Patents by Inventor Ron Naftali

Ron Naftali has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200051777
    Abstract: A method for evaluating a region of an object, the method may include repeating, for each sub-region out of a first sub-region of the region till a penultimate sub-region of the region, the steps of: (a) acquiring, by a charged particle imager, a charged particle image of the sub-region; and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region; acquiring, by the charged particle imager, a charged particle image of a last sub-region of the region; and generating three-dimensional information about a content of the region based on charge particle images of the first sub-region till last sub-region of the region.
    Type: Application
    Filed: August 7, 2018
    Publication date: February 13, 2020
    Applicant: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Ofer Shneyour, Ron Naftali, Ronnie Porat
  • Patent number: 10504687
    Abstract: A multi-beam charged particle column for inspecting a surface of a sample includes a source for creating multiple primary charged particle beams which are directed towards the sample, an objective lens unit for focusing the primary charged particle beams on the sample, a detector for detecting signal charged particles from the sample, and a magnetic deflection unit arranged between the detector and the sample. The magnetic deflection unit includes a plurality of strips of a magnetic or ferromagnetic material. At least two strips of the plurality of strips are located at opposite sides of a trajectory of a primary charged particle beam and within a distance equal to a pitch of the trajectories of the primary charged particle beams at the magnetic deflection unit. The strips are configured to establish a magnetic field having field lines substantially perpendicular to the trajectories of the primary charged particle beams.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: December 10, 2019
    Assignees: TECHNISCHE UNIVERSITEIT DELFT, APPLIED MATERIALS ISRAEL, LTD.
    Inventors: Pieter Kruit, Ron Naftali
  • Patent number: 10446434
    Abstract: According to an embodiment, a support module is provided for supporting a substrate. The support module may include a chuck and a vertical stage. The chuck may include multiple chuck segments that are independently movable. When the substrate is positioned on the chuck, different chuck segments are positioned under different areas of the substrate. The vertical stage may include multiple piezoelectric motors. Each piezoelectric motor may be configured to perform nanometric scale elevation and lowering movements. The multiple piezoelectric motors may be configured to independently move the multiple chuck segments.
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: October 15, 2019
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Doron Korngut, Yuri Belenky, Yoram Uziel, Ron Naftali, Ron Bar-or, Yuval Gronau
  • Patent number: 10421125
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense layers of feed material on the platform, and a fusing system including an energy source to generate an energy beam having an adjustable intensity profile, an actuator to cause the energy beam to traverse across an outermost layer of feed material, and a controller coupled to the actuator and the energy source. The controller is configured to cause the energy source to adjust the intensity profile of the energy beam on the outermost layer of feed material based on a traversal velocity and/or a traversal direction of the light beam across the outermost layer of feed material.
    Type: Grant
    Filed: July 20, 2017
    Date of Patent: September 24, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Hou T. Ng, Ron Naftali, Christopher G. Talbot
  • Patent number: 10395887
    Abstract: Apparatus and method for inspecting a surface of a sample. The apparatus includes a multi-beam charged particle column comprising a source for creating multiple primary beams directed towards the sample, an objective lens for focusing the primary beams on the sample, an electron-photon converter unit having an array of electron to photon converter sections, each section is located next to a primary beam within a distance equal to a pitch of the primary beams at the electro-photon converter unit, a photon transport unit for transporting light from the electron to photon converter sections to a photo detector, and an electron collection unit for guiding secondary electrons created in the sample, towards the electron-photon converter unit. The electron collection unit is arranged to project secondary electrons created in the sample by one of said primary beams to at least one of the electron to photon converter sections.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: August 27, 2019
    Assignees: TECHNISCHE UNIVERSITEIT DELFT, APPLIED MATERIALS ISRAEL, LTD.
    Inventors: Pieter Kruit, Ron Naftali
  • Publication number: 20190259570
    Abstract: Apparatus and method for inspecting a surface of a sample. The apparatus includes a multi-beam charged particle column comprising a source for creating multiple primary beams directed towards the sample, an objective lens for focusing the primary beams on the sample, an electron-photon converter unit having an array of electron to photon converter sections, each section is located next to a primary beam within a distance equal to a pitch of the primary beams at the electro-photon converter unit, a photon transport unit for transporting light from the electron to photon converter sections to a photo detector, and an electron collection unit for guiding secondary electrons created in the sample, towards the electron-photon converter unit. The electron collection unit is arranged to project secondary electrons created in the sample by one of said primary beams to at least one of the electron to photon converter sections.
    Type: Application
    Filed: February 20, 2018
    Publication date: August 22, 2019
    Inventors: Pieter KRUIT, Ron NAFTALI
  • Publication number: 20190259564
    Abstract: A multi-beam charged particle column for inspecting a surface of a sample includes a source for creating multiple primary charged particle beams which are directed towards the sample, an objective lens unit for focusing the primary charged particle beams on the sample, a detector for detecting signal charged particles from the sample, and a magnetic deflection unit arranged between the detector and the sample. The magnetic deflection unit includes a plurality of strips of a magnetic or ferromagnetic material. At least two strips of the plurality of strips are located at opposite sides of a trajectory of a primary charged particle beam and within a distance equal to a pitch of the trajectories of the primary charged particle beams at the magnetic deflection unit. The strips are configured to establish a magnetic field having field lines substantially perpendicular to the trajectories of the primary charged particle beams.
    Type: Application
    Filed: February 20, 2018
    Publication date: August 22, 2019
    Inventors: Pieter KRUIT, Ron NAFTALI
  • Patent number: 10307822
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense layers of feed material on the platform, and a fusing system to direct an energy beam to fuse at least a portion of the outermost layer of feed material. The fusing system includes an energy source to emit the energy beam, a deformable mirror to receive the energy beam and reflect the energy beam, wherein a shape of the deformable mirror defines at least in part an intensity profile of the energy beam on the outermost layer of feed material, an actuator coupled to the deformable mirror, and a controller coupled to the actuator and configured to cause the actuator to deform the shape of the deformable mirror to adjust the intensity profile of the energy beam on the outermost layer of feed material in accordance to a desired profile.
    Type: Grant
    Filed: July 20, 2017
    Date of Patent: June 4, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Hou T. Ng, Ron Naftali, Christopher G. Talbot
  • Patent number: 10068748
    Abstract: A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.
    Type: Grant
    Filed: December 7, 2016
    Date of Patent: September 4, 2018
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Yoram Uziel, Benzion Sender, Doron Aspir, Yohanan Madmon, Ron Naftali, Yuri Belenky
  • Patent number: 10060736
    Abstract: A method for determining a distance between a near field sensor and a substrate, the method may include creating a diffraction pattern by illuminating, with a beam of coherent radiation having a wavelength that does not exceed twenty nanometers, a slit that is formed between the substrate and an opaque element; detecting, by a detector, multiple portions of the diffraction pattern and generating detection signals indicative of the multiple portions of the diffraction pattern; processing the detection signals to determine a height of the slit; and determining the distance between the near field sensor and the substrate based upon (a) the height of the slit, and (b) a relationship between the height of the slit and a location of the near field sensor.
    Type: Grant
    Filed: April 21, 2016
    Date of Patent: August 28, 2018
    Assignee: Appled Materials Israel Ltd.
    Inventors: Amir Moshe Sagiv, Yoram Uziel, Haim Feldman, Ron Naftali
  • Patent number: 10054551
    Abstract: An inspection system that may include an illumination module that may be configured to scan a sample during multiple scan iterations; wherein during each scan iteration the illumination module scans each beam of a plurality of spaced apart beams along a scan line; a mechanical stage that may be configured to move the sample during the multiple scan iterations; a detection module; and a processor; wherein when the inspection system operates in an interlaced mode, the mechanical stage may be configured to move at a first speed thereby preventing a substantial overlap between scan lines obtained during the multiple scan iterations; wherein when the inspection system operates in a non-interlaced mode: the mechanical stage may be configured to move at a second speed that differs from the first speed thereby introducing an overlap between scan lines of different beams that may be obtained during different scan iterations; the detection module may be configured to generate detection signals in response to a detectio
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: August 21, 2018
    Assignee: Applied Materials Israel Ltd.
    Inventors: Boris Golberg, Ron Naftali
  • Patent number: 9997328
    Abstract: Chamber elements defining an internal chamber to be utilized during a substrate related stage selected from the group consisting of substrate manufacturing stage and substrate inspection stage, the chamber elements comprising: a first element having a first surface; a second element having a second surface about the periphery of the internal chamber; a third element connected to the second element; and a clamping mechanism that is connected to the second and third elements and is arranged to press the second element towards the first element; wherein a first area of the first surface and a second area of the second surface come into proximity with each other at a first interface; wherein the first surface is positioned above the second surface; wherein a gas groove and a vacuum groove are formed in the second area; wherein the second element comprises a gas conduit that is arranged to provide gas to the gas groove and a vacuum conduit that is arranged to provide vacuum to the vacuum groove; wherein a provisio
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: June 12, 2018
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Michael R. Rice, Ron Naftali, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Zvika Rozenberg, Erez Admoni, Yochanan Madmon
  • Publication number: 20180029127
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense layers of feed material on the platform, and a fusing system including an energy source to generate an energy beam having an adjustable intensity profile, an actuator to cause the energy beam to traverse across an outermost layer of feed material, and a controller coupled to the actuator and the energy source. The controller is configured to cause the energy source to adjust the intensity profile of the energy beam on the outermost layer of feed material based on a traversal velocity and/or a traversal direction of the light beam across the outermost layer of feed material.
    Type: Application
    Filed: July 20, 2017
    Publication date: February 1, 2018
    Inventors: Hou T. Ng, Ron Naftali, Christopher G. Talbot
  • Publication number: 20180029126
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to dispense layers of feed material on the platform, and a fusing system to direct an energy beam to fuse at least a portion of the outermost layer of feed material. The fusing system includes an energy source to emit the energy beam, a deformable mirror to receive the energy beam and reflect the energy beam, wherein a shape of the deformable mirror defines at least in part an intensity profile of the energy beam on the outermost layer of feed material, an actuator coupled to the deformable mirror, and a controller coupled to the actuator and configured to cause the actuator to deform the shape of the deformable mirror to adjust the intensity profile of the energy beam on the outermost layer of feed material in accordance to a desired profile.
    Type: Application
    Filed: July 20, 2017
    Publication date: February 1, 2018
    Inventors: Hou T. Ng, Ron Naftali, Christopher G. Talbot
  • Patent number: 9835563
    Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.
    Type: Grant
    Filed: November 19, 2015
    Date of Patent: December 5, 2017
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Yoram Uziel, Ron Naftali, Ofer Adan, Haim Feldman, Ofer Shneyour, Ron Bar-Or, Doron Korngut
  • Publication number: 20170307539
    Abstract: An inspection system that may include an illumination module that may be configured to scan a sample during multiple scan iterations; wherein during each scan iteration the illumination module scans each beam of a plurality of spaced apart beams along a scan line; a mechanical stage that may be configured to move the sample during the multiple scan iterations; a detection module; and a processor; wherein when the inspection system operates in an interlaced mode, the mechanical stage may be configured to move at a first speed thereby preventing a substantial overlap between scan lines obtained during the multiple scan iterations; wherein when the inspection system operates in a non-interlaced mode: the mechanical stage may be configured to move at a second speed that differs from the first speed thereby introducing an overlap between scan lines of different beams that may be obtained during different scan iterations; the detection module may be configured to generate detection signals in response to a detectio
    Type: Application
    Filed: April 20, 2016
    Publication date: October 26, 2017
    Inventors: Boris Golberg, Ron Naftali
  • Publication number: 20170309511
    Abstract: According to an embodiment, a support module is provided for supporting a substrate. The support module may include a chuck and a vertical stage. The chuck may include multiple chuck segments that are independently movable. When the substrate is positioned on the chuck, different chuck segments are positioned under different areas of the substrate. The vertical stage may include multiple piezoelectric motors. Each piezoelectric motor may be configured to perform nanometric scale elevation and lowering movements. The multiple piezoelectric motors may be configured to independently move the multiple chuck segments.
    Type: Application
    Filed: April 20, 2016
    Publication date: October 26, 2017
    Inventors: Doron Korngut, Yuri Belenky, Yoram Uziel, Ron Naftali, Ron Bar-or, Yuval Gronau
  • Patent number: 9784689
    Abstract: According to an embodiment of the invention there may be provided a system for inspecting an object, the system may include a traveling lens acousto-optic device that is configured to generate a sequence of traveling lenses that propagate through an active region of the traveling lens acousto-optic device; an illumination unit that that is configured to illuminate the sequence of traveling lenses to provide a sequence of input beams; a first beam splitter that is configured to split the sequence of input beams to an intermediate array of intermediate beams, the intermediate array comprises multiple sequences of intermediate beams, the sequences of intermediate beams are spaced apart from each other; a masking unit that is configured to mask first beams of the intermediate array and unmask output beams of the intermediate array in an alternating manner; multiple detectors; and an objective lens that is configured to receive the output beams, direct the output beams towards multiple areas of the object, receive
    Type: Grant
    Filed: July 10, 2015
    Date of Patent: October 10, 2017
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Ido Almog, Ron Naftali
  • Publication number: 20170084425
    Abstract: A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.
    Type: Application
    Filed: December 7, 2016
    Publication date: March 23, 2017
    Applicant: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Yoram Uziel, Benzion Sender, Doron Aspir, Yohanan Madmon, Ron Naftali, Yuri Belenky
  • Publication number: 20170010219
    Abstract: According to an embodiment of the invention there may be provided a system for inspecting an object, the system may include a traveling lens acousto-optic device that is configured to generate a sequence of traveling lenses that propagate through an active region of the traveling lens acousto-optic device; an illumination unit that that is configured to illuminate the sequence of traveling lenses to provide a sequence of input beams; a first beam splitter that is configured to split the sequence of input beams to an intermediate array of intermediate beams, the intermediate array comprises multiple sequences of intermediate beams, the sequences of intermediate beams are spaced apart from each other; a masking unit that is configured to mask first beams of the intermediate array and unmask output beams of the intermediate array in an alternating manner; multiple detectors; and an objective lens that is configured to receive the output beams, direct the output beams towards multiple areas of the object, receive
    Type: Application
    Filed: July 10, 2015
    Publication date: January 12, 2017
    Inventors: Ido Almog, Ron Naftali