Patents by Inventor Shohei FUKANO

Shohei FUKANO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Antenna, plasma processing device and plasma processing method
    Patent number: 10832892
    Abstract: An antenna according to an aspect includes: a dielectric window having a first surface and a second surface, the second surface having an annular recessed surface and a flat surface surrounded by the recessed surface; a slot plate; a dielectric plate; a heat transfer member made of metal and having an upper surface and a lower surface opposing each other; a cooling jacket; and a heater, in which the upper surface includes a plurality of first regions and a second region, the cooling jacket is mounted on the plurality of first regions, the second region is recessed further toward the lower surface side than the plurality of first regions, the heater is mounted on the second region, and each of the plurality of first regions is provided at a position at least partially overlapping with the flat surface when viewed in a direction parallel to a central axis.
    Type: Grant
    Filed: January 4, 2018
    Date of Patent: November 10, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kazuki Takahashi, Yuki Kawada, Naoki Matsumoto, Takahiro Senda, Koji Koyama, Shohei Fukano, Jun Yoshikawa, Hiroyuki Kondo, Takashi Minakawa
  • ANTENNA, PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
    Publication number: 20200058468
    Abstract: An antenna according to an aspect includes: a dielectric window having a first surface and a second surface, the second surface having an annular recessed surface and a flat surface surrounded by the recessed surface; a slot plate; a dielectric plate; a heat transfer member made of metal and having an upper surface and a lower surface opposing each other; a cooling jacket; and a heater, in which the upper surface includes a plurality of first regions and a second region, the cooling jacket is mounted on the plurality of first regions, the second region is recessed further toward the lower surface side than the plurality of first regions, the heater is mounted on the second region, and each of the plurality of first regions is provided at a position at least partially overlapping with the flat surface when viewed in a direction parallel to a central axis.
    Type: Application
    Filed: January 4, 2018
    Publication date: February 20, 2020
    Applicant: Tokyo Electron Limited
    Inventors: Kazuki TAKAHASHI, Yuki KAWADA, Naoki MATSUMOTO, Takahiro SENDA, Koji KOYAMA, Shohei FUKANO, Jun YOSHIKAWA, Hiroyuki KONDO, Takashi MINAKAWA