stabilize the liquid level in spite of pressure variations because of pump action.

Abstract: A highly efficient in-line fluid heater is suitable for heating ultra-pure fluids. Preferably, the heater can be used for heating various fluids, including water, as part of a "wet bench" system used in a wafer processing fabrication facility for the semi-conductor industry. Many other uses for this in-line heater can be envisioned; e.g., water industry, gas processing, and any other use requiring an ultra-clean, highly efficient, non-contact method of raising the temperature of various liquids and gases. The preferred in-line heater utilizes one or more elongated lamps that generate IR radiation as the heating elements. A vessel is provided through which the fluid to be heated is passed. Typically, the vessel is a tube. The tube is preferably a straight single diameter tube, but can be formed in any convenient shape. For ultra-pure fluids, the vessel is formed of an inert or non-reactive material such as quartz. Preferably, the vessel is transparent to the IR radiation generated by the lamps.

Abstract: A filter housing assembly for the filtration of liquids at high temperature and high pressure and for reduction of particles having a housing for a filter cartridge, a flanged cap, that is slidingly inserted into the housing, and having a cap nut for fastening and tightly sealing the cap to a lip on the housing. The interface housing-cap having grooves, with centerlines offset in opposite directions, for receiving sealants and cone-shaped surfaces on the flange and the lip opposing flat surfaces on the cap nut and the flange, respectively, for achieving a tight seal. The housing having a bottom with a concentric cylindrical recess with a concave-convex edge for receiving the nose of the cartridge. The housing also having a spacer for holding the upper part of the cartridge concentric for efficient filtration.