Patents by Inventor Shin-Cheng Lin

Shin-Cheng Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210226048
    Abstract: A semiconductor device is provided. The semiconductor device includes a substrate, a first III-V compound layer disposed on the substrate, a second III-V compound layer disposed on the first III-V compound layer, a p-type doped III-V compound layer disposed on the second III-V compound layer, a gate disposed over the p-type doped III-V compound layer, a source and a drain disposed on opposite sides of the gate, and a dielectric layer disposed between the p-type doped III-V compound layer and the gate. A method for forming the above semiconductor device is also provided.
    Type: Application
    Filed: March 16, 2021
    Publication date: July 22, 2021
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Hsin-Chih LIN, Shin-Cheng LIN, Yung-Hao LIN
  • Patent number: 11049799
    Abstract: A semiconductor structure and a method for forming the same are provided. A semiconductor structure includes a substrate, a seed layer on the substrate, an epitaxial layer on the seed layer, a first transistor on the epitaxial layer, an interlayer dielectric layer on the epitaxial layer, a dielectric pillar penetrating through the interlayer dielectric layer and the epitaxial layer, and a conductive liner disposed on a sidewall of the dielectric pillar. The conductive liner is electrically connected to the first transistor and the seed layer.
    Type: Grant
    Filed: March 19, 2020
    Date of Patent: June 29, 2021
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Yung-Fong Lin, Shin-Cheng Lin, Cheng-Wei Chou, Yu-Chieh Chou
  • Patent number: 10998434
    Abstract: A semiconductor device is provided. The semiconductor device includes a substrate, a first III-V compound layer disposed on the substrate, a second III-V compound layer disposed on the first III-V compound layer, a p-type doped III-V compound layer disposed on the second III-V compound layer, a gate disposed over the p-type doped III-V compound layer, a source and a drain disposed on opposite sides of the gate, and a dielectric layer disposed between the p-type doped III-V compound layer and the gate. A method for forming the above semiconductor device is also provided.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: May 4, 2021
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Hsin-Chih Lin, Shin-Cheng Lin, Yung-Hao Lin
  • Patent number: 10930745
    Abstract: A semiconductor structure includes a substrate, a gate structure disposed on the substrate, a source structure and a drain structure disposed on opposite sides of the gate structure, and a first dielectric layer. The gate structure includes a gate electrode disposed on the substrate and a gate metal layer electrically connected to the gate electrode and serving as a gate field plate. The source structure includes a source electrode disposed on the substrate and a first source metal layer electrically connected to the source electrode and extending in the direction from the gate electrode to the drain structure. The first dielectric layer is disposed on the gate metal layer. The electric potential of the first source metal layer is different from that of the gate metal layer. The first source metal layer exposes at least a portion of the first dielectric layer directly above the gate metal layer.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: February 23, 2021
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Shin-Cheng Lin, Chih-Yen Chen, Chia-Ching Huang
  • Patent number: 10886394
    Abstract: A semiconductor structure includes a substrate having an active region and an isolation region, an insulating layer disposed on the substrate, a seed layer disposed on the insulating layer, a compound semiconductor layer disposed on the seed layer, a gate structure in the active region disposed on the compound semiconductor layer, an isolation structure in the isolation region disposed on the substrate, a pair of through-substrate vias in the isolation region disposed on the opposite sides of the gate structure, and a source structure and a drain structure disposed on the substrate and on the opposite sides of the gate structure. The pair of through-substrate vias pass through the isolation structure and contact the seed layer. The source structure and the drain structure electrically connect the seed layer by the pair of through-substrate vias.
    Type: Grant
    Filed: June 19, 2019
    Date of Patent: January 5, 2021
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Shin-Cheng Lin, Wen-Hsin Lin, Marojahan Tampubolon
  • Publication number: 20200403090
    Abstract: A semiconductor structure includes a substrate having an active region and an isolation region, an insulating layer disposed on the substrate, a seed layer disposed on the insulating layer, a compound semiconductor layer disposed on the seed layer, a gate structure in the active region disposed on the compound semiconductor layer, an isolation structure in the isolation region disposed on the substrate, a pair of through-substrate vias in the isolation region disposed on the opposite sides of the gate structure, and a source structure and a drain structure disposed on the substrate and on the opposite sides of the gate structure. The pair of through-substrate vias pass through the isolation structure and contact the seed layer. The source structure and the drain structure electrically connect the seed layer by the pair of through-substrate vias.
    Type: Application
    Filed: June 19, 2019
    Publication date: December 24, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Shin-Cheng LIN, Wen-Hsin LIN, Marojahan TAMPUBOLON
  • Patent number: 10867993
    Abstract: A semiconductor structure includes a substrate, a first III-V compound layer, a second III-V compound layer, a third III-V compound layer, and a fourth III-V compound layer. The top of the substrate includes a first region and a second region. The first III-V compound layer is in the first region. The second III-V compound layer is disposed over the first III-V compound layer. A first carrier channel is formed between the first III-V compound layer and the second III-V compound layer. The second III-V compound layer has a first thickness. The third III-V compound layer is in the second region. The fourth III-V compound layer is disposed over the third III-V compound layer. A second carrier channel is formed between the fourth III-V compound layer and the third III-V compound layer. The fourth III-V compound layer has a second thickness less than the first thickness.
    Type: Grant
    Filed: March 20, 2020
    Date of Patent: December 15, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Fu-Hsin Chen, Shin-Cheng Lin, Yung-Hao Lin, Hsin-Chih Lin
  • Patent number: 10790365
    Abstract: An LDMOS includes a body region disposed in the substrate and having a first conductivity type; a drift region disposed in the substrate and having a second conductivity type; a source region disposed in the body region and having the second conductivity type; a drain region disposed in the drift region and having the second conductivity type; an isolation region disposed in the drift region between the source region and the drain region; a gate disposed on the body region and the drift region; a source field plate electrically connected to the source region; a drain field plate electrically connected to the drain region; and a first gate plate electrically connected to the gate. The first gate plate is correspondingly disposed above the gate. The shapes of the first gate plate and the gate are substantially the same when viewed from a top view.
    Type: Grant
    Filed: February 23, 2018
    Date of Patent: September 29, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Wen-Hsin Lin, Yu-Hao Ho, Shin-Cheng Lin, Cheng-Tsung Wu
  • Publication number: 20200227342
    Abstract: A semiconductor structure including a substrate, a first well, a field oxide layer, a first conductive line and a second conductive line is provided. The substrate has a first conductivity type. The first well is formed on the substrate and has a second conductivity type. The field oxide layer is disposed on the first well. The first conductive line is formed on the field oxide layer and is in direct contact with the field oxide layer. The second conductive line is formed on the field oxide layer and is in direct contact with the field oxide layer. The first conductive line is spaced apart from the second conductive line.
    Type: Application
    Filed: January 15, 2019
    Publication date: July 16, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Cheng-Tsung WU, Shin-Cheng LIN, Hsiao-Ling CHIANG, Wen-Hsin LIN
  • Patent number: 10714410
    Abstract: A semiconductor structure including a substrate, a first well, a field oxide layer, a first conductive line and a second conductive line is provided. The substrate has a first conductivity type. The first well is formed on the substrate and has a second conductivity type. The field oxide layer is disposed on the first well. The first conductive line is formed on the field oxide layer and is in direct contact with the field oxide layer. The second conductive line is formed on the field oxide layer and is in direct contact with the field oxide layer. The first conductive line is spaced apart from the second conductive line.
    Type: Grant
    Filed: January 15, 2019
    Date of Patent: July 14, 2020
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Cheng-Tsung Wu, Shin-Cheng Lin, Hsiao-Ling Chiang, Wen-Hsin Lin
  • Publication number: 20200219870
    Abstract: A semiconductor structure includes a substrate, a first III-V compound layer, a second III-V compound layer, a third III-V compound layer, and a fourth III-V compound layer. The top of the substrate includes a first region and a second region. The first III-V compound layer is in the first region. The second III-V compound layer is disposed over the first III-V compound layer. A first carrier channel is formed between the first III-V compound layer and the second III-V compound layer. The second III-V compound layer has a first thickness. The third III-V compound layer is in the second region. The fourth III-V compound layer is disposed over the third III-V compound layer. A second carrier channel is formed between the fourth III-V compound layer and the third III-V compound layer. The fourth III-V compound layer has a second thickness less than the first thickness.
    Type: Application
    Filed: March 20, 2020
    Publication date: July 9, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Fu-Hsin CHEN, Shin-Cheng LIN, Yung-Hao LIN, Hsin-Chih LIN
  • Patent number: 10707322
    Abstract: A semiconductor device includes a channel layer disposed over a substrate, a barrier layer disposed over the channel layer, a gate electrode disposed over the barrier layer, and a pair of source/drain electrodes disposed on opposite sides of the gate electrode. The pair of source/drain electrodes extend through at least portions of the barrier layer. The semiconductor device also includes a lining layer conformally disposed on bottom portions of the pair of source/drain electrodes.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: July 7, 2020
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Chih-Yen Chen, Shin-Cheng Lin, Hsin-Chih Lin
  • Patent number: 10692857
    Abstract: A semiconductor structure includes a substrate, a first III-V compound layer, a second III-V compound layer, a third III-V compound layer, and a fourth III-V compound layer. The top of the substrate includes a first region and a second region. The first III-V compound layer is in the first region. The second III-V compound layer is disposed over the first III-V compound layer. A first carrier channel is formed between the first III-V compound layer and the second III-V compound layer. The second III-V compound layer has a first thickness. The third III-V compound layer is in the second region. The fourth III-V compound layer is disposed over the third III-V compound layer. A second carrier channel is formed between the fourth III-V compound layer and the third III-V compound layer. The fourth III-V compound layer has a second thickness less than the first thickness.
    Type: Grant
    Filed: May 8, 2018
    Date of Patent: June 23, 2020
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Fu-Hsin Chen, Shin-Cheng Lin, Yung-Hao Lin, Hsin-Chih Lin
  • Patent number: 10692786
    Abstract: A semiconductor structure includes a substrate, a first insulating layer, a second insulating layer, a first seal ring structure, a second seal ring structure, and a passivation layer. The substrate has a chip region and a seal ring region. The first insulating layer is on the substrate. The second insulating layer is on the first insulating layer. The first seal ring structure is in the seal ring region and embedded in the first insulating layer and the second insulating layer, wherein the first seal ring structure includes a stack of metal layers. The second seal ring structure is in the seal ring region and embedded in the first insulating layer, wherein the second seal ring structure includes a polysilicon ring structure. The passivation layer is on the second insulating layer and the first seal ring structure.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: June 23, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Ting-You Lin, Chi-Li Tu, Shin-Cheng Lin, Yu-Hao Ho, Cheng-Tsung Wu
  • Patent number: 10644132
    Abstract: A semiconductor device is provided. The device may include a semiconductor layer; and a doped well disposed in the semiconductor layer and having a first conductivity type. The device may also include a drain region, a source region, and a body region, where the source and body regions may operate in different voltages. Further, the device may include a first doped region having a second conductivity type, the first doped region disposed between the source region and the doped well; and a second doped region having the first conductivity type and disposed under the source region. The device may include a third doped region having the second conductivity type and disposed in the doped well; and a fourth doped region disposed above the third doped region, the fourth doped region having the first conductivity type. Additionally, the device may include a gate and a field plate.
    Type: Grant
    Filed: February 10, 2017
    Date of Patent: May 5, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Tsung-Hsiung Lee, Shin-Cheng Lin
  • Publication number: 20200127116
    Abstract: A semiconductor device includes a channel layer disposed over a substrate, a barrier layer disposed over the channel layer, a gate electrode disposed over the barrier layer, and a pair of source/drain electrodes disposed on opposite sides of the gate electrode. The pair of source/drain electrodes extend through at least portions of the barrier layer. The semiconductor device also includes a lining layer conformally disposed on bottom portions of the pair of source/drain electrodes.
    Type: Application
    Filed: October 22, 2018
    Publication date: April 23, 2020
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Chih-Yen CHEN, Shin-Cheng LIN, Hsin-Chih LIN
  • Patent number: 10629475
    Abstract: A method for forming a semiconductor device is provided. A substrate is provided. An epitaxial layer is formed on the substrate. An insulation region and an active region are defined on the upper surface of the epitaxial layer. An insulation structure is formed within the insulation region by an ion implantation process and an etching process, wherein the insulation structure includes a first insulation structure and a second insulation structure. A gate is formed on the epitaxial layer and is disposed within the active region. A source and a drain are formed on opposite sides of the gate and within the active region. A semiconductor device is also provided.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: April 21, 2020
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Hsin-Chih Lin, Shin-Cheng Lin, Yung-Hao Lin
  • Patent number: 10573738
    Abstract: A semiconductor device is provided. The device includes a substrate having a first conductivity type. The device further includes a drain region, a source region, and a well region disposed in the substrate. The well region is disposed between the drain region and the source region and having a second conductivity type opposite to the first conductivity type. The device further includes a plurality of doped regions disposed within the well region. The doped regions are vertically and horizontally offset from each other. Each of the doped regions includes a lower portion having the first conductivity type, and an upper portion stacked on the lower region and having the second conductivity type.
    Type: Grant
    Filed: December 27, 2018
    Date of Patent: February 25, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Shang-Hui Tu, Chih-Jen Huang, Jui-Chun Chang, Shin-Cheng Lin, Yu-Hao Ho, Wen-Hsin Lin
  • Patent number: 10483362
    Abstract: A HEMT device is provided. The HEMT device includes a substrate, a buffer layer, a first epitaxial layer, a second epitaxial layer, an insulating layer, a gate, a source, a drain, a trench, and a metal layer. The buffer layer is formed on the substrate. The first epitaxial layer is formed on the buffer layer. The second epitaxial layer is formed on the first epitaxial layer. The insulating layer is formed on the second epitaxial layer. The gate is disposed in the insulating layer. The source and the drain are disposed in the insulating layer. The trench passes through the insulating layer and the second epitaxial layer, and extends into the first epitaxial layer. The metal layer is formed on the insulating layer to connect to the source, and is filled into the trench to electrically connect to the first epitaxial layer and the source.
    Type: Grant
    Filed: April 25, 2019
    Date of Patent: November 19, 2019
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Hsin-Chih Lin, Shin-Cheng Lin, Yung-Hao Lin
  • Publication number: 20190348411
    Abstract: A semiconductor structure includes a substrate, a first III-V compound layer, a second III-V compound layer, a third III-V compound layer, and a fourth III-V compound layer. The top of the substrate includes a first region and a second region. The first III-V compound layer is in the first region. The second III-V compound layer is disposed over the first III-V compound layer. A first carrier channel is formed between the first III-V compound layer and the second III-V compound layer. The second III-V compound layer has a first thickness. The third III-V compound layer is in the second region. The fourth III-V compound layer is disposed over the third III-V compound layer. A second carrier channel is formed between the fourth III-V compound layer and the third III-V compound layer. The fourth III-V compound layer has a second thickness less than the first thickness.
    Type: Application
    Filed: May 8, 2018
    Publication date: November 14, 2019
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Fu-Hsin CHEN, Shin-Cheng LIN, Yung-Hao LIN, Hsin-Chih LIN