Patents by Inventor Salvador Eslava Fernandez

Salvador Eslava Fernandez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • UV light exposure for functionalization and hydrophobization of pure-silica zeolites
    Patent number: 7632771
    Abstract: A method is provided for making pure-silica-zeolite films useful as low-k material, specifically, more hydrophobic, homogeneous and with absence of cracks. The method utilizes a UV cure; preferably the UV cure is performed at temperatures at higher than the deposition temperature. The UV-assisted cure removes the organic template promoting organic functionalization and silanol condensation, making the silica-zeolite films more hydrophobic. Moreover, the zeolite material is also mechanically stronger and crack-free. The method can be used to prepare pure-silica-zeolite films more suitable as low-k materials in semiconductor processing.
    Type: Grant
    Filed: February 6, 2007
    Date of Patent: December 15, 2009
    Assignees: IMEC, Katholieke Universiteit Leuven (KUL)
    Inventors: Francesca Iacopi, Salvador Eslava Fernandez, Christine Kirschhock, Johan Martens