Patents by Inventor Sadatatsu IKEDA

Sadatatsu IKEDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11703751
    Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2?) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.
    Type: Grant
    Filed: September 1, 2021
    Date of Patent: July 18, 2023
    Assignee: AGC INC.
    Inventors: Hiroshi Hanekawa, Tsuyoshi Kakuta, Yoichi Sera, Sadatatsu Ikeda
  • Publication number: 20210397077
    Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2?) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.
    Type: Application
    Filed: September 1, 2021
    Publication date: December 23, 2021
    Applicant: AGC INC.
    Inventors: Hiroshi HANEKAWA, Tsuyoshi KAKUTA, Yoichi SERA, Sadatatsu IKEDA
  • Patent number: 11150550
    Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2?) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: October 19, 2021
    Assignee: AGC INC.
    Inventors: Hiroshi Hanekawa, Tsuyoshi Kakuta, Yoichi Sera, Sadatatsu Ikeda
  • Publication number: 20190049836
    Abstract: A reflective mask blank includes, on/above a substrate in the following order from the substrate side a multilayer reflective film which reflects EUV light and an absorber film which absorbs EUV light. The absorber film is a tantalum-based material film containing a tantalum-based material. The absorber film provides a peak derived from the tantalum-based material in an X-ray diffraction pattern, the peak having a peak diffraction angle (2?) of 36.8 degrees or more and a full width at half maximum of 1.5 degrees or more.
    Type: Application
    Filed: August 7, 2018
    Publication date: February 14, 2019
    Applicant: AGC INC.
    Inventors: Hiroshi HANEKAWA, Tsuyoshi KAKUTA, Yoichi SERA, Sadatatsu IKEDA
  • Patent number: 10038188
    Abstract: To provide a cathode active material with which a lithium ion secondary battery having favorable cycle characteristics and having a high energy density even when discharged at a high voltage can be obtained; a cathode comprising the cathode active material; and a lithium ion secondary battery having the cathode. A cathode active material comprising a composite oxide (A) containing Li and at least one transition metal element selected from the group consisting of Ni, Co and Mn, and the following particles (B) and the following fluorinated carbon material (C) present on the surface of the composite oxide (A): particles (B): particles containing an oxide of at least one metal element selected from the group consisting of Ti, Sn, Si, Al, Ce, Y, Zr, Co, W, V, Nb, Ta, La and Mg; and fluorinated carbon material (C): a fluorinated carbon material in the form of particles or fibers.
    Type: Grant
    Filed: April 23, 2015
    Date of Patent: July 31, 2018
    Assignee: SUMITOMO CHEMICAL CO., LTD.
    Inventors: Widjaja Hardiyanto, Chikaya Tamitsuji, Naoki Yoshida, Sadatatsu Ikeda
  • Publication number: 20160043396
    Abstract: To provide a cathode active material to be used for a positive electrode of a lithium ion secondary battery having a high discharge capacity and favorable cycle durability. A cathode active material, which comprises a lithium-containing composite oxide containing at least one transition metal element (X) selected from the group consisting of Ni element, Co element and Mn element, and Li element (provided that the molar ratio (Li/X) of the Li element based on the total amount of the transition metal element (X) is from 1.1 to 1.7), wherein the aspect ratio of primary particles is from 2.5 to 10, and in an X-ray diffraction pattern, the ratio (I020/I003) of the integrated intensity (I020) of a peak of (020) plane assigned to a crystal structure with space group C2/m to the integrated intensity (I003) of a peak of (003) plane assigned to a crystal structure with space group R-3m is from 0.02 to 0.3.
    Type: Application
    Filed: October 21, 2015
    Publication date: February 11, 2016
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: Tomohiro SAKAI, Sadatatsu Ikeda, Tsubasa Takasugi, Takuya Teratani
  • Publication number: 20150325851
    Abstract: To provide a cathode active material with which a lithium ion secondary battery having favorable cycle characteristics and having a high energy density even when discharged at a high voltage can be obtained; a cathode comprising the cathode active material; and a lithium ion secondary battery having the cathode. A cathode active material comprising a composite oxide (A) containing Li and at least one transition metal element selected from the group consisting of Ni, Co and Mn, and the following particles (B) and the following fluorinated carbon material (C) present on the surface of the composite oxide (A): particles (B): particles containing an oxide of at least one metal element selected from the group consisting of Ti, Sn, Si, Al, Ce, Y, Zr, Co, W, V, Nb, Ta, La and Mg; and fluorinated carbon material (C): a fluorinated carbon material in the form of particles or fibers.
    Type: Application
    Filed: April 23, 2015
    Publication date: November 12, 2015
    Applicant: Asahi Glass Company, Limited
    Inventors: Widjaja HARDIYANTO, Chikaya TAMITSUJI, Naoki YOSHIDA, Sadatatsu IKEDA