Patents by Inventor Sanghyun CHUNG

Sanghyun CHUNG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma Processing Apparatus
    Publication number: 20190006156
    Abstract: A plasma processing apparatus includes an electrostatic chuck configured to adsorb and hold a wafer, a focus ring disposed to surround an upper edge of the electrostatic chuck, an insulating tube disposed to cover a side surface of the electrostatic chuck, and a conductive tube disposed to cover the insulating tube.
    Type: Application
    Filed: January 4, 2017
    Publication date: January 3, 2019
    Inventors: Sang-Hun SEO, Sanghyun CHUNG