Patents by Inventor Steven Biellak

Steven Biellak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection
    Patent number: 6922236
    Abstract: Systems and methods for inspecting a surface of a specimen such as a semiconductor wafer are provided. A system may include an illumination system configured to direct a first beam of light to a surface of the specimen at an oblique angle of incidence and to direct a second beam of light to a surface of the specimen at a substantially normal angle. The system may also include a collection system configured to collect at least a portion of the first and second beams of light returned from the surface of the specimen. In addition, the system may include a detection system. The detection system may be configured to process the collected portions of the first and second beams of light. In this manner, a presence of defects on the specimen may be detected from the collected portions of the first and second beams of light.
    Type: Grant
    Filed: July 10, 2002
    Date of Patent: July 26, 2005
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Mehdi Vaez-Iravani, Stan Stokowski, Steven Biellak, Jamie Sullivan, Keith Wells, Mehrdad Nikoonahad