Patents by Inventor Steffen Diez

Steffen Diez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8390790
    Abstract: A pattern, is imaged by means of a programmable mask, on a substrate that has a photosensitive layer, illumination spots being produced on the mask by means of an illumination unit and individual pixels being produced, via an optical unit, forming a grid of pixels on the substrate corresponding to the pattern. Structure edges that are to be reproduced on the substrate are positioned optimally. To this end at least two exposure processes for the photosensitive layer are performed, the illumination spots or exposure points of which are offset from one another. Thereby, spaces in the grid of pixels of the first exposure process, which spaces are proportionate to the number of exposure processes to be effected, are filled with pixels by the subsequent exposure processes.
    Type: Grant
    Filed: April 4, 2008
    Date of Patent: March 5, 2013
    Assignee: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Alexander Mangold, Udo Becker, Steffen Diez, Roland Kaplan
  • Publication number: 20100091256
    Abstract: A pattern, is imaged by means of a programmable mask, on a substrate that has a photosensitive layer, illumination spots being produced on the mask by means of an illumination unit and individual pixels being produced, via an optical unit, forming a grid of pixels on the substrate corresponding to the pattern. Structure edges that are to be reproduced on the substrate are positioned optimally. To this end at least two exposure processes for the photosensitive layer are performed, the illumination spots or exposure points of which are offset from one another. Thereby, spaces in the grid of pixels of the first exposure process, which spaces are proportionate to the number of exposure processes to be effected, are filled with pixels by the subsequent exposure processes.
    Type: Application
    Filed: April 4, 2008
    Publication date: April 15, 2010
    Applicant: Heidelberg Instruments Mikrotechnik GmbH
    Inventors: Alexander Mangold, Udo Becker, Steffen Diez, Roland Kaplan