Abstract: A power conversion device has at least one electronic component, an accommodating case configured to accommodate the electronic component, and a connector unit provided on the accommodating case. The connector unit includes a connector portion provided with an external terminal electrically connected to outside, and a conductive member extending from the connector portion and electrically connecting the connector portion and the electronic component. A fragile portion is formed in the conductive member.

Abstract: There is provided a gas solution supply apparatus capable of preventing bubbles from being generated in use at a point-of-use even if gas solution to be provided to a point-of-use has a high concentration. The gas solution supply apparatus 1 includes: a gas dissolving unit 4 that dissolves a source gas in a source liquid to produce a first gas solution; a first gas-liquid separator 10 that stores the first gas solution produced and produces a second gas solution through gas-liquid separation of the first gas solution; a pressure reducer 17 that depressurizes the second gas solution produced in the first gas-liquid separator 10; and a second gas-liquid separator 12 that stores the depressurized second gas solution and produces a third gas solution through gas-liquid separation of the second gas solution. The third gas solution is supplied to a point-of-use.

Abstract: A vibratory gyroscope is provided comprising a plurality of secondary pickoff transducers which are each sensitive to the secondary response mode, wherein: at least two of the secondary pickoff transducers comprise skew transducers designed to be sensitive to the primary mode which produce an induced quadrature signal in response thereto. A method of using the gyroscope is provided comprising the steps of arranging electrical connections between the secondary pickoff transducers and a pickoff amplifier so that in use the induced quadrature signal is substantially rejected by the amplifier in the absence of a fault condition, and the amplifier outputs an induced quadrature signal when a fault condition disconnects one of the skew transducers from the amplifier, and a comparator compares the quadrature output from the pickoff amplifier with a predetermined threshold value and provides a fault indication when the predetermined threshold is exceeded.

Abstract: A vibratory gyro which is provided with a ring-shaped vibrating body, leg portions flexibly supporting the ring-shaped vibrating body, a plurality of electrodes formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode. The plurality of electrodes include a bank of driving electrodes for exciting primary vibration, detection electrodes for detecting secondary vibration, and suppression electrodes for suppressing the secondary vibration on the basis of a voltage signal from the detection electrodes. The driving electrodes, the detection electrodes and the suppression electrodes are disposed in the region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

Abstract: A vibratory gyroscope is provided comprising a plurality of secondary pickoff transducers which are each sensitive to the secondary response mode, wherein: at least two of the secondary pickoff transducers comprise skew transducers designed to be sensitive to the primary mode which produce an induced quadrature signal in response thereto. A method of using the gyroscope is provided comprising the steps of arranging electrical connections between the secondary pickoff transducers and a pickoff amplifier so that in use the induced quadrature signal is substantially rejected by the amplifier in the absence of a fault condition, and the amplifier outputs an induced quadrature signal when a fault condition disconnects one of the skew transducers from the amplifier, and a comparator compares the quadrature output from the pickoff amplifier with a predetermined threshold value and provides a fault indication when the predetermined threshold is exceeded.

Abstract: A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13h formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos N? is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a uniaxial to triaxial angular velocity by adopting a secondary vibration detector inclusive of an out-of-plane vibration mode.

Abstract: A vibrating gyroscope comprises a ring-shaped vibrating body (11) a leg portion (15) flexibly supporting the body (11) and having a fixed end, a fixed potential electrode (16), and a plurality of electrodes (13a-13d) with a piezoelectric film sandwiched between an upper and a lower-layer metallic film in a thickness direction thereof. When N is a natural number of 2 or more, the plurality of electrodes (13a-13d) include driving electrodes (13a) for a primary vibration in a vibration mode of cosN?, which are each disposed (360/N)° apart from each other in a circumferential direction, first detection electrodes (13b) and second detection electrodes (13d) for detecting a secondary vibration generated when an angular velocity is applied to the body (11), which are each disposed in a certain region related to the driving electrode (13a) Each of the electrodes is also disposed in a certain region of the body (11).

Abstract: A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13f formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos N? is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13f are disposed at specific positions.

Abstract: A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, leg portions 15 flexibly supporting the ring-shaped vibrating body, a plurality of electrodes 13a, 13b, . . . , 13h that are disposed on the plane of or above the ring-shaped vibrating body and are formed with one of an upper-layer metallic film and a lower-layer metallic film, and a piezoelectric film being sandwiched between the upper-layer metallic film and the lower-layer metallic film in a thickness direction thereof. When one of the driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos N? is referred to as a reference driving electrode, the remaining plurality of electrodes 13b, . . . , 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a secondary vibration inclusive of an out-of-plane vibration mode.

Abstract: A vibratory gyro which is provided with a ring-shaped vibrating body, leg portions flexibly supporting the ring-shaped vibrating body, a plurality of electrodes formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode. The plurality of electrodes include a bank of driving electrodes for exciting primary vibration, detection electrodes for detecting secondary vibration, and suppression electrodes for suppressing the secondary vibration on the basis of a voltage signal from the detection electrodes. The driving electrodes, the detection electrodes and the suppression electrodes are disposed in the region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

Abstract: A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13h formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos N? is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a uniaxial to triaxial angular velocity by adopting a secondary vibration detector inclusive of an out-of-plane vibration mode.

Abstract: A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13f formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos N? is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13f are disposed at specific positions.

Abstract: A vibrating gyroscope comprises a ring-shaped vibrating body (11) a leg portion (15) flexibly supporting the body (11) and having a fixed end, a fixed potential electrode (16), and a plurality of electrodes (13a-13d) with a piezoelectric film sandwiched between an upper and a lower-layer metallic film in a thickness direction thereof. When N is a natural number of 2 or more, the plurality of electrodes (13a-13d) include driving electrodes (13a) for a primary vibration in a vibration mode of cosN?, which are each disposed (360/N)° apart from each other in a circumferential direction, first detection electrodes (13b) and second detection electrodes (13d) for detecting a secondary vibration generated when an angular velocity is applied to the body (11), which are each disposed in a certain region related to the driving electrode (13a) Each of the electrodes is also disposed in a certain region of the body (11).

Abstract: A MEMS device including a getter film formed inside a hermetic chamber provides stable performance of the MEMS device by electrically stabilizing the getter film. The MEMS device includes a movable portion and a fixed portion formed inside the hermetic chamber. The hermetic chamber is formed by a base material of the MEMS device and glass substrates and having a cavity and cavities made therein. A part of any continuous getter film formed inside the hermetic chamber connects to only one of any one or a plurality of predetermined electrical potentials of the fixed portion and a ground potential of the fixed portion through the base material of the MEMS device.

Abstract: A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.

Abstract: A MEMS device including a getter film formed inside a hermetic chamber provides stable performance of the MEMS device by electrically stabilizing the getter film. The MEMS device includes a movable portion and a fixed portion formed inside the hermetic chamber. The hermetic chamber is formed by a base material of the MEMS device and glass substrates and 32 having a cavity and cavities made therein. A part of any continuous getter film formed inside the hermetic chamber connects to only one of any one or a plurality of predetermined electrical potentials of the fixed portion and a ground potential of the fixed portion through the base material of the MEMS device.

Abstract: A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.

Abstract: (1) A laser processing method for silicon substrates wherein a roughness (Ra) of a surface of a silicon substrate is adjusted to 0.05 micron-1 micron after which a laser is applied. (2) A laser processing device for silicon substrates including: means for adjusting a surface of a silicon substrate to 0.05 micron-1 micron; and means for applying a laser. This method and device is able to prevent spattering of melted silicon and provides superior processing precision and allows efficient formation of holes and cutting on a silicon substrate. In particular, the present invention is useful for opening short-circuit sections disposed in silicon wiring.