Patents by Inventor Silvia Rocio Aguilar Amaya

Silvia Rocio Aguilar Amaya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Equipment front end module gas recirculation
    Patent number: 10566216
    Abstract: Disclosed are methods and apparatuses for recirculating gas in an equipment front end module (“EFEM”), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: February 18, 2020
    Assignee: Lam Research Corporation
    Inventors: Brandon Lee Senn, Peter R. Wassei, Scott Vernon Wong, Silvia Rocio Aguilar Amaya, Todd Anthony Lopes, Richard Howard Gould, James Donald Keller, Steven Edmund Pracko
  • Verifying end effector flatness using electrical continuity
    Patent number: 10190865
    Abstract: Methods, kits, systems, and apparatuses, for measuring and/or verifying end effector flatness using electrical continuity are provided.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: January 29, 2019
    Assignee: Lam Research Corporation
    Inventors: Silvia Rocio Aguilar Amaya, Derek John Witkowicki, Damon Tyrone Genetti
  • EQUIPMENT FRONT END MODULE GAS RECIRCULATION
    Publication number: 20180358239
    Abstract: Disclosed are methods and apparatuses for recirculating gas in an equipment front end module (“EFEM”), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.
    Type: Application
    Filed: June 9, 2017
    Publication date: December 13, 2018
    Inventors: Brandon Lee Senn, Peter R. Wassei, Scott Vernon Wong, Silvia Rocio Aguilar Amaya, Todd Anthony Lopes, Richard Howard Gould, James Donald Keller, Steven Edmund Pracko
  • VERIFYING END EFFECTOR FLATNESS USING ELECTRICAL CONTINUITY
    Publication number: 20170211922
    Abstract: Methods, kits, systems, and apparatuses, for measuring and/or verifying end effector flatness using electrical continuity are provided.
    Type: Application
    Filed: March 31, 2016
    Publication date: July 27, 2017
    Inventors: Silvia Rocio Aguilar Amaya, Derek John Witkowicki, Damon Tyrone Genetti