Abstract: There is provided a micro-electromechanical system (MEMS) device (102, 200, 300, 404) for cancelling noise generated by oscillation of a movable micro-electromechanical system (MEMS) element (104, 204, 304, 406). The micro-electromechanical system (MEMS) device (102, 200, 300, 404) includes the movable micro-electromechanical system (MEMS) element (104, 204, 304, 406), an actuator (106, 208, 306, 408), a controller (108, 410) and a movable noise cancelling element (110, 202, 312, 412). The controller (108, 410) provides electrical signals to drive the actuator (106, 208, 306, 408) and the movable noise cancelling element (110, 202, 312, 412) in a way to cancel the noise generated in the micro-electromechanical system (MEMS) device (102, 200, 300, 404) by oscillation of the movable MEMS element (104, 204, 304, 406).

Abstract: A micromechanical resonator wafer assembly includes an actuator wafer supporting an outer actuator layer. The outer actuator layer includes an oscillating part configured to be driven by an electrical drive signal. The micromechanical resonator wafer assembly further includes a device wafer mounted on top of the actuator wafer. The device wafer includes a plurality of inner actuators. Each of the inner actuators include an oscillation body configured to oscillate about one or more axes. The device wafer is physically connected to the actuator wafer such that each of the inner actuators forms with the outer actuator layer a coupled oscillation system for excitation of the oscillation body of the respective inner actuator. The micromechanical resonator wafer assembly provides external actuation of the oscillation body of each of the inner actuators by use of the outer actuator layer and hence, provides improved scan angles with fast start-up time.

Abstract: The present disclosure provides a deflection device (100, 200, 300, 400) for use in a scanner. The deflection device (100, 200, 300, 400) includes a substrate (102, 202), a mirror (106, 206, 304, 404) and actuator means (110). The mirror (106, 206, 304, 404) arranged in a recess (104, 204, 306, 406) in the substrate (102, 202) by connector means (108) in such a way that it can rotate about at least two axes in an oscillatory manner. The actuator means (110) causes the mirror (106, 206, 304, 404) to oscillate. The actuator means (110) are arranged in one or more trenches (112A-D) in the substrate (102, 202) surrounding the recess (104, 204, 306, 406), in such a way that a change of shape of the actuator means (110) will cause a movement in the substrate (102, 202), thereby inducing oscillatory movement of the mirror (106, 206, 304, 404).

Abstract: A micromechanical resonator assembly which includes an internal actuator. The internal actuator further includes an oscillation body configured to oscillate about one or more axes, the oscillation body having one or more eigen frequencies. The micromechanical resonator assembly further includes an external actuator that includes an oscillating part. The micromechanical resonator assembly further includes a mounting base that includes electronic driving part. The external actuator being mounted on the mounting base and being electrically connected to the electronic driving part, for allowing excitation of the oscillation body of the internal actuator by transfer of energy from the oscillating part to the oscillating body. The micromechanical resonator assembly provides external actuation of the oscillation body of the internal actuator by use of the external actuator and hence, provides extremely large scan angles of 180°.

Abstract: The invention relates to a glass substrate-based MEMS mirror device for variable deflection of an incident electromagnetic beam, as well as a method for its production. The MEMS mirror device has a disk-shaped first glass substrate structured into a plurality of subregions with a mirror subregion formed at least partially as a MEMS mirror for reflecting electromagnetic radiation and a frame subregion surrounding the mirror subregion at least in sections. The mirror subregion is designed as a subregion of the first glass substrate suspended so as to be capable of oscillating in several dimensions relative to the frame subregion by means of at least one connecting element connecting the mirror subregion and the frame subregion and which can be designed in particular as a connecting web or mechanical spring.

Abstract: A system includes an encoder magnet, a magnetic field sensor, and a shield structure. The encoder magnet is configured to rotate about an axis of rotation and is configured to produce a measurement magnetic field. The magnetic field sensor is axially displaced away from the encoder magnet and is configured to detect the measurement magnetic field. The shield structure at least partially surrounds both of the encoder magnet and the magnetic field sensor for shielding against stray magnetic fields. The shield structure attaches to a secondary structure. The shield structure and the encoder magnet may be coupled via the secondary structure so that they are commonly rotational. Alternatively, the sensor package and the shield structure are coupled via the secondary structure so that they are nonrotational relative to the encoder magnet.

Abstract: A magnetic field sensor includes at least two magnetoresistive (MR) sensor elements arranged in a half-bridge configuration. Each of the MR sensor elements includes a magnetic region having a magnetic anisotropy with a resultant magnetization. The magnetic anisotropy is created using an oblique incident deposition (OID) technique, with the magnetic regions being deposited at a nonzero deposition angle relative to a reference line oriented perpendicular to a surface of the magnetic field sensor. A system includes an encoder and the half-bridge configuration of the sensor elements. The encoder produces an external magnetic field, having predetermined magnetic variations in response to motion of the encoder, the magnetic field being detectable by the sensor elements. The resultant magnetization of the sensor elements is aligned by OID in a preferred direction perpendicular to the direction of the external magnetic field instead of utilizing a permanent magnet structure for providing a bias magnetic field.

Abstract: A system includes an encoder magnet, a magnetic field sensor, and a shield structure. The encoder magnet is configured to rotate about an axis of rotation and is configured to produce a measurement magnetic field. The magnetic field sensor is axially displaced away from the encoder magnet and is configured to detect the measurement magnetic field. The shield structure at least partially surrounds both of the encoder magnet and the magnetic field sensor for shielding against stray magnetic fields. The shield structure attaches to a secondary structure. The shield structure and the encoder magnet may be coupled via the secondary structure so that they are commonly rotational. Alternatively, the sensor package and the shield structure are coupled via the secondary structure so that they are nonrotational relative to the encoder magnet.

Abstract: A system includes a magnet having an axis of rotation, the magnet being configured to produce a magnetic field. The system further includes a plurality of magnetoresistive sensor elements, each of the magnetoresistive sensor elements having a magnetic free layer configured to generate a vortex magnetization pattern in the magnetic free layer, and the magnetoresistive sensor elements being configured to produce output signals in response to the magnetic field. A rotation angle of a rotating element to which the magnet is coupled may be determined using the plurality of output signals.

Abstract: A system includes a magnet configured to produce a magnetic field, the magnet having an asymmetric magnetization configuration that produces a distinct feature in the magnetic field. The asymmetric magnetization configuration can be produced via an asymmetric physical characteristic, nonuniform magnetization strengths, nonuniform magnetization distributions, off-centered magnet, and so forth. Magnetic field sensors are configured to produce output signals in response to the magnetic field, the output signals being indicative of the distinct feature in the magnetic field. A processing circuit receives the output signals and determines a rotation angle for the magnet using the output signals, the rotation angle having a range of 0-360°.

Abstract: A magnetic field sensor includes at least two magnetoresistive (MR) sensor elements arranged in a half-bridge configuration. Each of the MR sensor elements includes a magnetic region having a magnetic anisotropy with a resultant magnetization. The magnetic anisotropy is created using an oblique incident deposition (OID) technique, with the magnetic regions being deposited at a nonzero deposition angle relative to a reference line oriented perpendicular to a surface of the magnetic field sensor. A system includes an encoder and the half-bridge configuration of the sensor elements. The encoder produces an external magnetic field, having predetermined magnetic variations in response to motion of the encoder, the magnetic field being detectable by the sensor elements. The resultant magnetization of the sensor elements is aligned by OID in a preferred direction perpendicular to the direction of the external magnetic field instead of utilizing a permanent magnet structure for providing a bias magnetic field.

Abstract: A system for determining angular position includes a magnet having at least four poles and an axis of rotation, wherein the magnet produces a magnetic field. A first magnetic field sensor produces a first output signal and a second magnetic field sensor produces a second output signal in response to the magnetic field. The magnetic field sensors are operated in a saturation mode in which the magnetic field sensors are largely insensitive to the field strength of the magnetic field. Thus, the first output signal is indicative of a first direction of the magnetic field and the second output signal is indicative of a second direction of the magnetic field. Methodology performed by a processing circuit entails combining the first and second output signals to obtain a rotation angle value of the magnet in which angular error from a stray magnetic field is at least partially canceled.

Abstract: A magnetic field sensor includes a magnetic sense element and a shield structure formed on a substrate. The shield structure fully encircles the magnetic sense element for suppressing stray magnetic fields along a first axis and a second axis, both of which are parallel to a surface of the substrate and perpendicular to one another. A magnetic field is oriented along a third axis perpendicular to the surface of the substrate, and the magnetic sense element is configured to sense a magnetic field along the first axis. A magnetic field deflection element, formed on the substrate proximate the magnetic sense element, redirects the magnetic field from the third axis into the first axis to be sensed as a measurement magnetic field by the magnetic sense element. At least two magnetic field sensors, each fully encircled by a shield structure, form a gradient unit for determining a magnetic field gradient.

Abstract: A sensor package includes a magnetic field sensor having first and second surfaces, the first surface being a sensing surface of the magnetic field sensor, a shield structure spaced apart from the magnetic field sensor, and a spacer interposed between the magnetic field sensor and the shield structure. The shield structure is configured to suppress stray magnetic fields in a plane parallel to first and second axes that are parallel to the sensing surface of the magnetic field sensor and perpendicular to one another. The shield structure may include a continuous sidewall having a central region, the spacer being surrounded by the continuous sidewall and the sensing surface of the magnetic field sensor being positioned outside of the central region. A system includes an encoder magnet and the sensor package, with the sensing surface of the magnetic field sensor facing the encoder magnet.

Abstract: A system includes a magnetic sense element for detecting an external magnetic field along a sensing axis and a magnetic field source proximate the magnetic sense element for providing an auxiliary magnetic field along the sensing axis. The magnetic sense element produces a first output signal having a magnetic field signal component, responsive to the external magnetic field, that is modulated by an auxiliary magnetic field signal component responsive to the auxiliary magnetic field. A processing circuit identifies from the first output signal an influence of a magnetic interference field on the auxiliary magnetic field signal component, the magnetic interference field being directed along a non-sensing axis of the magnetic sense element, and applies a correction factor to the magnetic field signal component to produce a second output signal in which the influence of the magnetic interference field is substantially removed.

Abstract: A system includes a magnet having an axis of rotation, the magnet being configured to produce a magnetic field. The system further includes a plurality of magnetoresistive sensor elements, each of the magnetoresistive sensor elements having a magnetic free layer configured to generate a vortex magnetization pattern in the magnetic free layer, and the magnetoresistive sensor elements being configured to produce output signals in response to the magnetic field. A rotation angle of a rotating element to which the magnet is coupled may be determined using the plurality of output signals.

Abstract: A system includes a magnet configured to produce a magnetic field, the magnet having an asymmetric magnetization configuration that produces a distinct feature in the magnetic field. The asymmetric magnetization configuration can be produced via an asymmetric physical characteristic, nonuniform magnetization strengths, nonuniform magnetization distributions, off-centered magnet, and so forth. Magnetic field sensors are configured to produce output signals in response to the magnetic field, the output signals being indicative of the distinct feature in the magnetic field. A processing circuit receives the output signals and determines a rotation angle for the magnet using the output signals, the rotation angle having a range of 0-360°.

Abstract: A system includes first and second magnetic sense elements for producing first and second output signals, respectively, in response to an external magnetic field along a sensing axis parallel to a plane of the first sense element, a magnetization direction of the second element being rotated in the plane relative to a magnetization direction of the first element. The second output signal differs from the first output signal in dependency to a magnetic interference field along a non-sensing axis of the first magnetic field. A processing circuit, receives the first and second output signals, identifies from a relationship between the first and second output signals an influence of the magnetic interference field on the first output signal, and applies a correction factor to the first output signal to produce a resultant output signal in which the influence of the magnetic interference field is substantially removed.

Abstract: A system for determining angular position includes a magnet having at least four poles and an axis of rotation, wherein the magnet produces a magnetic field. A first magnetic field sensor produces a first output signal and a second magnetic field sensor produces a second output signal in response to the magnetic field. The magnetic field sensors are operated in a saturation mode in which the magnetic field sensors are largely insensitive to the field strength of the magnetic field. Thus, the first output signal is indicative of a first direction of the magnetic field and the second output signal is indicative of a second direction of the magnetic field. Methodology performed by a processing circuit entails combining the first and second output signals to obtain a rotation angle value of the magnet in which angular error from a stray magnetic field is at least partially canceled.

Abstract: A system includes first and second magnetic sense elements for producing first and second output signals, respectively, in response to an external magnetic field along a sensing axis parallel to a plane of the first sense element, a magnetization direction of the second element being rotated in the plane relative to a magnetization direction of the first element. The second output signal differs from the first output signal in dependency to a magnetic interference field along a non-sensing axis of the first magnetic field. A processing circuit, receives the first and second output signals, identifies from a relationship between the first and second output signals an influence of the magnetic interference field on the first output signal, and applies a correction factor to the first output signal to produce a resultant output signal in which the influence of the magnetic interference field is substantially removed.