Patents by Inventor Ser Wee Sebastian Quek

Ser Wee Sebastian Quek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing apparatus improved substrate carrier head and method of use
    Patent number: 6245193
    Abstract: An improved and new substrate carrier head for use in a CMP apparatus is described. The new substrate carrier head has a substrate retaining ring with embedded intersecting channels in the outer face. The embedded intersecting channels improve the circulation of polishing slurry to and from the polished substrate and polishing byproducts away from the polished substrate and thereby improve the polishing uniformity on the substrate.
    Type: Grant
    Filed: March 13, 2000
    Date of Patent: June 12, 2001
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Ser Wee Sebastian Quek, Charles Lin, Jimmy Lo Yuk Ting
  • Chemical mechanical polishing apparatus with improved substrate carrier head and method of use
    Patent number: 6136710
    Abstract: An improved and new substrate carrier head for use in a CMP apparatus is described. The new substrate carrier head has a substrate retaining ring with embedded intersecting channels in the outer face. The embedded intersecting channels improve the circulation of polishing slurry to and from the polished substrate and polishing byproducts away from the polished substrate and thereby improve the polishing uniformity on the substrate.
    Type: Grant
    Filed: October 19, 1998
    Date of Patent: October 24, 2000
    Assignee: Chartered Semiconductor Manufacturing, Ltd.
    Inventors: Ser Wee Sebastian Quek, Charles Lin, Jimmy Lo(Yuk Ting)