Patents by Inventor Rolf Hagenlocher

Rolf Hagenlocher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for cleaning a probe card
    Patent number: 7345466
    Abstract: A cleaning device for use in a semiconductor processing. The device comprises a substrate supporter for supporting a substrate to be cleaned, a scrub pad mounting plate, and a chuck coupling to the substrate supporter and the scrub pad mounting plate. The chuck is configured to move the substrate supporter and the scrub pad mounting plate. The device further comprises a scrub pad mountable to and moveable from the scrub pad mounting plate. The scrub pad, when mounted to the scrub pad mounting plate, is higher than the substrate when mounted on the substrate supporter. The scrub pad mounting plate and the substrate supporter can both be coupled to the chuck so that the chuck moves both the scrub pad mounting plate and the substrate supporter in one action.
    Type: Grant
    Filed: August 2, 2005
    Date of Patent: March 18, 2008
    Assignee: Electroglas, Inc.
    Inventors: Michael Vogtmann, Rolf Hagenlocher, Uday Nayak
  • Method and apparatus for cleaning a probe card
    Publication number: 20070028946
    Abstract: A cleaning device for use in a semiconductor processing. The device comprises a substrate supporter for supporting a substrate to be cleaned, a scrub pad mounting plate, and a chuck coupling to the substrate supporter and the scrub pad mounting plate. The chuck is configured to move the substrate supporter and the scrub pad mounting plate. The device further comprises a scrub pad mountable to and moveable from the scrub pad mounting plate. The scrub pad, when mounted to the scrub pad mounting plate, is higher than the substrate when mounted on the substrate supporter. The scrub pad mounting plate and the substrate supporter can both be coupled to the chuck so that the chuck moves both the scrub pad mounting plate and the substrate supporter in one action.
    Type: Application
    Filed: August 2, 2005
    Publication date: February 8, 2007
    Inventors: Michael Vogtmann, Rolf Hagenlocher, Uday Nayak