Patents by Inventor Robert W. Birkmire

Robert W. Birkmire has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230313363
    Abstract: A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
    Type: Application
    Filed: May 25, 2023
    Publication date: October 5, 2023
    Inventors: Robert W. Birkmire, Gregory M. Hanket
  • Patent number: 11739414
    Abstract: A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: August 29, 2023
    Assignee: JLN Solar, Inc.
    Inventors: Robert W. Birkmire, Gregory M. Hanket
  • Publication number: 20200292234
    Abstract: A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
    Type: Application
    Filed: April 30, 2020
    Publication date: September 17, 2020
    Inventors: Robert W. Birkmire, Gregory M. Hanket
  • Patent number: 10663228
    Abstract: A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
    Type: Grant
    Filed: July 10, 2017
    Date of Patent: May 26, 2020
    Assignee: JLN SOLAR, INC.
    Inventors: Robert W. Birkmire, Gregory M. Hanket
  • Publication number: 20170314859
    Abstract: A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
    Type: Application
    Filed: July 10, 2017
    Publication date: November 2, 2017
    Inventors: Robert W. Birkmire, Gregory M. Hanket
  • Patent number: 9726430
    Abstract: A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
    Type: Grant
    Filed: February 18, 2015
    Date of Patent: August 8, 2017
    Assignee: JLN SOLAR, INC.
    Inventors: Robert W. Birkmire, Gregory M. Hanket
  • Publication number: 20150168068
    Abstract: A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
    Type: Application
    Filed: February 18, 2015
    Publication date: June 18, 2015
    Inventors: Robert W. Birkmire, Gregory M. Hanket
  • Patent number: 8986455
    Abstract: A thermal evaporation source includes: a crucible configured to contain a volume of evaporant and a vapor space above the evaporant; a manifold body having within it a hollow expansion chamber that is flowably connected to the vapor space via one or more restriction orifices; one or more effusion nozzles flowably connected to the expansion chamber and exiting an outer surface of the thermal evaporation source, the nozzle(s) oriented to direct an evaporant vapor flow out of the source vertically downward, in one or more horizontal directions, or in one or more directions intermediate between horizontal and vertically downward; and a heater capable of heating some or all of the thermal evaporation source to a temperature sufficient to produce the one or more evaporant vapor flows when a vacuum is applied to the thermal evaporation source.
    Type: Grant
    Filed: October 13, 2008
    Date of Patent: March 24, 2015
    Assignee: JLN Solar, Inc.
    Inventors: Robert W. Birkmire, Gregory M. Hanket
  • Publication number: 20130175180
    Abstract: Devices and methods for photovoltaic electrolysis are disclosed. A device comprises a photovoltaic cell element and an electrolysis compartment. The photovoltaic cell element is configured to convert a portion of solar energy into electrical energy and to pass another portion of the solar energy. The electrolysis compartment includes an aqueous electrolyte positioned to receive the other portion of the solar energy and electrodes electrically connected to receive the electrical energy produced by the photovoltaic cell element. A method comprises receiving solar energy with a photovoltaic cell element, converting a portion of the solar energy into electrical energy, passing another portion of the solar energy through the photovoltaic cell element, receiving with an aqueous electrolyte the other portion of the solar energy, transmitting the electrical energy generated by the photovoltaic cell element to a pair of electrodes, and electrolyzing the aqueous electrolyte with the pair of electrodes.
    Type: Application
    Filed: September 30, 2011
    Publication date: July 11, 2013
    Applicant: UNIVERSITY OF DELAWARE
    Inventors: Daniel Esposito, Robert W. Birkmire, Jingguang G. Chen
  • Patent number: 8450141
    Abstract: Processes for fabricating back contacts for photovoltaic cell devices are disclosed. The processes involve depositing a passivation layer on the back surface of a wafer, depositing an emitter layer on the passivation layer, depositing a metal layer on the emitter layer, laser firing selected areas of the metal layer to form base contacts, laser cutting the metal layer to create at least one isolation region between emitter contacts and base contacts, and applying a stream of reactive gas to form a second passivation layer in the isolation region. The process may further involve inkjetting a resist on the passivation layer in a pattern corresponding to a boundary between the one or more emitter contacts and the one or more base contacts, and laser cutting the metal layer over the resist to create the isolation region.
    Type: Grant
    Filed: June 17, 2010
    Date of Patent: May 28, 2013
    Assignee: University of Delaware
    Inventors: Robert W. Birkmire, Steven S. Hegedus, Ujjwal K. Das
  • Publication number: 20120156372
    Abstract: A physical vapor deposition effusion method comprising translating a strip material through a physical vapor deposition zone in a deposition chamber and providing first and second substantially closed vessels located serially along the processing path in the same deposition chamber, each vessel emitting different source materials to produce overlapping plumes and having an array of vapor delivery nozzles distributed uniformly across the vessel along the width of the zone, and configured to expel overlapping plumes to create a fog having a substantially uniform composition across the width and a varying composition across the length of the zone. Also, an elongate vapor deposition effusion vessel having an elongate lid including plural nozzles spaced from each other along its elongate axis, and a continuous heating element in the lid encircling the plural nozzles, the heating element having electrical contacts connected to an electrical source on the same side of the vessel.
    Type: Application
    Filed: January 13, 2011
    Publication date: June 21, 2012
    Applicant: University of Delaware
    Inventors: Robert W. Birkmire, Gregory M. Hanket, T.W. Fraser Russell, Erten Eser
  • Publication number: 20100319769
    Abstract: Processes for fabricating back contacts for photovoltaic cell devices are disclosed. The processes involve depositing a passivation layer on the back surface of a wafer, depositing an emitter layer on the passivation layer, depositing a metal layer on the emitter layer, laser firing selected areas of the metal layer to form base contacts, laser cutting the metal layer to create at least one isolation region between emitter contacts and base contacts, and applying a stream of reactive gas to form a second passivation layer in the isolation region. The process may further involve inkjetting a resist on the passivation layer in a pattern corresponding to a boundary between the one or more emitter contacts and the one or more base contacts, and laser cutting the metal layer over the resist to create the isolation region.
    Type: Application
    Filed: June 17, 2010
    Publication date: December 23, 2010
    Applicant: UNIVERSITY OF DELAWARE
    Inventors: Robert W. BIRKMIRE, Steven S. HEGEDUS, Ujjwal K. DAS
  • Publication number: 20100173440
    Abstract: A physical vapor deposition effusion method comprising translating a strip material through a physical vapor deposition zone in a deposition chamber and providing first and second substantially closed vessels located serially along the processing path in the same deposition chamber, each vessel emitting different source materials to produce overlapping plumes and having an array of vapor delivery nozzles distributed uniformly across the vessel along the width of the zone, and configured to expel overlapping plumes to create a fog having a substantially uniform composition across the width and a varying composition across the length of the zone. Also, an elongate vapor deposition effusion vessel having an elongate lid including plural nozzles spaced from each other along its elongate axis, and a continuous heating element in the lid encircling the plural nozzles, the heating element having electrical contacts connected to an electrical source on the same side of the vessel.
    Type: Application
    Filed: May 15, 2009
    Publication date: July 8, 2010
    Applicant: University of Delaware
    Inventors: Robert W. Birkmire, Gregory M. Hanket, T.W. Fraser Russell, Erten Eser
  • Publication number: 20090095213
    Abstract: A thermal evaporation source includes: a crucible configured to contain a volume of evaporant and a vapor space above the evaporant; a manifold body having within it a hollow expansion chamber that is flowably connected to the vapor space via one or more restriction orifices; one or more effusion nozzles flowably connected to the expansion chamber and exiting an outer surface of the thermal evaporation source, the nozzle(s) oriented to direct an evaporant vapor flow out of the source vertically downward, in one or more horizontal directions, or in one or more directions intermediate between horizontal and vertically downward; and a heater capable of heating some or all of the thermal evaporation source to a temperature sufficient to produce the one or more evaporant vapor flows when a vacuum is applied to the thermal evaporation source.
    Type: Application
    Filed: October 13, 2008
    Publication date: April 16, 2009
    Applicant: University of Delaware
    Inventors: Robert W. Birkmire, Gregory M. Hanket
  • Patent number: 6676994
    Abstract: Thin films are produced by a method wherein a material is heated in a furnace placed inside a vacuum system. An inert gas is flown over/through the heated material. The vapors of the material are entrained in the carrier gas which is then directed onto a substrate heated to a temperature below that of the furnace temperature and placed in close proximity to the exit of the furnace.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: January 13, 2004
    Assignee: University of Delaware
    Inventors: Robert W. Birkmire, Erten Eser, Gregory M. Hanket, Brian E. McCandless
  • Publication number: 20020054958
    Abstract: Thin films are produced by a method wherein a material is heated in a furnace placed inside a vacuum system. An inert gas is flown over/through the heated material. The vapors of the material are entrained in the carrier gas which is then directed onto a substrate heated to a temperature below that of the furnace temperature and placed in close proximity to the exit of the furnace.
    Type: Application
    Filed: March 28, 2001
    Publication date: May 9, 2002
    Inventors: Robert W. Birkmire, Erten Eser, Gregory M. Hanket, Brian E. McCandless
  • Patent number: 6372538
    Abstract: A new, large-area, thin-film, flexible photovoltaic structure is disclosed, as well as a general fabrication procedure, including a preferably roll-to-roll-type, process-chamber-segregated, “continuous-motion”, method for producing such a structure. A special multi-material vapor-deposition environment is disclosed to implement an important co-evaporation, layer-deposition procedure performed in and as part of the fabrication procedure. A structural system adapted to create a vapor environment generally like that just referred to is disclosed, as is an organization of method steps involved in the generation of such a vapor environment. Also, a unique, vapor-creating, materials-distributing system, which includes specially designed heated crucibles with carefully arranged, spatially distributed, localized and generally point-like, heated-nozzle sources of different metallic vapors, and a special multi-fingered, comb-like, vapor-delivering manifold structure is shown.
    Type: Grant
    Filed: March 16, 2000
    Date of Patent: April 16, 2002
    Assignees: University of Delaware, Global Solar Energy, Inc.
    Inventors: Robert G. Wendt, Gregory M. Hanket, Robert W. Birkmire, T. W. Fraser Russell, Scott Wiedeman
  • Patent number: 6310281
    Abstract: A new, large-area, thin-film, flexible photovoltaic structure is disclosed, as well as a general fabrication procedure, including a preferably roll-to-roll-type, process-chamber-segregated, “continuous-motion”, method for producing such a structure. A special multi-material vapor-deposition environment is disclosed to implement an important co-evaporation, layer-deposition procedure performed in and as part of the fabrication procedure. A structural system adapted to create a vapor environment generally like that just referred to is disclosed, as is an organization of method steps involved in the generation of such a vapor environment. Also, a unique, vapor-creating, materials-distributing system, which includes specially designed heated crucibles with carefully arranged, spatially distributed, localized and generally point-like, heated-nozzle sources of different metallic vapors, and a special multi-fingered, comb-like, vapor-delivering manifold structure is shown.
    Type: Grant
    Filed: March 16, 2000
    Date of Patent: October 30, 2001
    Assignee: Global Solar Energy, Inc.
    Inventors: Robert G. Wendt, Gregory M. Hanket, Robert W. Birkmire, T. W. Fraser Russell, Scott Wiedeman
  • Patent number: 5674555
    Abstract: Methods are provided for the production of supported monophasic group I-III-VI semiconductor films. In the subject methods, a substrate is coated with group I and III elements and then contacted with a reactive group VI element containing atmosphere under conditions sufficient to produce a substrate coated with a composite of at least two different group I-III-IV alloys. The resultant composite coated substrate is then annealed in an inert atmosphere under conditions sufficient to convert the composite coating to a monophasic group I-III-VI semiconductor film. The resultant supported semiconductor films find use in photovoltaic applications, particularly as absorber layers in solar cells.
    Type: Grant
    Filed: November 30, 1995
    Date of Patent: October 7, 1997
    Assignee: University of Delaware
    Inventors: Robert W. Birkmire, Jerold M. Schultz, Matheswaran Marudachalam, Habib Hichri
  • Patent number: 5015503
    Abstract: An apparatus for producing compound semiconductor thin films on substrates includes a reaction chamber wherein one or more constituents of semiconductor thin film is supplied as a gaseous species in a closed loop system. The apparatus includes hot and cold traps for isolating source materials from the reaction chamber and to provide for controlled delivery of the species. The hot and cold traps communicate with the reaction chamber through hot and cold legs to establish a closed loop recirculating flow. In a preferred embodiment, a thermosiphon provides the flow of gaseous species for formation of copper indium diselenide semiconductor thin films in a closed loop process.
    Type: Grant
    Filed: February 7, 1990
    Date of Patent: May 14, 1991
    Assignee: The University of Delaware
    Inventors: Robert D. Varrin, Jr., Robert W. Birkmire