Abstract: A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object through comparison with a template is acceptable or not, comprising: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-5); preliminarily judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels (CONDITION 3-5), whether defects of parts (27a, 27b, 27c) of the defective portion (27), each part (27a, 27b, 27c) being located on a different section (28a, 28b, 28c), are acceptable or not on a part to part basis according to the acceptable levels (CONDITION 3-5) of the sections (28a, 28b, 28c) on which the parts (27a, 27b, 27c) of the defective portion (27) are respectively located; and judging whether the defect of the defective portion (27) is acc

Abstract: The invention is to provide an outer surface-inspecting method, a master pattern and an outer surface-inspecting apparatus, which can eliminate severe positional alignment of the master pattern, avoid erroneous judgment taking acceptable products as unacceptable ones and suppress increase in number of standard pattern portions to be prepared as a master pattern. In the method and the apparatus, an outer surface of inspection areas 16a to 16i having repeated patterns are inspected through comparison with the predetermined master pattern. The inspection area is divided into a plurality of matrix-like view areas 16a to 16i. Mutually different standard pattern portions 17a to 17i are used depending upon different edge shapes of the divided inspection areas 16a to 16i contained in the inspection area, respectively. The present invention is suitable for inspecting the outer surface of a semiconductor chip such as a memory or a CCD (charge-coupled device).

Abstract: A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object to be inspected through comparison with a template is acceptable or not, including: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-6); judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels, whether the defect of the defective portion (27) is acceptable or not based on a strictest acceptable level (CONDITION 3) of all the acceptable levels (CONDITION 3-5) respectively set on the plurality of sections (28a, 28b, 28c) on which the defective portion (27) is located.

Abstract: The invention is to provide an outer surface-inspecting method, a master pattern and an outer surface-inspecting apparatus, which can eliminate severe positional alignment of the master pattern, avoid erroneous judgment taking acceptable products as unacceptable ones and suppress increase in number of standard pattern portions to be prepared as a master pattern. In the method and the apparatus, an outer surface of inspection areas 16a to 16i having repeated patterns are inspected through comparison with the predetermined master pattern. The inspection area is divided into a plurality of matrix-like view areas 16a to 16i. Mutually different standard pattern portions 17a to 17i are used depending upon different edge shapes of the divided inspection areas 16a to 16i contained in the inspection area, respectively. The present invention is suitable for inspecting the outer surface of a semiconductor chip such as a memory or a CCD (charge-coupled device).

Abstract: A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object through comparison with a template is acceptable or not, comprising: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-5); preliminarily judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels (CONDITION 3-5), whether defects of parts (27a, 27b, 27c) of the defective portion (27), each part (27a, 27b, 27c) being located on a different section (28a, 28b, 28c), are acceptable or not on a part to part basis according to the acceptable levels (CONDITION 3-5) of the sections (28a, 28b, 28c) on which the parts (27a, 27b, 27c) of the defective portion (27) are respectively located; and judging whether the defect of the defective portion (27) is acc

Abstract: A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object to be inspected through comparison with a template is acceptable or not, including: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-6); judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels, whether the defect of the defective portion (27) is acceptable or not based on a strictest acceptable level (CONDITION 3) of all the acceptable levels (CONDITION 3-5) respectively set on the plurality of sections (28a, 28b, 28c) on which the defective portion (27) is located.

Abstract: Disclosed is a concrete-filled steel bearing earthquake resistant wall which shows combined resistance to shearing forces exerted in the surface plane of an earthquake resistant wall. The wall comprises connecting members 1, a pair of surface steel plates 2 and 2' which are arranged in a parallel relationship to each other and secured by the connecting members 1 so that each space between these surface steel plates 2 is filled with the wall unit concrete 7, and wall unit periphery binding steel reinforcements 8 constructed from inverted U-shaped steel bars or similar material and arranged along the peripheral part of the wall unit concrete 7 at predetermined intervals so as to be fixed to said concrete 7. In addition, the slippage preventing members 6 are arranged in a staggered arrangement on the aforementioned surface steel plates 2 and 2'.

Abstract: A concrete-filled steel bearing earthquake resistant wall which has combined resistance to shearing forces exerted in the surface plane thereof has connecting members (1), a pair of surface steel plates (2 and 2') arranged in parallel spaced relationship to each other and secured by the connecting members (1) so that the space between these surface steel plates is filled with the wall unit concrete (7), and wall unit periphery binding steel reinforcements (8) constructed from inverted U-shaped steel bars or similar material and arranged along the peripheral part of the wall unit at predetermined intervals so as to be embedded in the concrete (7). Slippage preventing members (6) are arranged in a staggered arrangement on the aforementioned surface steel plates (2 and 2').

Abstract: A position detecting apparatus projects a light beam to form a light spot within a certain range on an object under test by means of a light source, collimator lens, pinhole plate, half-mirror, and objective lens included in it. The apparatus further includes a deflecting prism which deflects the light spot relative to the object continuously so that the light spot has a circular or ellipsoidal locus of movement on the object, and a first and second light sensors which receive a reflected light beam from the object at positions short of and ahead of the convergent position of the reflected light beam. The apparatus determines that the object is located at the reference position if the outputs of the first and second light sensors thin a certain period of spot scanning are substantially equal.

Abstract: An apparatus for measuring the magnitude of a load connected to a drive shaft includes a pulse motor for intermittently driving the drive shaft into rotation in response to a motor drive signal of a changing level. A torsion bar rotatively displacable in dependence upon the magnitude of an applied load is connected between the motor drive shaft and a rotary shaft of an object constituting the load to be measured. Arranged on the side of the load is a sensor for sensing the rotational position of the rotary shaft via the torsion bar. The magnitude of the load is measured based on a difference in phase between the motor drive signal and a signal from the sensor indicative of the rotational position of the rotary shaft. The phase difference is measured by a counter when the motor is in the unloaded condition, and again when the load to be measured has been connected. The load torque is then calculated by using a prescribed equation involving the two measured phase differences.