Patents by Inventor Shuji Munehira

Shuji Munehira has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Solution for cleaning silicon semiconductors and silicon oxides
    Patent number: 5560857
    Abstract: A cleaning solution for achieving highly accurate cleaning of silicon semiconductors and silicon oxides. The solution which enables a great reduction in the metal contaminants and the number of fine particles adhered on the surfaces and retention of the hydrophilic property of the surfaces to prevent the surfaces from being unstable, comprising an aqueous acidic solution containing 0.005% by weight or more to less than 0.05% by weight hydrogen fluoride and 0.3% by weight or more to 20.0% by weight or less hydrogen peroxide and having a pH in the range from 1 or more to less than 5.
    Type: Grant
    Filed: October 11, 1994
    Date of Patent: October 1, 1996
    Assignees: Nippon Steel Corporation, NSC Electron Corporation
    Inventors: Tadashi Sakon, Kenichi Uemura, Yoshihiro Mori, Kengo Shimanoe, Susumu Ohtsuka, Shuji Munehira