Patents by Inventor Ryota Kawai

Ryota Kawai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11405016
    Abstract: A resonator includes a vibration portion with a vibration arm extending from a base and having an open end that performs bending vibration. The vibration portion includes upper and lower electrodes with a piezoelectric film disposed therebetween that causes bending vibration of the vibration arm when a voltage is applied between the upper and lower electrodes. A protective film faces the piezoelectric film with the upper electrode interposed therebetween and a conductive film faces the piezoelectric film with the protective film interposed therebetween. Moreover, the conductive film is exposed in a region at the open end and a via electrode is formed in the protective film to electrically connect the conductive film to one of the upper and lower electrodes. The via electrode is positioned closer to a first region than the open end in the second region of the vibration arm in a plan view of the piezoelectric film.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: August 2, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Yoshihisa Inoue, Ryota Kawai
  • Patent number: 11368141
    Abstract: A resonator is provided that includes a base, and three or more vibrating arms each including a first and second electrodes and a piezoelectric film disposed therebetween and having a top surface facing the first electrode. The piezoelectric film vibrates in a predetermined vibration mode when a voltage is applied between the first and second electrodes. Moreover, the three or more vibrating arms include two first arms each located on an outermost side in a direction in which the three or more vibrating arms are arranged and that vibrate in a same phase, and one or more second arms disposed between the two first arms. Each first arm is greater in mass than each second arm.
    Type: Grant
    Filed: December 31, 2019
    Date of Patent: June 21, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Yoshihisa Inoue, Ryota Kawai
  • Publication number: 20220029598
    Abstract: A resonance device is provided that includes a resonator having a base, a vibrating arm extending from one end of the base along a first direction, a frame disposed around at least a part of the vibrating arm and holding the vibrating arm such that the vibrating arm is configured to vibrate, and a support arm connecting the base to the frame. Moreover, a first substrate is provided that includes a first recess forming at least a part of a vibration space for the resonator and a first limiting portion provided away from the support arm by a first distance in a thickness direction, in which the first distance is smaller than a distance between a bottom surface of the first recess and the vibrating arm in the thickness direction of the first substrate.
    Type: Application
    Filed: October 4, 2021
    Publication date: January 27, 2022
    Inventors: Yoshihisa Inoue, Ville Kaajakari, Ryota Kawai
  • Patent number: 11196403
    Abstract: A piezoelectric vibrator is a piezoelectric vibrator including a vibration portion. The vibration portion has an n-type Si layer which is a degenerated semiconductor and which has a resistivity of not less than 0.5 m?cm and not greater than 1.2 m?cm and preferably not greater than 0.9 m?cm.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: December 7, 2021
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Ryota Kawai, Daisuke Nakamura, Toshio Nishimura
  • Patent number: 11196407
    Abstract: A resonator is provided that includes a vibrating portion including a three or more vibrating arms each having a fixed end and a free end, with at least two of the vibrating arms configured to bend out of plane in different phases, and a base having a front end connected to the fixed end of each vibrating arm and a rear end opposite from the front end. Moreover, a frame is disposed at least partially around the vibrating portion, a holding arm is provided between the vibrating portion and the holding portion and includes a first end connected to the base and a second end connected to the frame, and a plurality of holes disposed in the vibrating portion. Moreover, the plurality of holes are each formed in a region between any one pair of adjacent two of the plurality of vibrating arms in the base portion.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: December 7, 2021
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Ryota Kawai, Yoshihisa Inoue, Ville Kaajakari
  • Publication number: 20210203304
    Abstract: A resonator includes a base; and at least three vibrating arms having first ends connected to a front end of the base and second ends that are open ends spaced away from the front end. Each vibrating arm includes an arm portion having a part that extends from the fixed end in a direction toward the open end with a constant width and a mass-adding portion that is connected to a tip of the arm portion and has a larger width than the arm portion. An interval between the mass-adding portions is larger than an interval between the arm portions for any two vibrating arms that are adjacent to each other.
    Type: Application
    Filed: February 22, 2021
    Publication date: July 1, 2021
    Inventors: Yoshihisa Inoue, Ryota Kawai, Yuichi Goto
  • Publication number: 20210194454
    Abstract: A resonance device is provided for reducing the influence on the resonant frequency of the resonance device of the electric charge borne by an insulating film of a frame. The resonance device includes a resonator including a vibration portion and a frame disposed in at least a part of a vicinity of the vibration portion. The frame includes a holding body and an insulating film, with the holding body holding the vibration portion to vibrate and the insulating film being formed above the holding body. A lower cover is provided having a recess forming at least a part of a space in which the vibration portion vibrates. An inner side surface of the insulating film is disposed at a first distance from an inner surface of a side wall defining the recess.
    Type: Application
    Filed: March 9, 2021
    Publication date: June 24, 2021
    Inventors: Keiichi Umeda, Naoto Yatani, Ryota Kawai, Yoshihisa Inoue
  • Publication number: 20210184651
    Abstract: A resonator includes a base, at least one vibration arm, a frame, and a holding arm. The vibration arm includes a piezoelectric film, an upper electrode, and a lower electrode. The inequality Fs/Fm<1.9 or the inequality 2.1<Fs/Fm holds, where Fm is a frequency of a main or primary mode in the vibration arm, and Fs is a frequency of a spurious mode in the holding arm.
    Type: Application
    Filed: March 2, 2021
    Publication date: June 17, 2021
    Inventors: Ryota Kawai, Yuichi Goto, Yoshihisa Inoue
  • Publication number: 20210167751
    Abstract: A resonance device is provided that includes a resonator including upper electrodes, a lower electrode, and a piezoelectric thin film formed therebetween. An upper cover is provided with a first surface facing the upper electrodes of the resonator. A power supply terminal is provided on a second surface of the upper cover with the power supply terminal electrically connected to the upper electrodes. Another power supply terminal is on the second surface of the upper cover and is electrically connected to the upper electrodes. A ground terminal is provided on the second surface of the upper cover and is electrically connected to the lower electrode. An area of each power supply terminal are different from one other such that a capacitance formed between the first power supply terminal and the ground terminal is approximately equal to a capacitance formed between the second power supply terminal and the ground terminal.
    Type: Application
    Filed: February 12, 2021
    Publication date: June 3, 2021
    Inventors: Yuichi Goto, Ryota Kawai
  • Publication number: 20210167754
    Abstract: A resonator is provided that includes a base; at least three vibrating arms that include a piezoelectric film, an upper electrode, and a lower electrode; a frame; and a holding arm. Each vibrating arm includes an arm portion and a tip portion. The holding arm includes a holding side arm that extends parallel to the outer vibrating arm. A release width between the tip portion of the outer vibrating arm and the frame is larger than a release width between the holding side arm and the frame or a release width between the arm portion of the outer vibrating arm and the holding side arm.
    Type: Application
    Filed: February 8, 2021
    Publication date: June 3, 2021
    Inventors: Yoshihisa Inoue, Ryota Kawai, Yuichi Goto
  • Publication number: 20210028763
    Abstract: A resonator includes a vibration portion that has a substrate having a main surface, a lower electrode on the main surface of the substrate, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film. A frame surrounds at least part of the vibration portion. Opening grooves having different widths in a first direction in a plan view of the main surface are provided in a periphery of the vibration portion. In a plan view of the main surface, the upper electrode is provided so as to be spaced from an outer edge of the substrate by a gap which is along the first direction, such that a length of the gap in a region where a width of the opening groove is large is larger than a length of the gap in a region where a width of the opening groove is small.
    Type: Application
    Filed: September 30, 2020
    Publication date: January 28, 2021
    Inventors: Ryota Kawai, Toshio Nishimura
  • Publication number: 20210006230
    Abstract: A resonance device includes a resonator, an upper lid, and a lower lid. The resonator includes a vibration portion, a frame, and holding arms. The vibration portion includes a base and a plurality of vibration arms. The lower lid has a protruding portion protruding between two adjacent vibration arms, the protruding portion has an insulating film, the vibration arms have a weight portion that has a conductive film formed on the insulating film, and in a direction in which the plurality of vibration arms extend, a first distance between the weight portion of any one of the two adjacent vibration arms and the holding portion is less than a second distance between the weight portion and the protruding portion.
    Type: Application
    Filed: September 17, 2020
    Publication date: January 7, 2021
    Inventors: Ryota Kawai, Keisuke Takeyama, Yuichi Goto
  • Patent number: 10879873
    Abstract: A resonator includes a vibration portion with upper and lower electrodes with a piezoelectric film disposed therebetween. Moreover, a protective film is provided to face the piezoelectric film with the upper electrode interposed therebetween and is exposed in a first region in the vibration portion. A conductive film is provided to face the piezoelectric film with the protective film interposed therebetween and is exposed in a second region that is adjacent to the first region in the vibration portion. A connection electrode is formed in the protective film to electrically connect the conductive film to the lower electrode. The upper electrode is formed such that an area of a region overlapping the conductive film is equal to or smaller than half of a total area of the conductive film and/or avoids the region overlapping the conductive film.
    Type: Grant
    Filed: February 28, 2020
    Date of Patent: December 29, 2020
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Yoshihisa Inoue, Ryota Kawai
  • Patent number: 10749496
    Abstract: A resonator is provided having a first electrode and a second electrode; and a piezoelectric film that is disposed between the first and second electrodes, has an upper surface opposing the first electrode, and that vibrates in a predetermined vibration mode when a voltage is applied between the first and second electrodes. Moreover, the resonator includes a protective film made of an insulator and disposed opposing the upper surface of the piezoelectric film with the first electrode interposed therebetween. Furthermore, a conductive film made of a conductor is provided that is disposed opposing the upper surface of the piezoelectric film with the protective film interposed therebetween, where the conductive film is electrically connected to any one of the first and second electrodes.
    Type: Grant
    Filed: November 13, 2018
    Date of Patent: August 18, 2020
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Kentaro Yoshii, Yuichi Goto, Keisuke Takeyama, Toshio Nishimura, Shungo Morinaga, Ryota Kawai, Yoshihisa Inoue
  • Publication number: 20200212877
    Abstract: A resonator includes a vibration portion with a vibration arm extending from a base and having an open end that performs bending vibration. The vibration portion includes upper and lower electrodes with a piezoelectric film disposed therebetween that causes bending vibration of the vibration arm when a voltage is applied between the upper and lower electrodes. A protective film faces the piezoelectric film with the upper electrode interposed therebetween and a conductive film faces the piezoelectric film with the protective film interposed therebetween. Moreover, the conductive film is exposed in a region at the open end and a via electrode is formed in the protective film to electrically connect the conductive film to one of the upper and lower electrodes. The via electrode is positioned closer to a first region than the open end in the second region of the vibration arm in a plan view of the piezoelectric film.
    Type: Application
    Filed: March 10, 2020
    Publication date: July 2, 2020
    Inventors: Yoshihisa Inoue, Ryota Kawai
  • Publication number: 20200204155
    Abstract: A resonator includes a vibration portion with upper and lower electrodes with a piezoelectric film disposed therebetween. Moreover, a protective film is provided to face the piezoelectric film with the upper electrode interposed therebetween and is exposed in a first region in the vibration portion. A conductive film is provided to face the piezoelectric film with the protective film interposed therebetween and is exposed in a second region that is adjacent to the first region in the vibration portion. A connection electrode is formed in the protective film to electrically connect the conductive film to the lower electrode. The upper electrode is formed such that an area of a region overlapping the conductive film is equal to or smaller than half of a total area of the conductive film and/or avoids the region overlapping the conductive film.
    Type: Application
    Filed: February 28, 2020
    Publication date: June 25, 2020
    Inventors: YOSHIHISA INOUE, Ryota Kawai
  • Patent number: 10673402
    Abstract: A resonator that includes a base and one or more vibration arms with fixed ends connected to a front end of the base and open ends extending therefrom. Moreover, the vibration arms include first and second electrodes and a piezoelectric film that is disposed therebetween. The resonator further includes a protective film disposed opposing an upper face of the piezoelectric film and sandwiching the first electrode and a temperature characteristics adjusting film formed of a material different from a material of the protective film and that is provided on the fixed end side relative to the center of the vibration arms such that part of the protective film is exposed to a surface.
    Type: Grant
    Filed: October 30, 2018
    Date of Patent: June 2, 2020
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Yoshihisa Inoue, Toshio Nishimura, Keisuke Takeyama, Ryota Kawai, Yuichi Goto
  • Publication number: 20200144989
    Abstract: A resonator is provided that includes a vibrating portion including a three or more vibrating arms each having a fixed end and a free end, with at least two of the vibrating arms configured to bend out of plane in different phases, and a base having a front end connected to the fixed end of each vibrating arm and a rear end opposite from the front end. Moreover, a frame is disposed at least partially around the vibrating portion, a holding arm is provided between the vibrating portion and the holding portion and includes a first end connected to the base and a second end connected to the frame, and a plurality of holes disposed in the vibrating portion. Moreover, the plurality of holes are each formed in a region between any one pair of adjacent two of the plurality of vibrating arms in the base portion.
    Type: Application
    Filed: November 21, 2019
    Publication date: May 7, 2020
    Inventors: Ryota Kawai, Yoshihisa Inoue, Ville Kaajakari
  • Publication number: 20200136587
    Abstract: A resonator is provided that includes a base, and three or more vibrating arms each including a first and second electrodes and a piezoelectric film disposed therebetween and having a top surface facing the first electrode. The piezoelectric film vibrates in a predetermined vibration mode when a voltage is applied between the first and second electrodes. Moreover, the three or more vibrating arms include two first arms each located on an outermost side in a direction in which the three or more vibrating arms are arranged and that vibrate in a same phase, and one or more second arms disposed between the two first arms. Each first arm is greater in mass than each second arm.
    Type: Application
    Filed: December 31, 2019
    Publication date: April 30, 2020
    Inventors: Yoshihisa Inoue, Ryota Kawai
  • Publication number: 20200112295
    Abstract: A manufacturing method is provided for a resonant device that includes a resonator having a vibrating portion that vibrates according to a voltage applied to an electrode of the resonator. The method includes forming an adjusting film made of molybdenum oxide in a displacement region having a greater displacement caused by vibrations when the voltage is applied than a displacement of another region in the vibrating portion. The method further includes adjusting a frequency of the resonator by removing at least part of the adjusting film with laser.
    Type: Application
    Filed: December 6, 2019
    Publication date: April 9, 2020
    Inventors: Ryota Kawai, Ville Kaajakari