Patents by Inventor Shigeki EGAMI

Shigeki EGAMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210379693
    Abstract: A processing system has: an irradiation optical system irradiating an object with an energy beam from a light source; an object placing apparatus on which the object is placed; a light receiving apparatus that is disposed at the object placing apparatus and that optically receives the energy beam from the irradiation optical system; and a measurement apparatus that measures at least one of the light receiving apparatus and a part that is related to the light receiving apparatus. The processing system moves the object placing apparatus to a position at which the light receiving apparatus optically receives the energy beam and moves the object placing apparatus to a position at which the measurement apparatus measures a position of the light receiving apparatus. .
    Type: Application
    Filed: October 31, 2019
    Publication date: December 9, 2021
    Applicant: NIKON CORPORATION
    Inventors: Shigeki EGAMI, Yosuke TATSUZAKI
  • Publication number: 20210370444
    Abstract: A processing apparatus has: a light irradiation apparatus configured to irradiate a coat formed on a base member with a processing light; and a controlling apparatus configured to control the light irradiation apparatus. The processing apparatus is configured to change a thickness of at least a part of the coat by irradiating the coat with the processing light so that the base member is not exposed from the coat.
    Type: Application
    Filed: October 25, 2017
    Publication date: December 2, 2021
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Shigeki EGAMI, Yosuke TATSUZAKI, Yuichi SHIBAZAKI
  • Publication number: 20210339359
    Abstract: A processing system has: a housing that houses an object; a processing apparatus that is disposed in the housing and that processes the object; a measurement apparatus that is disposed in the housing and that measures the object processed by the processing apparatus; and a control apparatus that sets a processing condition by using a measured result of the object.
    Type: Application
    Filed: October 31, 2018
    Publication date: November 4, 2021
    Applicant: NIKON CORPORATION
    Inventors: Shigeki EGAMI, Yosuke TATSUZAKI
  • Publication number: 20210197312
    Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
    Type: Application
    Filed: October 25, 2017
    Publication date: July 1, 2021
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Baku OGASAWARA
  • Publication number: 20210178521
    Abstract: A processing apparatus is a processing apparatus that performs a process for irradiating an object with an energy beam, the processing apparatus is provided with: an energy beam irradiation apparatus that irradiates at least a part of a surface of the object with the energy beam; and a position change apparatus that changes an irradiation position of the energy beam at the surface of the object, the processing apparatus controls the irradiation position of the energy beam by using a shape information relating to a shape of the object.
    Type: Application
    Filed: December 3, 2018
    Publication date: June 17, 2021
    Applicant: NIKON CORPORATION
    Inventors: Kazuki UENO, Kei SEKIGUCHI, Masayuki SHIRAISHI, Shigeki EGAMI
  • Publication number: 20210023779
    Abstract: A processing apparatus with: an irradiation apparatus that emits an energy beam; and a supply apparatus that supplies materials to an irradiation position of the energy beam, the processing apparatus forms a build object by moving the irradiation position from a first position on a first object to a second position that is away from the first object.
    Type: Application
    Filed: January 29, 2019
    Publication date: January 28, 2021
    Applicant: NIKON CORPORATION
    Inventors: Takeshi MATSUDA, Hiroyuki NAGASAKA, Masayuki SHIRAISHI, Shigeki EGAMI, Takehiro YAMAMOTO
  • Publication number: 20200391325
    Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; a first position change apparatus that changes a position of at least one of the object and an irradiation area that is formed on the surface of the object by the light irradiation apparatus; and a control apparatus that controls the first position change apparatus to form a structure for reducing a frictional resistance of the surface of the object to a fluid by irradiating the surface of the object with the processing light while changing the position of at least one of the irradiation area and the object to change a thickness of a part of the object.
    Type: Application
    Filed: October 25, 2017
    Publication date: December 17, 2020
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Yuichi SHIBAZAKI
  • Patent number: 10845720
    Abstract: A mark detection apparatus is configured to detect a mark formed in a mark area of an object and has: a first optical system configured to emit a first measurement light to the mark area; a second optical system configured to irradiate the mark area with at least one part of a zeroth-order light and a diffracted light generated by an irradiation to the mark area from the first optical system; and a light receiver that configured to optically receive at least one part of a zeroth-order light and a diffracted light generated by an irradiation to the mark area from the second optical system.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: November 24, 2020
    Assignee: NIKON CORPORATION
    Inventors: Shigeki Egami, Yoshifumi Nakakoji
  • Publication number: 20200353560
    Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.
    Type: Application
    Filed: October 25, 2017
    Publication date: November 12, 2020
    Applicant: NIKON CORPORATION
    Inventors: Masayuki SHIRAISHI, Shigeki EGAMI, Yoshio KAWABE, Yosuke TATSUZAKI, Yuichi SHIBAZAKI
  • Publication number: 20190171121
    Abstract: A mark detection apparatus is configured to detect a mark formed in a mark area of an object and has: a first optical system configured to emit a first measurement light to the mark area; a second optical system configured to irradiate the mark area with at least one part of a zeroth-order light and a diffracted light generated by an irradiation to the mark area from the first optical system; and a light receiver that configured to optically receive at least one part of a zeroth-order light and a diffracted light generated by an irradiation to the mark area from the second optical system.
    Type: Application
    Filed: May 30, 2017
    Publication date: June 6, 2019
    Applicant: NIKON CORPORATION
    Inventors: Shigeki EGAMI, Yoshifumi NAKAKOJI