Abstract: Multiple fluid sample processors and systems for high throughput chemical synthesis and biological assays and/or processing. A multi-layered fluidic array having microchannels, reservoirs and reaction wells is subject to robotic and automated handling. A pressure pumping system is utilized for fluid delivery and control through the synthesis process. The sizes of the micro-sized channels, apertures, and valves are adjusted to optimize fluid distribution and channel filling. The fluid sample processors can be grouped together in a microtiter format to increase the speed, quantity and efficiency of the processing.

Abstract: An apparatus for exposing a radiation sensitive workpiece to define patterns therein includes an electron gun, a mask with spaced apertures for passing electron radiation, and a radiation deflector-blanker to direct the radiation to selected ones of the apertures and to form separate beamlets from the apertures then demagnify the separate beamlets and direct them onto the workpiece without crossing them. In one embodiment, the groups of apertures are fixed on the mask and define fixed undivided profiles in the path of the radiation.