Abstract: A precision electrostatic lens system is formed from lens electrodes having high precision inner bores by aligning said bores on a ceramic rod, inserting segmented glass spacers between adjacent electrodes, and brazing the combination together to provide a monolithic structure capable of maintaining accurate tolerances.

Abstract: A charged-particle energy analyzer includes a hollow axisymmetrical body with an annular opening therein receptive of input electrons from a cylindrical mirror analyzer, the electrons having a distribution of electron energies and a range of electron trajectories. The trajectories each have a radially inward directional component and an axial directional component in a forward direction parallel to the axis. Annular deflectors with negative potentials are disposed coaxially in the body so as to reverse the axial directional components of the electron trajectories. A ring-shaped channel detector detects the electrons relative to radial distance and thereby to energy.

Abstract: A direct-imaging, monochromatic electron microscope includes an objective lens for collecting a substantial portion of emitted electrons from an area across a sample surface, and focusing the electrons through an image plane. A collimating lens for collimating the electrons into beams is located at its focal distance from the image plane. An energy filter with an entrance aperture is receptive of the beams to transit monochromatic beams, and a transfer lens is receptive of the monochromatic beams for refocusing the same through a projection lens to effect an image of the plurality of spots in a projection plane. The objective lens is formed of a magnetic toroidal coil having a central hole therein with a dish-shaped magnetically permeable member cupped coaxially over the toroidal coil. The permeable member has a neck portion protruding through the central hole. The sample surface is interposed proximate the objective lens between the objective lens and the energy filter.

Abstract: A direct-imaging, monochromatic electron microscope includes an objective lens for collecting a substantial portion of emitted electrons from an area across a sample surface, a first transfer lens for collimating the electrons into beams, an energy filter receptive of the beams to transit monochromatic beams, and a second transfer lens receptive of the monochromatic beams for refocusing the same through a projection lens to effect an image of the plurality of spots in a projection plane. The objective lens is formed of a magnetic toroidal coil having a central hole therein with a dish-shaped magnetically permeable member cupped coaxially over the toroidal coil. The permeable member has a neck portion protruding through the central hole. The sample surface is interposed proximate the objective lens between the objective lens and the energy filter.

Abstract: An energy analyzer for electrons comprises three spherically configured cylindrically symmetric members. An outer member is a hollow spherical section having a first inlet edge. A first inner member is a spherical portion disposed concentrically within the outer member with a defined space therebetween, and has a second inlet edge cooperative with the first inlet edge to form an inlet opening receptive of electrons from a conical lens. A second inner member is a spherical segment disposed concentrically within the outer member and has a second outlet edge cooperative with a first outlet edge of the first inner member to define an exit slot for egress of charged particles having selected trajectories in the defined space. A cylindrical detector is situated within the spherical members for detecting the egressed charged particles. The inlet opening and the exit slot are such that the angle subtended by the selected trajectories between the inlet opening and the exit slot is preferably between about 0.8.pi.

Abstract: A plasma generating device, and in particular a duoplasmatron ion gun, is disclosed that is air cooled, high vacuum compatible and hence very clean with a stable ion current output. The device is mounted to a standard type flange held at ground potential without the necessity of subsequent high voltage isolation. Cooling is achieved with cooling fins and a fan inside a housing in which the duoplasmatron is mounted. A mounting structure includes a vacuum tight ceramic ring brazed between the mounting flange and the gun body. The ceramic ring is located with respect to high permeability magnetic components and a magnetic coil to facilitate a magnetic field for focusing the plasma, allowing the coil to be referenced to ground potential while the gun is maintained at high voltage. A ceramic chamber containing ceramic pellets is located in the plasma-forming gas inlet duct to prevent high voltage electrical discharge in the gas duct.

Abstract: A sample transport system adaptable for use in an MBE instrument includes means for introducing a plurality of substrates into a storage chamber and means for conveying each substrate on a preselected basis to a processing chamber whereby the wafers not being processed are completely protected against contaminants which may occur within the processing chamber.

Abstract: A magnetic lens, useful as an objective lens in a focused charged particle beam generator, includes means for maintaining a constant thermal power dissipation independent of the field strength produced thereby.

Abstract: There is disclosed a secondary ion mass spectrometer to be used with other spectro analysis mechanisms where the sample holder is fixed in a main vacuum chamber having a secondary vacuum chamber communicating with the main chamber with a vacuum seal between the two in which a substantially 90.degree. spherical segment energy analyzer is disposed in the second vacuum chamber along with a quadrupole mass spectrometer and electron multiplier. A primary ion gun is disposed within the main vacuum chamber directing an ion beam at the samples to be tested and the secondary ions emitted are collected through a longitudinal extraction lens mechanism disposed between the 90.degree.

Abstract: A scanning Auger microprobe in a cylindrical mirror analyzer is provided wherein an aperture plate at the exit stage is controllably variable in aperture size and is positioned near the second order focus point and at the minimum trace of the analyzer. Control of the aperture size is provided in both an infinitely variable arrangement and in a three size exit aperture arrangement.

Abstract: The vacuum chamber for an Auger analyzer is provided with a side access port through which interchangeable specimen trays are inserted and installed on a rotatable support structure. The specimen tray has a plurality of peripheral specimen sites and a Faraday cup probe structure similarly positioned but affixed to the support structure. The Faraday cup facilitates calibrating the ion beam and positioning the ion beam and the cup at the focal point of the electron beam. The support structure is subsequently rotated to sequentially expose each specimen to the beams.