Abstract: Provided are an image evaluation method and an image evaluation apparatus to evaluate a two-dimensional shape and a change in shape of a pattern side wall of a semiconductor pattern based on a SEM image, thus estimating an exposure condition. To this end, a method and a device include a storage unit that stores a model indicating a relationship between a feature amount that is obtained by creating a plurality of outlines from a SEM image and an exposure condition, and outline creation parameter information corresponding to the model; an outline creation unit that creates a plurality of outlines from a SEM image using the outline creation parameter information; and an estimation unit that uses a feature amount that is found based on the plurality of outlines created by the outline creation unit and the model to find an exposure condition.

Abstract: Provided is a pattern inspecting and measuring device that decreases the influence of noise and the like and increases the reliability of an inspection or measurement result during inspection or measurement using the position of an edge extracted from image data obtained by imaging a pattern as the object of inspection or measurement. For this purpose, in the pattern inspecting and measuring device in which inspection or measurement of an inspection or measurement object pattern is performed using the position of the edge extracted, with the use of an edge extraction parameter, from the image data obtained by imaging the inspection or measurement object pattern, the edge extraction parameter is generated using a reference pattern having a shape as an inspection or measurement reference and the image data.

Abstract: A pattern inspection apparatus for detecting an abnormality includes a storage, a compensator and an abnormality judger. The storage stores data based on a reference pattern associated with an object pattern as an object to detect an abnormality and including a first pattern edge portion and a second pattern edge portion. The compensator partially compensates a location of the first pattern edge portion to be shrunk or expanded based on the reference pattern such that the first pattern edge portion is to be placed at a location of a third pattern edge portion while the second pattern edge portion maintains the same size. The abnormality judger sets a tolerance based on the location compensated based on the reference pattern, and judges the object pattern as abnormal when an outline of the object pattern is fallen outside of the tolerance.

Abstract: It is an object of the present invention is to provide an image processing technique that can detect the rotation of an observation image of a specimen with high accuracy. An image processing apparatus according to the present invention indirectly corrects a rotation gap between measurement image data and reference image data through wide-angle image data including a measurement part of a specimen (FIG. 1).

Abstract: The present invention provides a technique to generate an accurate connected image even in a monotonous pattern using design data as constrained conditions. A reference position is roughly determined through matching between the design data and image data, matching between neighboring images is performed using the amount of mismatch from the design data as a searching range and a connected image is generated at high speed and accurately.

Abstract: Disclosed is a method for creating a template for the purpose of performing pattern matching on the basis of a template image having high contrast. Also disclosed is an image processing apparatus. In the method for creating the template, design data is partially extracted, and on the basis of the extracted partial region, the template for template matching is created. In the image processing apparatus, such method is performed. In the method and the apparatus, a density of edges that belong to a predetermined region in the design data equivalent to the region to be searched for in the template matching is obtained.

Abstract: It is an object of the present invention is to provide an image processing technique that can detect the rotation of an observation image of a specimen with high accuracy. An image processing apparatus according to the present invention indirectly corrects a rotation gap between measurement image data and reference image data through wide-angle image data including a measurement part of a specimen (FIG. 1).

Abstract: It is possible to compatibly set multiple “dropout” color ranges and “non-dropout” color ranges and uniquely determine a dropout boundary. An object of the present invention is to greatly conserve maintenance cost of adding a new dropout form after apparatus operations. A conventional technology aims at assuring relation to a predetermined color region, determining the presence or absence of contention, or uniquely settling a dropout boundary. The present invention provides a means for supplying levels to a “dropout” color range and a “non-dropout” color range. A registered color range histogram can be quasi-three-dimensionally visualized so that an operator can make adjustment by viewing a contention determination result and an image.

Abstract: A composite image creating method and device are provided which, when images separately captured a plurality of times are panoramically synthesized, can prevent deformation of a pattern due to multiple irradiation of the electron beam. One image is generated by overlapping joining areas of rims of two adjacent images when a plurality of images are joined to generate one image. Of two adjacent images, the joining area of an image of an earlier image capturing order is left, and the joining area of an image of a later image capturing order is removed. The joining area of the image of an earlier image capturing order is obtained with irradiation of electron beam a less number of times than the joining area of the image of a later image capturing order, and therefore deformation of a pattern due to irradiation of the electron beam is little.

Abstract: In a defect judgment operation using tolerance to allow a high-speed operation, the amount of deformation is obtained from an image pickup pattern image, and tolerance including the deformation is generated by deforming a reference pattern image as the basis of the tolerance according to the deformation, and only a disconnection or a contact is judged as an abnormality even if deformation exists in an image pickup pattern.

Abstract: A composite picture forming method and picture forming apparatus forms pattern attribute information contained in an overlapping domain for the overlapping domain between a plurality of pictures to select the pictures to be targeted for a composition in accordance with the pattern attribute information and combine the selected pictures, and the composition of the pictures is also performed in plural stages by using the pattern attribute information in the overlapping domain.

Abstract: It is possible to compatibly set multiple “dropout” color ranges and “non-dropout” color ranges and uniquely determine a dropout boundary. An object of the present invention is to greatly conserve maintenance cost of adding a new dropout form after apparatus operations. A conventional technology aims at assuring relation to a predetermined color region, determining the presence or absence of contention, or uniquely settling a dropout boundary. The present invention provides a means for supplying levels to a “dropout” color range and a “non-dropout” color range. A registered color range histogram can be quasi-three-dimensionally visualized so that an operator can make adjustment by viewing a contention determination result and an image.

Abstract: The present invention provides a technique to generate an accurate connected image even in a monotonous pattern using design data as constrained conditions. A reference position is roughly determined through matching between the design data and image data, matching between neighboring images is performed using the amount of mismatch from the design data as a searching range and a connected image is generated at high speed and accurately.

Abstract: An image processing method, a contactless image processing apparatus, and a storage medium which stores processes. The method includes the steps of reading an original by a graphics input unit in a contactless manner and outputting from the graphics input unit information as to the original, measuring a distance from the graphics input unit to the original at least on the basis of information as to vertexes which is derived from the information as to the original which has been read and outputted from the graphics input unit and correcting for the information as to the original outputted from the graphics input unit on the basis of the distance which is measured and the information as to the vertexes.

Abstract: A simple non-contact image reader of high degree of freedom comprising a reading unit for reading images, a reading condition changing unit for changing the reading conditions of the reading unit, a storage unit for storing two read images which are read under two different reading conditions changed, and an image correction unit for composing two read images stored and developing them on a plane, wherein characters written on the surface of a folded form or a thick book can be read in a good operability state and on a high image quality basis by reading images in non-contact.

Abstract: An image input device comprises: a pixel shifting optical means that allows displacing an image-forming position on the image-pickup device of the incident light from the image-pickup optical system within one pixel to several pixels horizontally and vertically; an image pickup control means that controls pixel displacement conditions of the pixel shifting optical means; a resolution detection means that detects a resolution of an image on the basis of image information read by varying the pixel displacement conditions of the pixel shifting optical means; and a storage means that stores pixel information detected based on that the resolution is higher than a predetermined value, and/or information corresponding to a pixel position detected based on that the resolution is higher than the predetermined value.

Abstract: An image signal processing apparatus to realize signal processing system and apparatus constitution, where an image signal inputted using a photoelectric conversion element such as a CCD or a contact type image sensor is obtained in circuit constitution of small scale with high picture quality. In order to solve the problems, data width of a signal referred to in a shading corrector, an MTF corrector and an error diffusion circuit is made b+f+j≦8 per one pixel. Or error component commonly possessed by plural pixels (N pixels) in the error diffusion circuit is made b+f+j′≦8, data width per one pixel being made j′=j/N. Image signal processing is realized in this constitution, thereby data width of a signal referred to in respective signal processings is reduced, and an image signal satisfying accuracy of signal processing sufficiently and having high picture quality can be obtained.

Abstract: An image processing method of easily obtaining an image photographed from the front side even if an operation to read an image on the surface in a 3-dimensional shape such as folded slip or thick book is performed. An outline is obtained from original information read by a camera. Vertex information is detected from the outline information. A distance between the camera and the original is measured from the vertex information and known original shape information. A correction to develop the original information of the folded original into a plane on the basis of the distance information and the vertex information is made.

Abstract: An image signal processing apparatus to realize signal processing system and apparatus constitution, where an image signal inputted using a photoelectric conversion element such as a CCD or a contact type image sensor is obtained in circuit constitution of small scale with high picture quality. In order to solve the problems, data width of a signal referred to in a shading corrector, an MTF corrector and an error diffusion circuit is made b+f+j.ltoreq.8 per one pixel. Or error component commonly possessed by plural pixels (N pixels) in the error diffusion circuit is made b+f+j'.ltoreq.8, data width per one pixel being made j'=j/N. Image signal processing is realized in this constitution, thereby data width of a signal referred to in respective signal processings is reduced, and an image signal satisfying accuracy of signal processing sufficiently and having high picture quality can be obtained. For example, when a circuit is constituted by LSI, the memory section can be easily mounted on the same LSI.

Abstract: An image information processor for producing a high-quality output image by emphasizing the contour portions of a character, a photograph and others and by preventing the generation of a Moire patterns in a dot region, for preventing an increase in the amount of codes, and for making it unnecessary to set desired binarization processing for each original, is provided. The processor includes a unit for scanning the original to convert each pixel data into an electric signal, a unit for controlling the start of image processing, a filter for carrying out enhancement processing among a plurality of pixels arranged in oblique directions after smoothing processing has been carried out among a plurality of contiguous pixels arranged in scanning and traverse directions, and a unit for carrying out at least one of binarization and binarization capable of realizing pseudo tone expression.