Patents by Inventor Shicai Fang

Shicai Fang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ceramic ring with a ladder structure
    Patent number: 10643882
    Abstract: A ceramic ring for supporting a wafer, comprising: a body; and an annular recess provided in the center of the body, the annular recess having a bottom surface and a buffer portion extending upwards from the bottom surface to the surface of the body. The ceramic ring can ensure reliability in positioning the wafer, and can prevent the edge side of the wafer from generating particles by contacting the ceramic ring.
    Type: Grant
    Filed: August 18, 2017
    Date of Patent: May 5, 2020
    Assignee: PIOTECH CO., LTD.
    Inventors: Xuyen Pham, Zhi Chai, Shicai Fang
  • Load lock chamber and the cluster tool system using the same
    Patent number: 10497591
    Abstract: Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes grooves defined thereon for calibrating the machine arm frontend finger.
    Type: Grant
    Filed: September 16, 2016
    Date of Patent: December 3, 2019
    Assignee: PIOTECH CO., LTD.
    Inventors: Ren Zhou, Xuyen Pham, Brian Lu, Sean Chang, Shicai Fang, Jie Lian, Enguo Men
  • CERAMIC RING WITH A LADDER STRUCTURE
    Publication number: 20180053682
    Abstract: A ceramic ring for supporting a wafer, comprising: a body; and an annular recess provided in the center of the body, the annular recess having a bottom surface and a buffer portion extending upwards from the bottom surface to the surface of the body. The ceramic ring can ensure reliability in positioning the wafer, and can prevent the edge side of the wafer from generating particles by contacting the ceramic ring.
    Type: Application
    Filed: August 18, 2017
    Publication date: February 22, 2018
    Inventors: XUYEN PHAM, ZHI CHAI, SHICAI FANG
  • LOAD LOCK CHAMBER AND THE CLUSTER TOOL SYSTEM USING THE SAME
    Publication number: 20170271187
    Abstract: Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes grooves defined thereon for calibrating the machine arm frontend finger.
    Type: Application
    Filed: September 16, 2016
    Publication date: September 21, 2017
    Inventors: Ren ZHOU, Xuyen Pham, Brian Lu, Sean Chang, Shicai Fang, Jie Lian, Enguo Men