Abstract: In integrated circuits, resistors may be formed on the basis of a silicon/germanium material, thereby providing a reduced specific resistance which may allow reduced dimensions of the resistor elements. Furthermore, a reduced dopant concentration may be used which may allow an increased process window for adjusting resistance values while also reducing overall cycle times.

Abstract: By forming a single spacer element and reducing the size thereof by a well-controllable etch process, a complex lateral dopant profile may be obtained at reduced process complexity compared to conventional triple spacer approaches in forming drain and source regions of advanced MOS transistors.

Abstract: By forming a semiconductor alloy in a silicon-based active semiconductor region prior to the gate patterning, material characteristics of the semiconductor alloy itself may also be exploited in addition to the strain-inducing effect thereof. Consequently, device performance of advanced field effect transistors may be even further enhanced compared to conventional approaches using a strained semiconductor alloy in the drain and source regions.

Abstract: By forming thermocouples in a contact structure of a semiconductor device, respective extension lines of the thermocouples may be routed to any desired location within the die, without consuming valuable semiconductor area in the device layer. Thus, an appropriate network of measurement points of interest may be provided, while at the same time allowing the application of well-established process techniques and materials. Hence, temperature-dependent signals may be obtained from hot spots substantially without being affected by design constraints in the device layer.

Abstract: By removing material during the formation of trench openings of isolation structures in an SOI device, the subsequent implantation process for defining the well region for a substrate diode may be performed on the basis of moderately low implantation energies, thereby increasing process uniformity and significantly reducing cycle time of the implantation process. Thus, enhanced reliability and stability of the substrate diode may be accomplished while also providing a high degree of compatibility with conventional manufacturing techniques.

Abstract: By forming a trench isolation structure after providing a high-k dielectric layer stack, direct contact of oxygen-containing insulating material of a top surface of the trench isolation structure with the high-k dielectric material in shared polylines may be avoided. This technique is self-aligned, thereby enabling further device scaling without requiring very tight lithography tolerances. After forming the trench isolation structure, the desired electrical connection across the trench isolation structure may be re-established by providing a further conductive material.

Abstract: A technique is presented which provides for a selective pre-amorphization of source/drain regions of a transistor while preventing pre-amorphization of a gate electrode of the transistor. Illustrative embodiments include the formation of a pre-amorphization implant blocking material over the gate electrode. Further illustrative embodiments include inducing a strain in a channel region by use of various stressors.

Abstract: By removing an upper portion of a complex spacer structure, such as a triple spacer structure, an upper surface of an intermediate spacer element may be exposed, thereby enabling the removal of the outermost spacer and a material reduction of the intermediate spacer in a well-controllable common etch process. Consequently, sidewall portions of the gate electrode may be efficiently exposed for a subsequent silicidation process, while the residual reduced spacer provides sufficient process margins. Thereafter, highly stressed material may be deposited, thereby providing an enhanced stress transfer mechanism.

Abstract: By forming an additional dielectric material, such as silicon nitride, after patterning dielectric liners of different intrinsic stress, a significant increase of performance of N-channel transistors may be obtained while substantially not contributing to a performance loss of the P-channel transistor.

Abstract: By reconfiguring material in a recess formed in drain and source regions of SOI transistors, the depth of the recess may be increased down to the buried insulating layer prior to forming respective metal silicide regions, thereby reducing series resistance and enhancing the stress transfer when the corresponding transistor element is covered by a highly stressed dielectric material. The material redistribution may be accomplished on the basis of a high temperature hydrogen bake.

Abstract: By providing a protection layer on a silicon/germanium material of high germanium concentration, a corresponding loss of strained semiconductor material may be significantly reduced or even completely avoided. The protection layer may be formed prior to critical cleaning processes and may be maintained until the formation of metal silicide regions. Hence, high performance gain of P-type transistors may be accomplished without requiring massive overfill during the selective epitaxial growth process.

Abstract: By combining a respectively adapted lattice mismatch between a first semiconductor material in a channel region and an embedded second semiconductor material in an source/drain region of a transistor, the strain transfer into the channel region is increased. According to one embodiment of the invention, the lattice mismatch may be adapted by a biaxial strain in the first semiconductor material. According to one embodiment, the lattice mismatch may be adjusted by a biaxial strain in the first semiconductor material. In particular, the strain transfer of strain sources including the embedded second semiconductor material as well as a strained overlayer is increased. According to one illustrative embodiment, regions of different biaxial strain may be provided for different transistor types.

Abstract: By using an implantation mask having a high intrinsic stress, SMT sequences may be provided in which additional lithography steps may be avoided. Consequently, a strain source may be provided without significantly contributing to the overall process complexity.

Abstract: By forming a semiconductor alloy in a silicon-based active semiconductor region prior to the gate patterning, material characteristics of the semiconductor alloy itself may also be exploited in addition to the strain-inducing effect thereof. Consequently, device performance of advanced field effect transistors may be even further enhanced compared to conventional approaches using a strained semiconductor alloy in the drain and source regions.