Patents by Inventor Robert S. Chau

Robert S. Chau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10396211
    Abstract: A microelectronic device having a functional metal oxide channel may be fabricated on a microelectronic substrate that can be utilized in very large scale integration, such as a silicon substrate, by forming a buffer transition layer between the microelectronic substrate and the functional metal oxide channel. In one embodiment, the microelectronic device may be a microelectronic transistor with a source structure and a drain structure formed on the buffer transition layer, wherein the source structure and the drain structure abut opposing sides of the functional metal oxide channel and a gate dielectric is disposed between a gate electrode and the functional metal oxide channel. In another embodiment, the microelectronic device may be a two-terminal microelectronic device.
    Type: Grant
    Filed: July 31, 2015
    Date of Patent: August 27, 2019
    Assignee: Intel Corporation
    Inventors: Elijah V. Karpov, Prashant Majhi, Roza Kotlyar, Niloy Mukherjee, Charles C. Kuo, Uday Shah, Ravi Pillarisetty, Robert S. Chau
  • Patent number: 10388858
    Abstract: A method including forming a device stack including a dielectric layer between a fixed magnetic layer and a free magnetic layer on a fully-crystalline sacrificial film or substrate including a crystal lattice similar to the crystal lattice of the dielectric material; and transferring the device stack from the sacrificial film to a device substrate. An apparatus including a device stack including a dielectric layer between a fixed magnetic layer and a free magnetic layer on a device substrate wherein the fixed magnetic layer and the free magnetic layer each have a crystalline lattice conforming to a crystalline lattice of the sacrificial film or substrate on which they were formed prior to transfer to the device substrate.
    Type: Grant
    Filed: September 26, 2014
    Date of Patent: August 20, 2019
    Assignee: Intel Corporation
    Inventors: Kevin P. O'Brien, Brian S. Doyle, Kaan Oguz, Robert S. Chau, Satyarth Suri
  • Patent number: 10388777
    Abstract: Crystalline heterostructures including an elevated crystalline structure extending from one or more trenches in a trench layer disposed over a crystalline substrate are described. In some embodiments, an interfacial layer is disposed over a silicon substrate surface. The interfacial layer facilitates growth of the elevated structure from a bottom of the trench at growth temperatures that may otherwise degrade the substrate surface and induce more defects in the elevated structure. The trench layer may be disposed over the interfacial layer with a trench bottom exposing a portion of the interfacial layer. Arbitrarily large merged crystal structures having low defect density surfaces may be overgrown from the trenches. Devices, such as III-N transistors, may be further formed on the raised crystalline structures while silicon-based devices (e.g., transistors) may be formed in other regions of the silicon substrate.
    Type: Grant
    Filed: June 26, 2015
    Date of Patent: August 20, 2019
    Assignee: Intel Corporation
    Inventors: Sansaptak Dasgupta, Han Wui Then, Marko Radosavljevic, Sanaz K. Gardner, Seung Hoon Sung, Robert S. Chau
  • Patent number: 10388869
    Abstract: Thin film resistive memory material stacks including at least one of a high work function metal oxide at an interface of a first electrode and a thin film memory material, and a low work function rare earth metal at an interface of a second electrode and the thin film memory material. The high work function metal oxide provides a good Schottky barrier height relative to memory material for high on/off current ratio. Compatibility of the metal oxide with switching oxide reduces cycling loss of oxygen/vacancies for improved memory device durability. The low work function rare earth metal provides high oxygen solubility to enhance vacancy creation within the memory material in as-deposited state for low forming voltage requirements while providing an ohmic contact to the resistive memory material.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: August 20, 2019
    Assignee: Intel Corporation
    Inventors: Prashant Majhi, Elijah V. Karpov, Niloy Mukherjee, Ravi Pillarisetty, Uday Shah, Brian S. Doyle, Robert S. Chau
  • Patent number: 10365894
    Abstract: Described is an apparatus which comprises: a magnetic tunneling junction (MTJ) device with out-of-plane magnetizations for its free and fixed magnetic layers, and configured to have a magnetization offset away from a center and closer to a switching threshold of the MTJ device; and logic for generating random numbers according to a resistive state of the MTJ device.
    Type: Grant
    Filed: June 17, 2015
    Date of Patent: July 30, 2019
    Assignee: Intel Corporation
    Inventors: Charles C. Kuo, Justin S. Brockman, Juan G. Alzate Vinasco, Kaan Oguz, Kevin P. O'Brien, Brian S. Doyle, Mark L. Doczy, Satyarth Suri, Robert S. Chau, Prashant Majhi, Ravi Pillarisetty, Elijah V. Karpov
  • Patent number: 10367093
    Abstract: A method of fabricating a MOS transistor having a thinned channel region is described. The channel region is etched following removal of a dummy gate. The source and drain regions have relatively low resistance with the process.
    Type: Grant
    Filed: October 11, 2017
    Date of Patent: July 30, 2019
    Inventors: Justin K. Brask, Robert S. Chau, Suman Datta, Mark L. Doczy, Brian S. Doyle, Jack T. Kavalieros, Amlan Majumdar, Matthew V. Metz, Marko Radosavljevic
  • Patent number: 10355205
    Abstract: Resistive memory cells are described. In some embodiments, the resistive memory cells include a switching layer having an inner region in which one or more filaments is formed. In some instances, the filaments is/are formed only within the inner region of the switching layer. Methods of making such resistive memory cells and devices including such cells are also described.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: July 16, 2019
    Assignee: Intel Corporation
    Inventors: Prashant Majhi, Ravi Pillarisetty, Niloy Mukherjee, Uday Shah, Elijah V. Karpov, Brian S. Doyle, Robert S. Chau
  • Patent number: 10340275
    Abstract: A thin film transistor is deposited over a portion of a metal layer over a substrate. A memory element is coupled to the thin film transistor to provide a first memory cell. A second memory cell is over the first memory. A logic block is coupled to at least the first memory cell.
    Type: Grant
    Filed: June 23, 2015
    Date of Patent: July 2, 2019
    Assignee: Intel Corporation
    Inventors: Elijah V. Karpov, Jack T. Kavalieros, Robert S. Chau, Niloy Mukherjee, Rafael Rios, Prashant Majhi, Van H. Le, Ravi Pillarisetty, Uday Shah, Gilbert Dewey, Marko Radosavljevic
  • Patent number: 10340443
    Abstract: An embodiment includes an apparatus comprising: first and second electrodes on a substrate; a perpendicular magnetic tunnel junction (pMTJ), between the first and second electrodes, comprising a dielectric layer between a fixed layer and a free layer; and an additional dielectric layer directly contacting first and second metal layers; wherein (a) the first metal layer includes an active metal and the second metal includes an inert metal, and (b) the second metal layer directly contacts the free layer. Other embodiments are described herein.
    Type: Grant
    Filed: June 26, 2015
    Date of Patent: July 2, 2019
    Assignee: Intel Corporation
    Inventors: Brian S. Doyle, Kaan Oguz, Kevin P. O'Brien, David L. Kencke, Elijah V. Karpov, Charles C. Kuo, Mark L. Doczy, Satyarth Suri, Robert S. Chau, Niloy Mukherjee, Prashant Majhi
  • Patent number: 10325774
    Abstract: III-N semiconductor heterostructures including a raised III-N semiconductor structures with inclined sidewall facets are described. In embodiments, lateral epitaxial overgrowth favoring semi-polar inclined sidewall facets is employed to bend crystal defects from vertical propagation to horizontal propagation. In embodiments, arbitrarily large merged III-N semiconductor structures having low defect density surfaces may be overgrown from trenches exposing a (100) surface of a silicon substrate. III-N devices, such as III-N transistors, may be further formed on the raised III-N semiconductor structures while silicon-based transistors may be formed in other regions of the silicon substrate.
    Type: Grant
    Filed: September 18, 2014
    Date of Patent: June 18, 2019
    Assignee: Intel Corporation
    Inventors: Sansaptak Dasgupta, Han Wui Then, Benjamin Chu-Kung, Marko Radosavljevic, Sanaz K. Gardner, Seung Hoon Sung, Ravi Pillarisetty, Robert S. Chau
  • Publication number: 20190172938
    Abstract: III-N semiconductor heterostructures on III-N epitaxial islands laterally overgrown from a mesa of a silicon substrate. An IC may include a III-N semiconductor device disposed on the III-N epitaxial island overhanging the silicon mesa and may further include a silicon-based MOSFET monolithically integrated with the III-N device. Lateral epitaxial overgrowth from silicon mesas may provide III-N semiconductor regions of good crystal quality upon which transistors or other active semiconductor devices may be fabricated. Overhanging surfaces of III-N islands may provide multiple device layers on surfaces of differing polarity. Spacing between separate III-N islands may provide mechanical compliance to an IC including III-N semiconductor devices. Undercut of the silicon mesa may be utilized for transfer of III-N epitaxial islands to alternative substrates.
    Type: Application
    Filed: January 25, 2019
    Publication date: June 6, 2019
    Applicant: Intel Corporation
    Inventors: Sansaptak DASGUPTA, Han Wui THEN, Sanaz K. GARDNER, Marko RADOSAVLJEVIC, Seung Hoon SUNG, Benjamin CHU-KUNG, Robert S. CHAU
  • Publication number: 20190148533
    Abstract: Semiconductor devices including an elevated or raised doped crystalline structure extending from a device layer are described. In embodiments, III-N transistors include raised crystalline n+ doped source/drain structures on either side of a gate stack. In embodiments, an amorphous material is employed to limit growth of polycrystalline source/drain material, allowing a high quality source/drain doped crystal to grow from an undamaged region and laterally expand to form a low resistance interface with a two-degree electron gas (2DEG) formed within the device layer. In some embodiments, regions of damaged GaN that may spawn competitive polycrystalline overgrowths are covered with the amorphous material prior to commencing raised source/drain growth.
    Type: Application
    Filed: January 8, 2019
    Publication date: May 16, 2019
    Applicant: Intel Corporation
    Inventors: Marko RADOSAVLJEVIC, Sansaptak DASGUPTA, Sanaz K. GARDNER, Seung Hoon SUNG, Han Wui THEN, Robert S. CHAU
  • Publication number: 20190109281
    Abstract: Techniques are disclosed for forming integrated circuit structures including a magnetic tunnel junction (MTJ), such as spin-transfer torque memory (STTM) devices, having magnetic contacts. The techniques include incorporating an additional magnetic layer (e.g., a layer that is similar or identical to that of the magnetic contact layer) such that the additional magnetic layer is coupled antiferromagnetically (or in a substantially antiparallel manner). The additional magnetic layer can help balance the magnetic field of the magnetic contact layer to limit parasitic fringing fields that would otherwise be caused by the magnetic contact layer. The additional magnetic layer may be antiferromagnetically coupled to the magnetic contact layer by, for example, including a nonmagnetic spacer layer between the two magnetic layers, thereby creating a synthetic antiferromagnet (SAF).
    Type: Application
    Filed: December 10, 2018
    Publication date: April 11, 2019
    Applicant: INTEL CORPORATION
    Inventors: BRIAN S. DOYLE, KAAN OGUZ, CHARLES C. KUO, MARK L. DOCZY, SATYARTH SURI, DAVID L. KENCKE, ROBERT S. CHAU, ROKSANA GOLIZADEH MOJARAD
  • Patent number: 10249490
    Abstract: A single fin or a pair of co-integrated n- and p-type single crystal electronic device fins are epitaxially grown from a substrate surface at a bottom of one or a pair of trenches formed between shallow trench isolation (STI) regions. The fin or fins are patterned and the STI regions are etched to form a height of the fin or fins extending above etched top surfaces of the STI regions. The fin heights may be at least 1.5 times their width. The exposed sidewall surfaces and a top surface of each fin is epitaxially clad with one or more conformal epitaxial materials to form device layers on the fin. Prior to growing the fins, a blanket buffer epitaxial material may be grown from the substrate surface; and the fins grown in STI trenches formed above the blanket layer. Such formation of fins reduces defects from material interface lattice mismatches.
    Type: Grant
    Filed: March 14, 2017
    Date of Patent: April 2, 2019
    Assignee: Intel Corporation
    Inventors: Niti Goel, Robert S. Chau, Jack T. Kavalieros, Benjamin Chu-Kung, Matthew V. Metz, Niloy Mukherjee, Nancy M. Zelick, Gilbert Dewey, Willy Rachmady, Marko Radosavljevic, Van H. Le, Ravi Pillarisetty, Sansaptak Dasgupta
  • Patent number: 10243069
    Abstract: The present description relates to a gallium nitride transistor which includes at least one source/drain structure having low contact resistance between a 2D electron gas of the gallium nitride transistor and the source/drain structure. The low contact resistance may be a result of at least a portion of the source/drain structure being a single-crystal structure abutting the 2D electron gas. In one embodiment, the single-crystal structure is grown with a portion of a charge inducing layer of the gallium nitride transistor acting as a nucleation site.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: March 26, 2019
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Sansaptak Dasgupta, Marko Radosavljevic, Seung Hoon Sung, Sanaz Gardner, Robert S. Chau
  • Publication number: 20190088747
    Abstract: A first III-V material based buffer layer is deposited on a silicon substrate. A second III-V material based buffer layer is deposited onto the first III-V material based buffer layer. A III-V material based device channel layer is deposited on the second III-V material based buffer layer.
    Type: Application
    Filed: November 21, 2018
    Publication date: March 21, 2019
    Inventors: Niti GOEL, Gilbert DEWEY, Niloy MUKHERJEE, Matthew V. METZ, Marko RADOSAVLIJEVIC, Benjamin CHU-KUNG, Jack T. KAVALIEROS, Robert S. CHAU
  • Patent number: 10236369
    Abstract: Techniques are disclosed for forming a non-planar germanium quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a germanium fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), a doping layer (e.g., delta/modulation doped), and an undoped germanium quantum well layer. An undoped germanium fin structure is formed in the quantum well structure, and a top barrier layer deposited over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.
    Type: Grant
    Filed: October 23, 2017
    Date of Patent: March 19, 2019
    Assignee: INTEL CORPORATION
    Inventors: Ravi Pillarisetty, Jack T. Kavalieros, Willy Rachmady, Uday Shah, Benjamin Chu-Kung, Marko Radosavljevic, Niloy Mukherjee, Gilbert Dewey, Been Y. Jin, Robert S. Chau
  • Patent number: 10236356
    Abstract: A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: March 19, 2019
    Assignee: Intel Corporation
    Inventors: Uday Shah, Brian S. Doyle, Justin K. Brask, Robert S. Chau, Thomas A. Letson
  • Patent number: 10229991
    Abstract: III-N semiconductor heterostructures on III-N epitaxial islands laterally overgrown from a mesa of a silicon substrate. An IC may include a III-N semiconductor device disposed on the III-N epitaxial island overhanging the silicon mesa and may further include a silicon-based MOSFET monolithically integrated with the III-N device. Lateral epitaxial overgrowth from silicon mesas may provide III-N semiconductor regions of good crystal quality upon which transistors or other active semiconductor devices may be fabricated. Overhanging surfaces of III-N islands may provide multiple device layers on surfaces of differing polarity. Spacing between separate III-N islands may provide mechanical compliance to an IC including III-N semiconductor devices. Undercut of the silicon mesa may be utilized for transfer of III-N epitaxial islands to alternative substrates.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: March 12, 2019
    Assignee: Intel Corporation
    Inventors: Sansaptak Dasgupta, Han Wui Then, Sanaz K. Gardner, Marko Radosavljevic, Seung Hoon Sung, Benjamin Chu-Kung, Robert S. Chau
  • Patent number: 10217673
    Abstract: Embodiments of the present disclosure are directed toward an integrated circuit (IC) die. In embodiments, an IC die may include a semiconductor substrate and a buffer layer disposed over the semiconductor substrate. The buffer layer may have a plurality of openings formed therein. In embodiments, the IC die may further include a plurality of group III-Nitride structures. Individual group III-Nitride structures of the plurality of group III-Nitride structures may include a lower portion disposed in a respective opening of the plurality of openings and an upper portion disposed over the respective opening. In embodiments, the upper portion may include a base extending radially from sidewalls of the respective opening over a surface of the buffer layer to form a perimeter around the respective opening. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: December 17, 2014
    Date of Patent: February 26, 2019
    Assignee: Intel Corporation
    Inventors: Sansaptak Dasgupta, Han Wui Then, Marko Radosavljevic, Sanaz K. Gardner, Seung Hoon Sung, Robert S. Chau, Ravi Pillarisetty