Patents by Inventor Srinivas V. Pietambaram

Srinivas V. Pietambaram has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6541280
    Abstract: A dielectric layer comprises lanthanum, aluminum and oxygen and is formed between two conductors or a conductor and substrate. In one embodiment, the dielectric layer is graded with respect to the lanthanum or aluminum. In another embodiment, an insulating layer is formed between the conductor or substrate and the dielectric layer. The dielectric layer can be formed by atomic layer chemical vapor deposition, physical vapor deposition, organometallic chemical vapor deposition or pulsed laser deposition.
    Type: Grant
    Filed: March 20, 2001
    Date of Patent: April 1, 2003
    Assignee: Motorola, Inc.
    Inventors: Vidya S. Kaushik, Bich-yen Nguyen, Srinivas V. Pietambaram, James Kenyon Schaeffer, III
  • Publication number: 20020137317
    Abstract: A dielectric layer comprises lanthanum, aluminum and oxygen and is formed between two conductors or a conductor and substrate. In one embodiment, the dielectric layer is graded with respect to the lanthanum or aluminum. In another embodiment, an insulating layer is formed between the conductor or substrate and the dielectric layer. The dielectric layer can be formed by atomic layer chemical vapor deposition, physical vapor deposition, organometallic chemical vapor deposition or pulsed laser deposition.
    Type: Application
    Filed: March 20, 2001
    Publication date: September 26, 2002
    Inventors: Vidya S. Kaushik, Bich-Yen Nguyen, Srinivas V. Pietambaram, James Kenyon Schaeffer