Abstract: A substrate conveying robot includes a controller configured or programmed to acquire a conveyance gap based on an image captured by an imager, and control at least one of carrying a substrate out of a storage or carrying the substrate into the storage based on a size of an acquired conveyance gap.

Abstract: A robot includes an arm, a hand, a camera, a calculation unit, and a motion controller. The hand is attached to the arm, and supports and transfers a substrate. The camera is attached to the hand and captures images of the substrate disposed at the take-out position from a plurality of viewpoints to acquire images of the substrate. The calculator calculates three-dimensional information of the substrate based on the hand acquired by the camera. The motion controller moves the hand to take out the substrate based on the three-dimensional information of the substrate calculated by the calculator.