Patents by Inventor Senthil Kumar NATTAMAI SUBRAMANIAN

Senthil Kumar NATTAMAI SUBRAMANIAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250027195
    Abstract: A method includes performing an atomic layer deposition (ALD) process with respect to a plurality of target elements to coat interiors of the plurality of target elements with a protective coating. Performing the ALD process includes alternating delivery of a first precursor inside the plurality of target elements for a first duration to form an adsorption layer on the interiors of the plurality of target elements, alternating purging of the first precursor from the plurality of target elements for a second duration, and alternating delivery of a second precursor inside the plurality of target elements for a third duration to cause the second precursor to react with the adsorption layer and form a target layer on the interiors of the plurality of target elements.
    Type: Application
    Filed: July 18, 2023
    Publication date: January 23, 2025
    Inventors: Yogesh Tomar, Nikshep Patil, Kirubanandan Shanmugam Naina, Hanish Kumar Panavalappil Kumarankutty, Gayatri Natu, Mahesh Chelvaraj Arcot, Senthil Kumar Nattamai Subramanian, Hari Venkatesh Rajendran, Michael Rice, Christopher Laurent Beaudry
  • Publication number: 20240420926
    Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a method for coating a part via atomic layer deposition includes: fastening a workpiece to be coated to an interior volume facing portion of a part coating reactor; and performing an ALD process on the fastened workpiece within the part coating reactor.
    Type: Application
    Filed: August 26, 2024
    Publication date: December 19, 2024
    Inventors: Michael R. RICE, Hanish Kumar PANAVALAPPIL KUMARANKUTTY, Steven D. MARCUS, Kirubanandan Naina SHANMUGAM, Sriharsha DHARMAPURA SATHYANARAYANAMURTHY, Madhukar KRISHNA, Shivaprakash Padadayya HIREMATH, Senthil Kumar NATTAMAI SUBRAMANIAN, Sankar Menon CHERUBALA PATHAYAPURA
  • Patent number: 12074010
    Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a part coating reactor includes: a lower body and a lid assembly that together define and enclose an interior volume; one or more heaters disposed in the lid assembly; one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough; a plurality of gas passages disposed through the lid assembly to facilitate providing one or more gases to the interior volume, wherein the plurality of gas passages include a plurality of fluidly independent plenums disposed in the lid assembly; and one or more mounting brackets to facilitate coupling a workpiece to the lid assembly.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: August 27, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Michael R. Rice, Hanish Kumar Panavalappil Kumarankutty, Steven D. Marcus, Kirubanandan Naina Shanmugam, Sriharsha Dharmapura Sathyanarayanamurthy, Madhukar Krishna, Shivaprakash Padadayya Hiremath, Senthil Kumar Nattamai Subramanian, Sankar Menon Cherubala Pathayapura
  • Publication number: 20240117491
    Abstract: Embodiments of an apparatus for coating a plurality of gas lines are provided herein. In some embodiments, an apparatus for coating a plurality of gas lines via an ALD process includes: an oven having an enclosure that defines an interior volume configured to house the plurality of gas lines, the enclosure having a door configured for transferring the plurality of gas lines into and out of the interior volume; a plurality of inlet ports disposed through a first wall of the enclosure; a plurality of exhaust ports disposed through a second wall of the enclosure; a fluid panel disposed outside of the oven and coupled to the plurality of inlet ports via corresponding ones of a plurality of fluid distribution assemblies; and a foreline disposed outside of the oven and coupled to the plurality of exhaust ports.
    Type: Application
    Filed: October 7, 2022
    Publication date: April 11, 2024
    Inventors: Hanish Kumar PANAVALAPPIL KUMARANKUTTY, Yogesh TOMAR, Nikshep M. PATIL, Hari Venkatesh RAJENDRAN, Kirubanandan Naina SHANMUGAM, Gayatri NATU, Mahesh ARCOT, Senthil Kumar NATTAMAI SUBRAMANIAN, Steven D. MARCUS, Michael R. RICE
  • Publication number: 20230074149
    Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a part coating reactor includes: a lower body and a lid assembly that together define and enclose an interior volume; one or more heaters disposed in the lid assembly; one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough; a plurality of gas passages disposed through the lid assembly to facilitate providing one or more gases to the interior volume, wherein the plurality of gas passages include a plurality of fluidly independent plenums disposed in the lid assembly; and one or more mounting brackets to facilitate coupling a workpiece to the lid assembly.
    Type: Application
    Filed: September 9, 2021
    Publication date: March 9, 2023
    Inventors: Michael R. RICE, Hanish Kumar PANAVALAPPIL KUMARANKUTTY, Steven D. MARCUS, Kirubanandan Naina SHANMUGAM, Sriharsha DHARMAPURA SATHYANARAYANAMURTHY, Madhukar KRISHNA, Shivaprakash Padadayya HIREMATH, Senthil Kumar NATTAMAI SUBRAMANIAN, Sankar Menon CHERUBALA PATHAYAPURA