Patents by Inventor Scott G. Singlevich

Scott G. Singlevich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making an antifuse structure using a metal cap layer
    Patent number: 5759876
    Abstract: An antifuse includes a metal cap layer located at the second barrier layer of the antifuse to improve the antifuse yield and long term reliability. An antifuse further includes one or more interfacial oxide film layers surrounding an antifuse dielectric layer to provide narrowing of the antifuse programming voltage distribution and to further improve the antifuse yield and long term reliability.
    Type: Grant
    Filed: November 1, 1995
    Date of Patent: June 2, 1998
    Assignee: United Technologies Corporation
    Inventors: Scott G. Singlevich, Bradley S. Holway, Kurt D. Humphrey, Brian Scott Poarch, Michael R. Reeder, Neal J. Verzwyvelt
  • Tight control of resistor valves in a SRAM process
    Patent number: 5384278
    Abstract: A method of forming a polycrystalline silicon resistor includes the step of forming a resistor region of poly, the region being doped per a desired resistivity of the resistor. The exposed top and side portions of the poly region are completely covered with an insulating oxide. A predetermined portion of the oxide is etched away, resulting in a portion of the oxide completely covering the resistor poly. The resistor poly region and oxide are covered (masked) with photoresist, the mask extending beyond the sides of the poly. The remaining oxide in the area outside of the mask is etched away, and the photoresist is removed.
    Type: Grant
    Filed: July 7, 1994
    Date of Patent: January 24, 1995
    Assignee: United Technologies Corporation
    Inventor: Scott G. Singlevich