Patents by Inventor SING-TSUNG LI

SING-TSUNG LI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210063984
    Abstract: A semiconductor equipment management method applicable to an electronic device for managing multiple pieces of semiconductor equipment is provided. The pieces of semiconductor equipment are respectively controlled through multiple control hosts, and the control hosts and the electronic device are connected to a switch device. The method includes: receiving real-time image information of each control host through the switch device; determining whether the real-time image information of each control host includes a triggering event by performing an image recognition on the real-time image information; executing a macro corresponding to the triggering event, where the macro includes at least one self-defined operation; generating at least one input command according to the self-defined operation of the executed macro; and controlling the control hosts to execute the self-defined operation of the executed macro by transmitting the input command to the control hosts through the switch device.
    Type: Application
    Filed: November 16, 2020
    Publication date: March 4, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sing-Tsung Li, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Shou-Wen Kuo, Chien-Ko Liao
  • Patent number: 10852704
    Abstract: A semiconductor equipment management method applicable to an electronic device for managing multiple pieces of semiconductor equipment is provided. The pieces of semiconductor equipment are respectively controlled through multiple control hosts, and the control hosts and the electronic device are connected to a switch device. The method includes: receiving real-time image information of each control host through the switch device; determining whether the real-time image information of each control host includes a triggering event by performing an image recognition on the real-time image information; executing a macro corresponding to the triggering event, where the macro includes at least one self-defined operation; generating at least one input command according to the self-defined operation of the executed macro; and controlling the control hosts to execute the self-defined operation of the executed macro by transmitting the input command to the control hosts through the switch device.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: December 1, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sing-Tsung Li, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Shou-Wen Kuo, Chien-Ko Liao
  • Patent number: 10734206
    Abstract: Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: August 4, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li
  • Publication number: 20200111652
    Abstract: Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.
    Type: Application
    Filed: December 6, 2019
    Publication date: April 9, 2020
    Inventors: Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li
  • Patent number: 10559453
    Abstract: Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: February 11, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li
  • Patent number: 10390705
    Abstract: The present invention is directed to a device which includes the following features: a light source illuminates a target to generate an optical inspection signal; a probe head provides an optical path for the optical inspection signal; a probe tube arranged at a front end of the probe head; at least one switched filter module arranged in the optical path, allowing the optical inspection signal to pass therethrough to generate a corresponding spectral signal; and an image sensor arranged behind the switched filter module, receiving the spectral signal and generating a spectral image. The spectral image can be transmitted to an external device, wherefrom the user can use the spectral image to examine the target in further detail. The present invention features a rotary-type or movable-type switched filter module, which facilitates the user to switch filters easily during optical inspection.
    Type: Grant
    Filed: May 9, 2016
    Date of Patent: August 27, 2019
    Assignee: National Chiao Tung University
    Inventors: Mang Ou-Yang, Ting-Wei Huang, Chin-Siang Yang, Yao-Fang Hsieh, Sing-Tsung Li, Jin-Chern Chiou, Ming-Hsui Tsai, Jeng-Ren Duann, Yung-Jiun Lin, Shuen-De Wu, Yung-Jhe Yan, Zheng-Lin He
  • Publication number: 20190163149
    Abstract: A semiconductor equipment management method applicable to an electronic device for managing multiple pieces of semiconductor equipment is provided. The pieces of semiconductor equipment are respectively controlled through multiple control hosts, and the control hosts and the electronic device are connected to a switch device. The method includes: receiving real-time image information of each control host through the switch device; determining whether the real-time image information of each control host includes a triggering event by performing an image recognition on the real-time image information; executing a macro corresponding to the triggering event, where the macro includes at least one self-defined operation; generating at least one input command according to the self-defined operation of the executed macro; and controlling the control hosts to execute the self-defined operation of the executed macro by transmitting the input command to the control hosts through the switch device.
    Type: Application
    Filed: July 6, 2018
    Publication date: May 30, 2019
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Sing-Tsung Li, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Shou-Wen Kuo, Chien-Ko Liao
  • Publication number: 20190139746
    Abstract: A fabrication system for fabricating an IC is provided which includes a processing tool, a computation device and a FDC system. The processing tool includes an electrode and an RF sensor to execute a semiconductor manufacturing process to fabricate the IC. The RF sensor wirelessly detects the intensity of the RF signal. The computation device extracts statistical characteristics based on the detection of the intensity of the RF signal. The FDC system determines whether or not the intensity of the RF signal meets a threshold value or a threshold range according to the extracted statistical characteristics. When the detected intensity of the RF signal exceeds the threshold value or the threshold range, the FDC system notifies the processing tool to adjust the RF signal or stop tool to check parts damage.
    Type: Application
    Filed: February 22, 2018
    Publication date: May 9, 2019
    Inventors: Wun-Kai TSAI, Wen-Che LIANG, Chao-Keng LI, Zheng-Jie XU, Chih-Kuo CHANG, Sing-Tsung LI, Feng-Kuang WU, Hsu-Shui LIU
  • Publication number: 20190131116
    Abstract: Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.
    Type: Application
    Filed: December 26, 2018
    Publication date: May 2, 2019
    Inventors: Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li
  • Patent number: 10170287
    Abstract: Some embodiments relate to a system. The system includes a radio frequency (RF) generator configured to output a RF signal. A transmission line is coupled to the RF generator. A plasma chamber is coupled to RF generator via the transmission line, wherein the plasma chamber is configured to generate a plasma based on the RF signal. A micro-arc detecting element is configured to determine whether a micro-arc has occurred in the plasma chamber based on the RF signal.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: January 1, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li
  • Publication number: 20160249809
    Abstract: The present invention discloses a portable noninvasive inspection device, which comprises a light source illuminates a target to generate an optical inspection signal; a probe head provides an optical path for light source to receive optical inspection signal; a probe tube arranged at a front end of probe head; at least one switched filter module arranged in the optical path, allowing the optical inspection signal to pass there through to generate a corresponding spectral signal; and an image sensor arranged behind the switched filter module, receiving the spectral signal and generating a spectral image. The spectral image can be transmitted to an external device, wherefrom the user can use the spectral image to examine the target in further detail. The present invention features a rotary-type or movable-type switched filter module, which facilitates the user to switch filters easily during optical inspection.
    Type: Application
    Filed: May 9, 2016
    Publication date: September 1, 2016
    Inventors: MANG OU-YANG, TING-WEI HUANG, CHIN-SIANG YANG, YAO-FANG HSIEH, SING-TSUNG LI, JIN-CHERN CHIOU, MING-HSUI TSAI, JENG-REN DUANN, YUNG-JIUN LIN, SHUEN-DE WU, YUNG-JHE YAN, ZHENG-LIN HE
  • Publication number: 20150313455
    Abstract: The present invention discloses a portable noninvasive inspection device, which comprises a light source illuminates a target to generate an optical inspection signal; a probe head provides an optical path for said light source to receive said optical inspection signal; at least one switched filter module arranged in the optical path, allowing the optical inspection signal to pass there through to generate a corresponding spectral signal; and an image sensor arranged behind the switched filter module, receiving the spectral signal and generating a spectral image. The spectral image can be transmitted to an external device, wherefrom the user can use the spectral image to examine the target in further detail. The present invention features a rotary-type or movable-type switched filter module, which facilitates the user to switch filters easily during optical inspection and expands the application of the present invention.
    Type: Application
    Filed: June 25, 2015
    Publication date: November 5, 2015
    Inventors: Mang OU-YANG, Ting-Wei HUANG, Chin-Siang YANG, Yao-Fang HSIEH, Sing-Tsung LI, Jin-Chern CHIOU, Ming-HsuiI TSAI, Jeng-Ren DUANN, Yung-Jiun LIN, Shuen-De WU
  • Publication number: 20150118637
    Abstract: The present invention discloses a portable noninvasive inspection device, which comprises a light source illuminates an target to generate an optical inspection signal; a probe head provides an optical path for said light source to receive said optical inspection signal; at least one switched filter module arranged in the optical path, allowing the optical inspection signal to pass therethrough to generate a corresponding spectral signal; and an image sensor arranged behind the switched filter module, receiving the spectral signal and generating a spectral image. The spectral image can be transmitted to an external device, wherefrom the user can use the spectral image to examine the target in further detail. The present invention features a rotary-type or movable-type switched filter module, which facilitates the user to switch filters easily during optical inspection and expands the application of the present invention.
    Type: Application
    Filed: October 30, 2013
    Publication date: April 30, 2015
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: MANG OU-YANG, TING-WEI HUANG, CHIN-SIANG YANG, YAO-FANG HSIEH, SING-TSUNG LI, JIN-CHERN CHIOU, MING-HSUI TSAI, JENG-REN DUANN, YUNG-JIUN LIN, SHUEN-DE WU