Patents by Inventor Seonkyung Lee
Seonkyung Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20220334554Abstract: A large beam spot spectral reflectometer system for measuring a substrate is provided. Hardware components for collecting in situ large beam spot optical signals is disclosed. Machine learning models for denoising large beam spot optical signals are disclosed. Machine learning models for interpreting in situ optical data and facilitating process control are also disclosed.Type: ApplicationFiled: April 15, 2022Publication date: October 20, 2022Applicant: Lam Research CorporationInventors: Ye Feng, Seonkyung Lee, Rajan Arora, Jorge Luque
-
Patent number: 11056322Abstract: A method for dry processing a substrate in a processing chamber is provided. The substrate is placed in the processing chamber. The substrate is dry processed, wherein the dry processing creates at least one gas byproduct. A concentration of the at least one gas byproduct is measured. The concentration of the at least one gas byproduct is used to determine processing rate of the substrate.Type: GrantFiled: August 3, 2017Date of Patent: July 6, 2021Assignee: Lam Research CorporationInventors: Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee, Thorsten Lill
-
Patent number: 10325760Abstract: A system and method monitoring a plasma with an optical sensor to determine the operations of a pulsed RF signal for plasma processing including a plasma chamber with an optical sensor directed toward a plasma region. An RF generator coupled to the plasma chamber through a match circuit. An RF timing system coupled to the RF generator. A system controller is coupled to the plasma chamber, the RF generator, the optical sensor, the RF timing system and the match circuit. The system controller includes a central processing unit, a memory system, a set of RF generator settings and an optical pulsed plasma analyzer coupled to the optical sensor and being capable to determine a timing of a change in state of an optical emission received in the optical sensor and/or a set of amplitude statistics corresponding to an amplitude of the optical emission received in the optical sensor.Type: GrantFiled: March 28, 2017Date of Patent: June 18, 2019Assignee: Lam Research CorporationInventors: John C. Valcore, Jr., Tony San, Seonkyung Lee
-
Publication number: 20170338160Abstract: A method for dry processing a substrate in a processing chamber is provided. The substrate is placed in the processing chamber. The substrate is dry processed, wherein the dry processing creates at least one gas byproduct. A concentration of the at least one gas byproduct is measured. The concentration of the at least one gas byproduct is used to determine processing rate of the substrate.Type: ApplicationFiled: August 3, 2017Publication date: November 23, 2017Inventors: Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee, Thorsten Lill
-
Patent number: 9752981Abstract: A spectral reflectometer system for measuring a substrate is provided. A light source is provided. At least one optical detector is provided. An optical cable comprises a plurality of optical fibers, wherein the plurality of optical fibers comprises a first plurality of optical fibers, which are transmission optical fibers which extend from the light source to an optical path, and a second plurality of optical fibers, which are reflection optical fibers which extend from the optical path to the at least one optical detector. A microlens array is in the optical path.Type: GrantFiled: April 1, 2016Date of Patent: September 5, 2017Assignee: Lam Research CorporationInventors: Seonkyung Lee, Dmitry Opaits
-
Patent number: 9735069Abstract: A method for dry processing a substrate in a processing chamber is provided. The substrate is placed in the processing chamber. The substrate is dry processed, wherein the dry processing creates at least one gas byproduct. A concentration of the at least one gas byproduct is measured. The concentration of the at least one gas byproduct is used to determine processing rate of the substrate.Type: GrantFiled: September 23, 2015Date of Patent: August 15, 2017Assignee: Lam Research CorporationInventors: Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee, Thorsten Lill
-
Publication number: 20170200592Abstract: A system and method monitoring a plasma with an optical sensor to determine the operations of a pulsed RF signal for plasma processing including a plasma chamber with an optical sensor directed toward a plasma region. An RF generator coupled to the plasma chamber through a match circuit. An RF timing system coupled to the RF generator. A system controller is coupled to the plasma chamber, the RF generator, the optical sensor, the RF timing system and the match circuit. The system controller includes a central processing unit, a memory system, a set of RF generator settings and an optical pulsed plasma analyzer coupled to the optical sensor and being capable to determine a timing of a change in state of an optical emission received in the optical sensor and/or a set of amplitude statistics corresponding to an amplitude of the optical emission received in the optical sensor.Type: ApplicationFiled: March 28, 2017Publication date: July 13, 2017Inventors: John C. Valcore, JR., Tony San, Seonkyung Lee
-
Patent number: 9627186Abstract: A system and method monitoring a plasma with an optical sensor to determine the operations of a pulsed RF signal for plasma processing including a plasma chamber with an optical sensor directed toward a plasma region. An RF generator coupled to the plasma chamber through a match circuit. An RF timing system coupled to the RF generator. A system controller is coupled to the plasma chamber, the RF generator, the optical sensor, the RF timing system and the match circuit. The system controller includes a central processing unit, a memory system, a set of RF generator settings and an optical pulsed plasma analyzer coupled to the optical sensor and being capable to determine a timing of a change in state of an optical emission received in the optical sensor and/or a set of amplitude statistics corresponding to an amplitude of the optical emission received in the optical sensor.Type: GrantFiled: November 25, 2014Date of Patent: April 18, 2017Assignee: Lam Research CorporationInventors: John C. Valcore, Jr., Tony San, Seonkyung Lee
-
Publication number: 20170084503Abstract: A method for dry processing a substrate in a processing chamber is provided. The substrate is placed in the processing chamber. The substrate is dry processed, wherein the dry processing creates at least one gas byproduct. A concentration of the at least one gas byproduct is measured. The concentration of the at least one gas byproduct is used to determine processing rate of the substrate.Type: ApplicationFiled: September 23, 2015Publication date: March 23, 2017Inventors: Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee, Thorsten Lill
-
Publication number: 20160320293Abstract: A spectral reflectometer system for measuring a substrate is provided. A light source is provided. At least one optical detector is provided. An optical cable comprises a plurality of optical fibers, wherein the plurality of optical fibers comprises a first plurality of optical fibers, which are transmission optical fibers which extend from the light source to an optical path, and a second plurality of optical fibers, which are reflection optical fibers which extend from the optical path to the at least one optical detector. A microlens array is in the optical path.Type: ApplicationFiled: April 1, 2016Publication date: November 3, 2016Inventors: Seonkyung LEE, Dmitry OPAITS
-
Publication number: 20160064199Abstract: A system and method monitoring a plasma with an optical sensor to determine the operations of a pulsed RF signal for plasma processing including a plasma chamber with an optical sensor directed toward a plasma region. An RF generator coupled to the plasma chamber through a match circuit. An RF timing system coupled to the RF generator. A system controller is coupled to the plasma chamber, the RF generator, the optical sensor, the RF timing system and the match circuit. The system controller includes a central processing unit, a memory system, a set of RF generator settings and an optical pulsed plasma analyzer coupled to the optical sensor and being capable to determine a timing of a change in state of an optical emission received in the optical sensor and/or a set of amplitude statistics corresponding to an amplitude of the optical emission received in the optical sensor.Type: ApplicationFiled: November 25, 2014Publication date: March 3, 2016Inventors: John C. Valcore, JR., Tony San, Seonkyung Lee
-
Patent number: 9036676Abstract: Singlet oxygen metastables can be formed. A catalytic coating is formed on an interior surface of a flow reactor, and an oxygen containing species is flowed into the flow reactor to produce singlet oxygen metastables by a chemical reaction in the presence of the catalytic coating.Type: GrantFiled: January 16, 2014Date of Patent: May 19, 2015Assignee: Physical Sciences, Inc.Inventors: W. Terry Rawlins, Seonkyung Lee, Steven J. Davis
-
Publication number: 20140185642Abstract: Singlet oxygen metastables can be formed. A catalytic coating is formed on an interior surface of a flow reactor, and an oxygen containing species is flowed into the flow reactor to produce singlet oxygen metastables by a chemical reaction in the presence of the catalytic coating.Type: ApplicationFiled: January 16, 2014Publication date: July 3, 2014Applicant: Physical Sciences, Inc.Inventors: W. Terry Rawlins, Seonkyung Lee, Steven J. Davis
-
Patent number: 8670475Abstract: Singlet oxygen metastables can be formed. A catalytic coating is formed on an interior surface of a flow reactor, and an oxygen containing species is flowed into the flow reactor to produce singlet oxygen metastables by a chemical reaction in the presence of the catalytic coating.Type: GrantFiled: June 26, 2009Date of Patent: March 11, 2014Assignee: Physical Sciences, Inc.Inventors: W. Terry Rawlins, Seonkyung Lee, Steven J. Davis
-
Publication number: 20130259769Abstract: Singlet oxygen metastables can be formed. A catalytic coating is formed on an interior surface of a flow reactor, and an oxygen containing species is flowed into the flow reactor to produce singlet oxygen metastables by a chemical reaction in the presence of the catalytic coating.Type: ApplicationFiled: June 26, 2009Publication date: October 3, 2013Inventors: W. Terry Rawlins, Seonkyung Lee, Steven J. Davis
-
Patent number: 8432949Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.Type: GrantFiled: September 14, 2010Date of Patent: April 30, 2013Assignee: Physical Sciences Inc.Inventors: W. Terry Rawlins, David B. Oakes, Seonkyung Lee, Steven J. Davis
-
Publication number: 20110170571Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.Type: ApplicationFiled: September 14, 2010Publication date: July 14, 2011Inventors: W. Terry Rawlins, David B. Oakes, Seonkyung Lee, Steven J. Davis
-
Patent number: 7817699Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.Type: GrantFiled: January 22, 2008Date of Patent: October 19, 2010Assignee: Physical Sciences, Inc.Inventors: W. Terry Rawlins, David B. Oaks, Seonkyung Lee, Steven J. Davis
-
Publication number: 20090323743Abstract: A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power and gas flow rate to produce a selected amount of energetic singlet oxygen metastables flowing in the direction of the optical resonator. The second source for the second gas is disposed between the optical resonator and the microwave driven discharge device. The second gas reacts with the selected amount of energetic singlet oxygen metastables to form an excited species in an amount sufficient to support lasing of the excited species in the optical resonator.Type: ApplicationFiled: January 22, 2008Publication date: December 31, 2009Inventors: W. Terry Rawlins, David B. Oaks, Seonkyung Lee, Steven J. Davis