Patents by Inventor Stefan Ferdinand Mueller

Stefan Ferdinand Mueller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12075625
    Abstract: According to various aspects a memory cell is provided, the memory cell including: a first electrode; a second electrode; and a memory layer disposed between the first electrode and the second electrode, wherein the memory layer includes a first memory portion having a first concentration of oxygen vacancies and a second memory portion having a second concentration of oxygen vacancies different from the first concentration of oxygen vacancies.
    Type: Grant
    Filed: February 27, 2023
    Date of Patent: August 27, 2024
    Assignee: Ferroelectric Memory GmbH
    Inventor: Stefan Ferdinand Müller
  • Publication number: 20240128308
    Abstract: A method for fabricating a ferroelectric device includes providing a lower electrode layer on a substrate, forming a retention enhancement layer by oxidizing a surface of the lower electrode layer using a gas phase oxidation process, and depositing a ferroelectric high-k metal oxide layer over the retention enhancement layer on the lower electrode layer using a vapor deposition process. The retention enhancement layer on the lower electrode layer increases the retention performance and reliability of the ferroelectric device.
    Type: Application
    Filed: October 16, 2023
    Publication date: April 18, 2024
    Inventors: Dina Triyoso, Robert Clark, Kandabara Tapily, Tony Schenk, Alireza Kashir, Stefan Ferdinand Mueller
  • Patent number: 11950430
    Abstract: According to various aspects, a memory cell is provided, the memory cell including: a first electrode; a second electrode; and a memory structure disposed between the first electrode and the second electrode, the first electrode, the second electrode, and the memory structure forming a memory capacitor, wherein at least one of the first electrode or the second electrode includes: a first electrode layer including a first material having a first microstructure; a functional layer in direct contact with the first electrode layer; and a second electrode layer in direct contact with the functional layer, the second electrode layer including a second material having a second microstructure different from the first microstructure.
    Type: Grant
    Filed: October 30, 2020
    Date of Patent: April 2, 2024
    Assignee: Ferroelectric Memory GmbH
    Inventors: Stefan Ferdinand Müller, Patrick Polakowski
  • Publication number: 20240032305
    Abstract: Various aspects relate to a memory cell including: a first electrode; a second electrode; and a memory element, the first electrode, the second electrode, and the memory element forming a memory capacitor; wherein the memory element includes a spontaneously polarizable layer stack which includes an alternating sequence of first sublayers and second sublayers, wherein each of the second sublayers substantially consists of a mixed material of an oxide of a first transition metal and an oxide of a second transition metal, wherein each of the first sublayers substantially consists of the oxide of the first transition metal or second transition metal; wherein a first concentration of the first transition metal and a second concentration of the second transition metal in the mixed material are substantially different from one another, and/or wherein the alternating sequence starts with one of the first sublayers and ends with another one of the first sublayers.
    Type: Application
    Filed: July 25, 2022
    Publication date: January 25, 2024
    Inventors: Alireza KASHIR, Tony SCHENK, Stefan Ferdinand MÜLLER
  • Publication number: 20240032307
    Abstract: Various aspects relate to a memory cell including: a first electrode; a second electrode; and a memory element disposed between the first electrode and the second electrode. The memory element includes a spontaneously polarizable material. The first electrode, the second electrode, and the memory element forming a memory capacitor. The first electrode and/or the second electrode includes: an electrically conductive electrode layer, and a functional layer comprising a semi-conductive material, wherein the functional layer is in direct physical contact with the memory element.
    Type: Application
    Filed: July 14, 2023
    Publication date: January 25, 2024
    Inventors: Stefan Ferdinand MÜLLER, Tony SCHENK, Alireza KASHIR
  • Publication number: 20230371268
    Abstract: Various aspects relate to a memory device including: a plurality of gate layer stacks, wherein each gate layer stack of the plurality of gate layer stacks includes a gate electrode layer and one or more electrically insulating layers; one or more channel structures extending through the plurality of gate layer stacks, wherein the plurality of gate layer stacks and the one or more channel structures correspond to a plurality of field-effect transistor based memory cells, wherein each field-effect transistor based memory cell of the plurality of field-effect transistor based memory cells includes: a gate layer portion of a gate layer stack of the plurality of gate layer stacks; a channel portion of a channel structure of the one or more channel structures; a spontaneously-polarizable portion; and a floating gate, wherein the spontaneously-polarizable portion and the floating gate are disposed between the gate layer portion and the channel portion.
    Type: Application
    Filed: May 11, 2022
    Publication date: November 16, 2023
    Inventor: Stefan Ferdinand MÜLLER
  • Publication number: 20230284454
    Abstract: A memory cell includes a capacitive memory structure comprising a first electrode; a field-effect transistor structure comprising a gate electrode; one or more insulator layers; one or more source/drain contact structures embedded in the one or more insulator layers to electrically contact the field-effect transistor structure; and a connection structure embedded in at least one of the one or more insulator layers; and one or more electrically insulating structures in addition to the one or more insulator layers configured to prevent a leakage current-induced charging of the first electrode, the gate electrode, and the connection structure, wherein the one or more electrically insulating structures comprise: a memory charge-prevention layer disposed between the first electrode of the capacitive memory structure and at least one of the one or more insulator layers, the memory charge-prevention layer laterally surrounding the first electrode of the capacitive memory structure.
    Type: Application
    Filed: March 3, 2023
    Publication date: September 7, 2023
    Inventors: Johannes Ocker, Stefan Ferdinand Müller, Patrick Polakowski
  • Publication number: 20230247842
    Abstract: According to various aspects a memory cell is provided, the memory cell including: a first electrode; a second electrode; and a memory layer disposed between the first electrode and the second electrode, wherein the memory layer includes a first memory portion having a first concentration of oxygen vacancies and a second memory portion having a second concentration of oxygen vacancies different from the first concentration of oxygen vacancies.
    Type: Application
    Filed: February 27, 2023
    Publication date: August 3, 2023
    Inventor: Stefan Ferdinand Müller
  • Publication number: 20230223066
    Abstract: Various aspects relate to a memory cell including a field-effect transistor structure and a capacitive memory structure, wherein the capacitive memory structure includes at least one spontaneously polarizable memory element, and wherein the field-effect transistor structure includes a source region, a drain region, a channel region extending between the source region and the drain region, and a gate structure disposed at the channel region, wherein the gate structure of the field-effect transistor structure substantially overlaps the source region of the field-effect transistor structure and/or the drain region of the field-effect transistor structure.
    Type: Application
    Filed: January 7, 2022
    Publication date: July 13, 2023
    Inventor: Stefan Ferdinand Müller
  • Publication number: 20230189531
    Abstract: Various aspects relate to a memory cell, the memory cell including: a field-effect transistor structure; and a capacitive memory structure; wherein the field-effect transistor structure and the capacitive memory structure are configured to form a capacitive voltage divider; wherein the capacitive memory structure includes: a first electrode layer, a second electrode layer, and a memory element structured to have at least a first region extending from the first electrode layer to the second electrode layer and a second region extending from the first electrode layer to the second electrode layer, wherein the first region consists of a first material, wherein the second region consists of a second material, and wherein the first material is different from the second material.
    Type: Application
    Filed: December 9, 2021
    Publication date: June 15, 2023
    Inventor: Stefan Ferdinand Müller
  • Publication number: 20230189532
    Abstract: Various aspects relate to a memory cell including: a thermally insulating layer disposed over one or more metallization layers of a metallization; an embedding structure disposed over the thermally insulating layer; and a spontaneously polarizable capacitor structure disposed at least partially within the embedding structure, wherein the spontaneously polarizable capacitor structure comprises a spontaneously polarizable memory element; wherein the thermally insulating layer is configured as a heat barrier to reduce a heat transfer through the embedding structure into the one or more metallization layers.
    Type: Application
    Filed: December 13, 2021
    Publication date: June 15, 2023
    Inventor: Stefan Ferdinand Müller
  • Publication number: 20220376114
    Abstract: Various aspects relate to a memory cell including: a field-effect transistor structure, the field-effect transistor structure including a gate structure to control a current flow in a channel, the gate structure including a gate isolation and a floating gate, wherein at least a part of the gate structure extends from a surface of a semiconductor layer into the semiconductor layer; and a capacitive memory structure, the capacitive memory structure including at least two electrodes and a spontaneously polarizable layer disposed between the at least two electrodes, wherein one of the at least two electrodes is in direct physical contact with the floating gate of the field-effect transistor structure, and wherein the spontaneously polarizable layer is disposed over the surface of the semiconductor layer.
    Type: Application
    Filed: May 19, 2022
    Publication date: November 24, 2022
    Inventor: Stefan Ferdinand Müller
  • Patent number: 11443792
    Abstract: Various aspects relate to a memory cell including: a field-effect transistor memory structure, wherein a source/drain current through the field-effect transistor memory structure is a function of a gate voltage supplied to a gate of the field-effect transistor memory structure and a memory state in which the field-effect transistor memory structure is residing in; and an access device coupled to the gate of the field-effect transistor memory structure, wherein the access device is configured to control a voltage present at the gate of the field-effect transistor memory structure.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: September 13, 2022
    Assignee: FERROELECTRIC MEMORY GMBH
    Inventors: Rashid Iqbal, Stefano Sivero, Stefan Ferdinand Müller
  • Publication number: 20220139937
    Abstract: According to various aspects, a memory cell is provided, the memory cell including: a first electrode; a second electrode; and a memory structure disposed between the first electrode and the second electrode, the first electrode, the second electrode, and the memory structure forming a memory capacitor, wherein at least one of the first electrode or the second electrode includes: a first electrode layer including a first material having a first microstructure; a functional layer in direct contact with the first electrode layer; and a second electrode layer in direct contact with the functional layer, the second electrode layer including a second material having a second microstructure different from the first microstructure.
    Type: Application
    Filed: October 30, 2020
    Publication date: May 5, 2022
    Inventors: Stefan Ferdinand Müller, Patrick Polakowski
  • Publication number: 20220139934
    Abstract: According to various aspects a memory cell is provided, the memory cell including: a first electrode; a second electrode; and a memory layer disposed between the first electrode and the second electrode, wherein the memory layer includes a first memory portion having a first concentration of oxygen vacancies and a second memory portion having a second concentration of oxygen vacancies different from the first concentration of oxygen vacancies.
    Type: Application
    Filed: October 30, 2020
    Publication date: May 5, 2022
    Inventor: Stefan Ferdinand Müller
  • Publication number: 20220122995
    Abstract: According to various aspects, a memory cell is provided, the memory cell including: a capacitive memory structure; and a field-effect transistor structure including a gate isolation, wherein the capacitive memory structure and the field-effect transistor structure are coupled with one another to form a capacitive voltage divider, wherein the gate isolation includes at least one gate isolation layer, the at least one gate isolation layer including a material having a dielectric constant greater than 4, and wherein a thickness of the at least one gate isolation layer is in the range from 3 nm to 10 nm.
    Type: Application
    Filed: October 16, 2020
    Publication date: April 21, 2022
    Inventors: Johannes Ocker, Stefan Ferdinand Müller
  • Publication number: 20220122996
    Abstract: According to various aspects, a memory cell is provided, the memory cell including: a capacitive memory structure including a first electrode; a field-effect transistor structure including a gate electrode; one or more insulator layers, one or more source/drain contact structures embedded in the one or more insulator layers to electrically contact the field-effect transistor structure, and a connection structure embedded in at least one of the one or more insulator layers, wherein the connection structure electrically conductively connects the first electrode of the capacitive memory structure and the gate electrode of the field-effect transistor structure with one another and is electrically floating, and one or more additional electrically insulating structures configured to prevent a leakage current-induced charging of the first electrode, the gate electrode, and the connection structure.
    Type: Application
    Filed: October 16, 2020
    Publication date: April 21, 2022
    Inventors: Johannes Ocker, Stefan Ferdinand Müller, Patrick Polakowski
  • Patent number: 10622051
    Abstract: According to various embodiments, a memory cell may include: a field-effect transistor structure comprising a channel region and a gate structure disposed at the channel region, the gate structure comprising a gate electrode structure and a gate isolation structure disposed between the gate electrode structure and the channel region; and a memory structure comprising a first electrode structure, a second electrode structure, and at least one remanent-polarizable layer disposed between the first electrode structure and the second electrode structure; wherein the first electrode structure of the memory structure is electrically conductively connected to the gate electrode structure of the field-effect transistor structure.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: April 14, 2020
    Assignee: Ferroelectric Memory GMBH
    Inventors: Stefan Ferdinand Müller, Marko Noack, Johannes Ocker, Rolf Jähne
  • Publication number: 20200027493
    Abstract: According to various embodiments, a memory cell may include: a field-effect transistor structure comprising a channel region and a gate structure disposed at the channel region, the gate structure comprising a gate electrode structure and a gate isolation structure disposed between the gate electrode structure and the channel region; and a memory structure comprising a first electrode structure, a second electrode structure, and at least one remanent-polarizable layer disposed between the first electrode structure and the second electrode structure; wherein the first electrode structure of the memory structure is electrically conductively connected to the gate electrode structure of the field-effect transistor structure.
    Type: Application
    Filed: September 27, 2019
    Publication date: January 23, 2020
    Inventors: Stefan Ferdinand Müller, Marko Noack, Johannes Ocker, Rolf Jähne
  • Patent number: 10438645
    Abstract: According to various embodiments, a memory cell may include: a field-effect transistor structure comprising a channel region and a gate structure disposed at the channel region, the gate structure comprising a gate electrode structure and a gate isolation structure disposed between the gate electrode structure and the channel region; and a memory structure comprising a first electrode structure, a second electrode structure, and at least one remanent-polarizable layer disposed between the first electrode structure and the second electrode structure; wherein the first electrode structure of the memory structure is electrically conductively connected to the gate electrode structure of the field-effect transistor structure.
    Type: Grant
    Filed: October 27, 2017
    Date of Patent: October 8, 2019
    Assignee: FERROELECTRIC MEMORY GMBH
    Inventors: Stefan Ferdinand Müller, Marko Noack, Johannes Ocker, Rolf Jähne