Patents by Inventor Shih-Chang Liu

Shih-Chang Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230380306
    Abstract: A memory device includes a first metal structure, a magnetic tunnel junction (MTJ) structure, a second metal structure, a first spacer, and a second spacer. The MTJ structure is over the first metal structure. The second metal structure is over the MTJ structure. The first spacer is over a first sidewall of the second metal structure. The second spacer is over a second sidewall of the second metal structure. The second spacer has a top surface higher than a top surface of the first spacer.
    Type: Application
    Filed: July 31, 2023
    Publication date: November 23, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting SUNG, Chern-Yow HSU, Shih-Chang LIU
  • Publication number: 20230378307
    Abstract: A semiconductor device includes plurality of fin structures extending in first direction on semiconductor substrate. Fin structure's lower portion is embedded in first insulating layer. First gate electrode and second gate electrode structures extend in second direction substantially perpendicular to first direction over of fin structures and first insulating layer. The first and second gate electrode structures are spaced apart and extend along line in same direction. First and second insulating sidewall spacers are arranged on opposing sides of first and second gate electrode structures. Each of first and second insulating sidewall spacers contiguously extend along second direction. A second insulating layer is in region between first and second gate electrode structures. The second insulating layer separates first and second gate electrode structures. A third insulating layer is in region between first and second gate electrode structures.
    Type: Application
    Filed: July 28, 2023
    Publication date: November 23, 2023
    Inventors: Chih-Han Lin, Shih-Chang TSAI, Wen-Shuo HSIEH, Te-Yung LIU
  • Publication number: 20230375782
    Abstract: Depositing a side slab structure on a cladding layer before etching a supporting dielectric prevents tapering of a silicon waveguide during etching of the supporting dielectric and a substrate. For example, the side slab structure may be deposited over the silicon waveguide and the cladding layer after etching the cladding layer. As a result, when an electronic device is integrated ex situ on the substrate, wave intensity and/or total internal reflection is improved, which improves an efficiency of the electronic device.
    Type: Application
    Filed: May 23, 2022
    Publication date: November 23, 2023
    Inventors: Yuan-Sheng HUANG, Shih-Chang LIU
  • Publication number: 20230371397
    Abstract: In some embodiments, the present disclosure relates to an integrated chip (IC), including a bottom electrode overlying an interconnect structure disposed within a lower inter-level dielectric (ILD) layer, a top electrode over the bottom electrode, a data storage structure between the top electrode from the bottom electrode, a conductive barrier layer overlying the interconnect structure, and a bottom electrode via (BEVA) vertically separating and contacting a bottom surface of the bottom electrode and a top surface of the conductive barrier layer. A maximum width of the BEVA is less than a width of the data storage structure.
    Type: Application
    Filed: July 26, 2023
    Publication date: November 16, 2023
    Inventors: Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 11818912
    Abstract: A display may have organic light-emitting diode pixels formed from thin-film circuitry. The thin-film circuitry may be formed in thin-film transistor (TFT) layers and the organic light-emitting diodes may include anodes and cathodes and an organic emissive layer formed over the TFT layers between the anodes and cathodes. The organic emissive layer may be formed via chemical evaporation techniques. The display may include moisture blocking structures such as organic emissive layer disconnecting structures that introduce one or more gaps in the organic emissive layer during evaporation so that any potential moisture permeating path from the display panel edge to the active area of the display is completely terminated.
    Type: Grant
    Filed: October 31, 2019
    Date of Patent: November 14, 2023
    Assignee: Apple Inc.
    Inventors: Tsung-Ting Tsai, Abbas Jamshidi Roudbari, Chuan-Sheng Wei, HanChi Ting, Jae Won Choi, Jianhong Lin, Nai-Chih Kao, Shih Chang Chang, Shin-Hung Yeh, Takahide Ishii, Ting-Kuo Chang, Yu Hung Chen, Yu-Wen Liu, Yu-Chuan Pai, Andrew Lin
  • Publication number: 20230361149
    Abstract: In some embodiments, the present disclosure relates to a method for forming an image sensor and associated device structure. A backside deep trench isolation (BDTI) structure is formed in a substrate separating a plurality of pixel regions. The BDTI structure encloses a plurality of photodiodes and comprising a first BDTI component arranged at a crossroad of the plurality of pixel regions and a second BDTI component arranged at remaining peripheries of the plurality of pixel regions. The first BDTI component has a first depth from a backside of the substrate smaller than a second depth of the second BDTI component.
    Type: Application
    Filed: August 8, 2022
    Publication date: November 9, 2023
    Inventors: Hsin-Hung Chen, Dun-Nian Yaung, Jen-Cheng Liu, Feng-Chi Hung, Wen-Chang Kuo, Hung-Wen Hsu, Shih-Chang Liu
  • Patent number: 11801195
    Abstract: A negative pressure massage apparatus includes a vacuum pump, two solenoid valves and a control board. The vacuum pump is used to generate a negative pressure outside the negative pressure massage apparatus. Two solenoid valves are used to control a gas flow input into the negative pressure massage apparatus. The control board is used to activate or stop at least one of the vacuum pumps, and the two solenoid valves. The present disclosure further includes a method of using the negative pressure massage apparatus.
    Type: Grant
    Filed: November 24, 2021
    Date of Patent: October 31, 2023
    Assignee: BIBOTING INTERNATIONAL CO., LTD.
    Inventors: Shih-Ta Liu, Po-Chang Liu, Pei-En Lee
  • Patent number: 11805660
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a memory region, the memory region includes a first metal line, a magnetic tunneling junction (MTJ) over the first metal line, a cap, wherein at least a portion of the cap is above the MTJ, a first stop layer above the cap, and a first metal via being disposed over the MTJ and in direct contact with the first stop layer, and a logic region adjacent to the memory region, the logic region includes a second metal line, a third metal line over the second metal line, a second stop layer being disposed over the third metal line, and a second metal via over the third metal line.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: October 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chern-Yow Hsu, Yuan-Tai Tseng, Shih-Chang Liu
  • Patent number: 11804534
    Abstract: A semiconductor device includes plurality of fin structures extending in first direction on semiconductor substrate. Fin structure's lower portion is embedded in first insulating layer. First gate electrode and second gate electrode structures extend in second direction substantially perpendicular to first direction over of fin structures and first insulating layer. The first and second gate electrode structures are spaced apart and extend along line in same direction. First and second insulating sidewall spacers are arranged on opposing sides of first and second gate electrode structures. Each of first and second insulating sidewall spacers contiguously extend along second direction. A second insulating layer is in region between first and second gate electrode structures. The second insulating layer separates first and second gate electrode structures. A third insulating layer is in region between first and second gate electrode structures.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: October 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Han Lin, Shih-Chang Tsai, Wen-Shuo Hsieh, Te-Yung Liu
  • Patent number: 11800822
    Abstract: A memory device includes a bottom electrode, a magnetic tunnel junction (MTJ) structure, an inner spacer, and an outer spacer. The MTJ structure is over the bottom electrode. The bottom electrode has a top surface extending past opposite sidewalls of the MTJ structure. The inner spacer contacts the top surface of the bottom electrode and one of the opposite sidewalls of the MTJ structure. The outer spacer contacts an outer sidewall of the inner spacer. The outer spacer protrudes from a top surface of the inner spacer by a step height.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: October 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting Sung, Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 11785861
    Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer, a bottom electrode over the Nth metal layer, a magnetic tunneling junction (MTJ) over the bottom electrode, a top electrode over the MTJ, and an (N+M)th metal layer over the Nth metal layer. N and M are positive integers. The (N+M)th metal layer surrounds a portion of a sidewall of the top electrode. A manufacturing method of forming the semiconductor structure is also provided.
    Type: Grant
    Filed: July 15, 2021
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Fu-Ting Sung, Chung-Chiang Min, Yuan-Tai Tseng, Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 11764057
    Abstract: A method of forming a structure having a coating layer includes the following steps: providing a substrate; coating a fluid on the surface of the substrate, where the fluid includes a carrier and a plurality of silicon-containing nanoparticles; and performing a heating process to remove the carrier and convert the silicon-containing nanoparticles into a silicon-containing layer, a silicide layer, or a stack layer including the silicide layer and the silicon-containing layer.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: September 19, 2023
    Assignee: CHE Inc.
    Inventors: Chuan-Pu Liu, Yin-Wei Cheng, Shih-An Wang, Bo-Liang Peng, Chun-Hung Chen, Jun-Han Huang, Yi-Chang Li
  • Publication number: 20230276713
    Abstract: Some embodiments relate to an integrated circuit including a semiconductor substrate and an interconnect structure disposed over the semiconductor substrate. The interconnect structure includes a plurality of dielectric layers and a plurality of metal layers that are stacked over one another in alternating fashion. The plurality of metal layers include a lower metal layer and an upper metal layer disposed over the lower metal layer. A bottom electrode is disposed over and in electrical contact with the lower metal layer. A dielectric layer is disposed over an upper surface of the bottom electrode. A top electrode is disposed over an upper surface of the dielectric layer and is in direct electrical contact with a lower surface of the upper metal layer.
    Type: Application
    Filed: May 8, 2023
    Publication date: August 31, 2023
    Inventors: Harry-Hak-Lay Chuang, Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 11683990
    Abstract: Some embodiments relate to an integrated circuit including a semiconductor substrate and an interconnect structure disposed over the semiconductor substrate. The interconnect structure includes a plurality of dielectric layers and a plurality of metal layers that are stacked over one another in alternating fashion. The plurality of metal layers include a lower metal layer and an upper metal layer disposed over the lower metal layer. A bottom electrode is disposed over and in electrical contact with the lower metal layer. A dielectric layer is disposed over an upper surface of the bottom electrode. A top electrode is disposed over an upper surface of the dielectric layer and is in direct electrical contact with a lower surface of the upper metal layer.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: June 20, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Harry-Hak-Lay Chuang, Chern-Yow Hsu, Shih-Chang Liu
  • Patent number: 11665911
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a lower interconnect disposed within a dielectric structure over a substrate. A memory device includes a data storage structure disposed between a bottom electrode and a top electrode. The bottom electrode is electrically coupled to the lower interconnect. A sidewall spacer includes an interior sidewall that continuously extends from along an outermost sidewall of the top electrode to below an outermost sidewall of the bottom electrode. The sidewall spacer further includes an outermost sidewall that extends from a bottom surface of the sidewall spacer to above a top of the bottom electrode.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: May 30, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yuan-Tai Tseng, Chung-Chiang Min, Shih-Chang Liu
  • Publication number: 20230157923
    Abstract: A negative pressure massage apparatus includes a vacuum pump, two solenoid valves and a control board. The vacuum pump is used to generate a negative pressure outside the negative pressure massage apparatus. Two solenoid valves are used to control a gas flow input into the negative pressure massage apparatus. The control board is used to activate or stop at least one of the vacuum pumps, and the two solenoid valves. The present disclosure further includes a method of using the negative pressure massage apparatus.
    Type: Application
    Filed: November 24, 2021
    Publication date: May 25, 2023
    Inventors: Shih-Ta LIU, Po-Chang LIU, Pei-En LEE
  • Patent number: 11640971
    Abstract: A deep trench is formed in a substrate, and a layer stack including at least three metallic electrode plates interlaced with at least two node dielectric layers is formed in, and over, the deep trench. A contact-level dielectric material layer over the layer stack, and contact via cavities are formed therethrough. The depths of the contact via cavities are differentiated by selectively increasing the depth of a respective subset of the contact via cavities by performing at least twice a combination of processing steps that includes an etch mask formation process and an etch process. A combination of a dielectric contact via liner and a plate contact via structure can be formed within each of the contact via cavities. Plate contact via structures that extend through any metallic electrode plate can be electrically isolated from such a metallic electrode plate by a respective dielectric contact via liner.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: May 2, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Ming Chyi Liu, Yu-Hsing Chang, Shih-Chang Liu
  • Publication number: 20230088093
    Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer over a transistor region, where N is a natural number, and a bottom electrode over the Nth metal layer. The bottom electrode comprises a bottom portion having a first width, disposed in a bottom electrode via (BEVA), the first width being measured at a top surface of the BEVA, and an upper portion having a second width, disposed over the bottom portion. The semiconductor structure also includes a magnetic tunneling junction (MTJ) layer having a third width, disposed over the upper portion, a top electrode over the MTJ layer and an (N+1)th metal layer over the top electrode. The first width is greater than the third width.
    Type: Application
    Filed: November 28, 2022
    Publication date: March 23, 2023
    Inventors: Harry-Hak-Lay CHUANG, Kuei-Hung SHEN, Chern-Yow HS, Shih-Chang LIU
  • Patent number: 11581484
    Abstract: A semiconductor structure includes an Nth metal layer, a diffusion barrier layer over the Nth metal layer, a first deposition of bottom electrode material over the diffusion barrier layer, a second deposition of bottom electrode material over the first deposition of bottom electrode material, a magnetic tunneling junction (MTJ) layer over the second deposition of bottom electrode material, a top electrode over the MTJ layer; and an (N+1)th metal layer over the top electrode; wherein the diffusion barrier layer and the first deposition of bottom electrode material are laterally in contact with a dielectric layer, the first deposition of bottom electrode material spacing the diffusion barrier layer and the second deposition of bottom electrode material apart, and N is an integer greater than or equal to 1. An associated electrode structure and method are also disclosed.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chung-Yen Chou, Fu-Ting Sung, Yao-Wen Chang, Shih-Chang Liu
  • Patent number: D987843
    Type: Grant
    Filed: August 17, 2021
    Date of Patent: May 30, 2023
    Assignee: BIBOTING INTERNATIONAL CO., LTD.
    Inventors: Shih-Ta Liu, Po-Chang Liu, Pei-En Lee