Patents by Inventor Rong (Lauren) Liu

Rong (Lauren) Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Very high power laser chamber optical improvements
    Patent number: 8982922
    Abstract: An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.
    Type: Grant
    Filed: August 17, 2012
    Date of Patent: March 17, 2015
    Assignee: Cymer, LLC
    Inventors: Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel Brown, Slava Rokitski, Rong (Lauren) Liu, Ray Cybulski, James J. Ferrell, Robert Bergstedt, John Viatella, Thomas Duffey
  • VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
    Publication number: 20120307858
    Abstract: An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.
    Type: Application
    Filed: August 17, 2012
    Publication date: December 6, 2012
    Inventors: Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel Brown, Slava Rokitski, Rong (Lauren) Liu, Ray Cybulski, James J. Ferrell, Robert Bergstedt, John Viatella, Thomas Duffey
  • Very high power laser chamber optical improvements
    Patent number: 8284815
    Abstract: An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.
    Type: Grant
    Filed: October 9, 2009
    Date of Patent: October 9, 2012
    Assignee: Cymer, Inc.
    Inventors: Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel Brown, Slava Rokitski, Rong (Lauren) Liu, Ray Cybulski, James J. Ferrell, Robert Bergstedt, John Viatella, Thomas Duffey
  • VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
    Publication number: 20100098120
    Abstract: An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.
    Type: Application
    Filed: October 9, 2009
    Publication date: April 22, 2010
    Inventors: Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel Brown, Slava Rokitski, Rong (Lauren) Liu, Ray Cybulski, James J. Ferrell, Robert Bergstedt, John Viatella, Thomas Duffey