Abstract: To provide an article gripping system that reduces the installation area of the apparatus and further shortens the amount of time from when it grips to when it feeds articles. An article gripping system (110) switches between a first positional relationship in which a container (50) obstructs discharge of articles gripped by a first gripping unit (15A) but does not obstruct discharge of articles by a second gripping unit (15B) and a second positional relationship in which the container (50) obstructs discharge of articles gripped by the second gripping unit (15B) but does not obstruct discharge of articles gripped by the first gripping unit (15A), so the gripping units do not move while they are holding the articles, and the articles can be prevented from falling out of the gripping units (15).

Abstract: A flow resistant part having a rod shape is disposed in a raw liquid introduction path in a manner such that the raw liquid is sprayed onto a vaporization plate to reduce the conductance of the raw liquid introduction path with respect to the raw liquid. Because the pressure on an outlet side of the liquid mass flow controller is increased, and the pressure difference from the pressure on the inlet side of the liquid mass flow controller is reduced, the occurrence of cavitation can be prevented. A plurality of the flow resistant parts can be provided.