Abstract: A tracking-type laser interferometer in which a pattern emission control unit controls a changing mechanism such that light is emitted along a predetermined pattern when judged by a first judgment unit that at least one of received-light amounts at first and second light reception units is not greater than a first threshold value. A tracking control unit causes the changing mechanism to keep track of a retro reflector when judged by a second judgment unit that both of the received-light amounts at the first and second light reception units are greater than second threshold values during a time period in which the pattern emission control unit controls the changing mechanism for the emission of light along the pattern. The interferometer emits light along the pattern to search for the retro reflector upon losing sight thereof. Upon detection, the interferometer can keep track of the reflector again and resume measurement.

Abstract: The present invention provides a fragrance device for a vehicle capable of supplying plural fragrant ingredients to the inside of the vehicle as being contained in air flow of a vehicle-use air-conditioning device with a simple structure. The fragrance device for a vehicle according to the present invention includes a main body 10 having a fragrance retention container 5, an inlet passage 6, an outlet passage 7, an inlet passage opening/closing door 8 and an outlet passage opening/closing door 9, an actuator 11 fixed to the main body 10, and a cam 14 which rotationally drives a rotary shaft 12 of the inlet passage opening/closing door and a rotary shaft 12 of the outlet passage opening/closing door.

Abstract: Air conditioner pertaining to the present invention in which a synthetic polymer case, in which an antibacterial agent impregnated in a medium such as a porous body or water-absorbing polymer is sealed, is arranged in the upstream airflow side and/or downstream airflow side of an evaporator, which air conditioner is characterized in that the thickness of the wall of the case is formed to allow gas permeation of the antibacterial agent, and in that the thickness of the wall on the downstream airflow side is less than the thickness of the wall on the upstream airflow side.

Abstract: In the tracking type laser interferometer including: a laser interferometer; an optical axis deviation detection sensor for detecting a deviation of an optical axis of the laser interferometer; a two-axis turning mechanism for turning the laser interferometer to any optional direction; an angle sensor for detecting a turning angle of the two-axis turning mechanism; a retroreflector for reflecting its reflected light to a direction parallel to the incident light; and a controller for driving the two-axis turning mechanism so as to track the retroreflector based on signals of the optical axis deviation detection sensor and the angle sensor, stop of the retroreflector is detected, and a target distance is calculated from the turning center of the laser interferometer to the center of the retroreflector based on the total sum of deviation of an optical axis during movement, which is obtained by the optical axis deviation detection sensor, and a turning angle during movement, which is obtained by the angle sensor.

Abstract: The object of the present invention is to provide a package of a volatile substance, which comprises a bag having a volatile substance with an antibacterial action enclosed therein, and a case having the bag enclosed therein, wherein the case is allowed to have a size and shape complying with the amount of a volatile substance having permeated the bag so that the shape of the case can be adapted to the volumes and shapes of various air conditioners, while the volatile substance can be volatilized at a predetermined rate.

Abstract: A tracking-type laser interferometer in which a pattern emission control unit controls a changing mechanism such that light is emitted along a predetermined pattern when judged by a first judgment unit that at least one of received-light amounts at first and second light reception units is not greater than a first threshold value. A tracking control unit causes the changing mechanism to keep track of a retro reflector when judged by a second judgment unit that both of the received-light amounts at the first and second light reception units are greater than second threshold values during a time period in which the pattern emission control unit controls the changing mechanism for the emission of light along the pattern. The interferometer emits light along the pattern to search for the retro reflector upon losing sight thereof. Upon detection, the interferometer can keep track of the reflector again and resume measurement.

Abstract: An exposure apparatus for executing an exposure of a substrate to light via a mask. The apparatus includes a booth which stores the mask in an atmospheric pressure, a processing chamber in which the exposure is executed in a first vacuum pressure, a vacuum chamber, arranged between the booth and the processing chamber, stores the mask at a second vacuum pressure that is higher than the first vacuum pressure and is between 0.1 Pa and 100 Pa, a first load lock chamber, arranged between the booth and the vacuum chamber, through which the mask is transferred, in which the atmospheric pressure and the second vacuum pressure are replaceable, and a second load lock chamber arranged between the vacuum chamber and the processing chamber, through which the mask is transferred, in which the second vacuum pressure and the first vacuum pressure are replaceable.

Abstract: The purpose of the present invention is to satisfy the following: (1) it prevents the adsorption of antibacterial agent to the filter during storage, (2) for this reason, makes the container and the filter separable and furthermore makes it easy to fix the container, and (3) makes it possible to change the filter and the antibacterial agent respectively separately with simple operations. The fixing mechanism of the container in which an antibacterial agent has been sealed according to the present invention is a fixing mechanism for a container in which an antibacterial agent is sealed in a vehicle air conditioning device. And, fixing means 53 are provided for removably fixing the container 31 to the lid 51 which opens and closes the inlet/outlet port 50 of the filter unit 30.

Abstract: In the tracking type laser interferometer including: a laser interferometer; an optical axis deviation detection sensor for detecting a deviation of an optical axis of the laser interferometer; a two-axis turning mechanism for turning the laser interferometer to any optional direction; an angle sensor for detecting a turning angle of the two-axis turning mechanism; a retroreflector for reflecting its reflected light to a direction parallel to the incident light; and a controller for driving the two-axis turning mechanism so as to track the retroreflector based on signals of the optical axis deviation detection sensor and the angle sensor, stop of the retroreflector is detected, and a target distance is calculated from the turning center of the laser interferometer to the center of the retroreflector based on the total sum of deviation of an optical axis during movement, which is obtained by the optical axis deviation detection sensor, and a turning angle during movement, which is obtained by the angle sensor.

Abstract: A processing apparatus includes a sealed vacuum chamber which contains a processing portion; a pressure controlling system which keeps the internal pressure of the sealed vacuum chamber constant at a predetermined level by exhausting the ambient gas in the sealed vacuum chamber; and an ambient gas recirculating system which recirculates the ambient gas exhausted from the sealed vacuum chamber back into the sealed vacuum chamber; wherein the ambient as recirculated by the ambient gas recirculating system is blown into the sealed vacuum chamber so that a gas flow is generated in a predetermined direction along the processing portion.

Abstract: A method for estimating an absolute distance between a tracking laser interferometer and a retroreflector is provided. The tracking laser interferometer includes the retroreflector for reflecting and returning an incident measurement light in an incident direction and a two-axis rotating mechanism for rotationally moving in an exit direction of the measurement light so that optical axes of the measurement light and return light are collimated.

Abstract: The object of the present invention is to provide a package of a volatile substances which comprises a bag having a volatile substance with an antibacterial action enclosed therein, and a case having the bag enclosed therein, wherein the case is allowed to have a size and shape complying with the amount of a volatile substance having permeated the bag so that the shape of the case can be adapted to the volumes and shapes of various air conditioners, while the volatile substance can be volatilized at a predetermined rate.

Abstract: A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector. The laser tracking interferometer includes: a reference sphere; a carriage that rotates about a center of the reference sphere; a laser interferometer; a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage; a data processing apparatus for computing a displacement of the retroreflector; a position sensitive detector for providing a position signal corresponding to deviation of a laser beam; and a controller for controlling rotation of the carriage based on the position signal so that the amount of deviation becomes zero.

Abstract: An exposure apparatus includes an optical system for guiding light to an object, a holding member for holding the object, a first refrigerator located near a holding side of the holding member without contacting the holding side, and a second refrigerator located near a backside of the holding member without contacting the backside.

Abstract: [Problem] The purpose of the present invention is to satisfy the following: (1) it prevents the adsorption of antibacterial agent to the filter during storage, (2) for this reason, makes the container and the filter separable and furthermore makes it easy to fix the container, and (3) makes it possible to change the filter and the antibacterial agent respectively separately with simple operations. [Resolving Means] The fixing mechanism of the container in which an antibacterial agent has been sealed according to the present invention is a fixing mechanism for a container in which an antibacterial agent is sealed in a vehicle air conditioning device. And, fixing means 53 are provided for removably fixing the container 31 to the lid 51 which opens and closes the inlet/outlet port 50 of the filter unit 30.

Abstract: At least one exemplary embodiment is directed to an apparatus which includes an original stage, to hold an original, which moves in a scan direction, an illumination optical system configured to illuminate the original held by the original stage with exposure light, a substrate stage configured to hold a substrate and to move in a scan direction, a projection optical system configured to project a pattern of the original onto the substrate with the exposure light, and an irradiation unit configured to irradiate the original held by the original stage. Irradiation by the irradiation unit and movement of the original stage in the scan direction are carried out substantially in parallel with each other so as to remove a contaminant on the original.

Abstract: To provide a method for estimating an absolute distance L between a tracking laser interferometer and a retroreflector 70, the tracking laser interferometer including; the retroreflector 70 for reflecting and returning incident measurement light A in an incident direction; and a two-axis rotating mechanism 40 for rotationally moving in an exit direction of the measurement light A so that optical axes of the measurement light A and return light B are collimated, which outputs a measurement value according to an increase or decrease in the distance between the interferometer and the retroreflector 70, wherein the absolute distance L between the interferometer and the retroreflector 70 is estimated by performing arithmetic operation based on an angular position variation ?2 of the two-axis rotating mechanism 40 when a deviation amount d of the return light B from the retroreflector 70 relative to a predetermined position is given as a predetermined value d2.

Abstract: A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.

Abstract: Disclosed is cooling technology in one aspect of which is a cooling system for cooling an optical member including a material having a linear expansion coefficient that becomes equal to zero at a predetermined temperature, the cooling system including a temperature detecting unit for detecting a temperature of a detection-subject portion of the optical member, a cooling unit for cooling a cooling-subject portion of the optical member, and a control unit for controlling the cooling unit on the basis of the detection by the temperature detecting unit.

Abstract: A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.